Common path mode fiber tip diffraction interferometer for wavefront measurement

Patent metadata

Field	Value
Publication number	US-11333487-B2
Application number	US-202016818050-A
Country	US
Kind code	B2
Filing date	Mar 13, 2020
Priority date	Oct 28, 2019
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

Reference and test waves are directed in a common path mode in a fiber tip diffraction interferometer. A first fiber can be used to generate the reference wave and a second fiber can be used to generate the test wave. Each fiber can include a single mode fiber tip that defines a wedge at an end without a coating on end surface or a tapered fiber tip. The fiber tip diffraction interferometer can include an aplanatic pupil imaging lens or system disposed to receive both the test wave and the reference wave and a sensor configured to receive both the test wave and the reference wave.

First claim

What is claimed is:

1. A fiber tip diffraction interferometer comprising:
a first fiber that generates a reference wave, wherein the first fiber includes a single mode fiber tip that defines a wedge at an end, wherein a flat surface of the wedge is not perpendicular to an axis of the fiber, and wherein the flat surface of the wedge does not have a coating thereon;
a second fiber or a pinhole that generates a test wave, wherein the test wave is focused to a point where the test wave is reflected, wherein the test wave and the reference wave are in a common path mode after the test wave is reflected, and wherein the reference wave is projected outward from the flat surface and the test wave is reflected from the flat surface;
an aplanatic imaging lens or a pupil imaging system disposed to receive both the test wave and the reference wave; and
a sensor configured to receive both the test wave and the reference wave, wherein the sensor is disposed on an opposite side of the aplanatic imaging lens or a pupil imaging system from the first fiber.

2. The fiber tip diffraction interferometer of claim 1 , wherein the flat surface is disposed at an angle from 14 degrees and 25 degrees relative to the axis of the fiber.

3. The fiber tip diffraction interferometer of claim 1 , wherein the fiber has a diameter of 125 μm.

4. The fiber tip diffraction interferometer of claim 1 , wherein the surface roughness of the flat surface is from 0 nm RMS to 0.8 nm RMS.

5. The fiber tip diffraction interferometer of claim 4 , wherein a surface roughness of the flat surface is 0.4 nm RMS or less.

6. The fiber tip diffraction interferometer of claim 1 , wherein the fiber defines an outer circumferential surface, and wherein at least part of the outer circumferential surface does not have a coating thereon.

7. The fiber tip diffraction interferometer of claim 1 , wherein the fiber defines a first diameter at a point adjacent where the wedge is disposed and a second diameter at a non-zero point away from the first diameter, wherein the first diameter and the second diameter are the same.

8. The fiber tip diffraction interferometer of claim 1 , wherein the fiber defines a first diameter at a point adjacent where the wedge is disposed and a second diameter at a non-zero point away from the first diameter, wherein the first diameter is larger than the second diameter.

9. The fiber tip diffraction interferometer of claim 8 , wherein the first diameter is at least 1 mm and the second diameter is 125 μm.

10. The fiber tip diffraction interferometer of claim 1 , wherein the first fiber and/or the second fiber is silica, and wherein a core of the first fiber and/or the second fiber is doped.

11. The fiber tip diffraction interferometer of claim 1 , further comprising an imaging system, wherein the test wave passes from the second fiber through the imaging system.

12. The fiber tip diffraction interferometer of claim 1 , further comprising a calibrated optics in a path of the test wave configured to calibrate a sphericity of the test wave and the reference wave.

13. The fiber tip diffraction interferometer of claim 1 , further comprising a laser in optical communication with the first fiber and the second fiber.

14. The fiber tip diffraction interferometer of claim 13 , further comprising:
a splitter in optical communication with the laser, wherein the splitter forms a first laser path to the second fiber or the pinhole and a second laser path to the first fiber;
a first polarization control unit along the first laser path;
a second polarization control unit along the second laser path;
a power control unit along the second laser path;
a time delay control unit along the second laser path; and
a phase-shift control unit along the second laser path.

15. A method comprising:
generating a reference wave with a first fiber, wherein the first fiber includes a single mode fiber tip that defines a wedge at an end, wherein a flat surface of the wedge is not perpendicular to an axis of the fiber, wherein the flat surface of the wedge does not have a coating thereon, and wherein the reference wave is projected outward from the flat surface;
generating a test wave with a second fiber or a pinhole, wherein the test wave is directed at the flat surface of the first fiber;
reflecting the test wave from the flat surface to be in a direction of the reference wave, wherein the test wave and the reference wave are in a common path mode after the reflecting; and
directing the reference wave and the test wave at a 2D sensor after the reflecting.

16. The method of claim 15 , further comprising directing the test wave and the reference wave through an aplanatic imaging lens or system.

17. The method of claim 15 , further comprising calibrating a diffraction wavefront of the test wave using a calibrated optics.

Assignees

• Kla Corp

Inventors

• Huang Haifeng
• Shi Rui-Fang
• Wack Dan
• Kestner Robert

Classifications

• G01B9/02039

  by matching the wavefront with a particular object surface shape · CPC title

• G01B11/255

  for measuring radius of curvature {(measuring diameter G01B11/08)} · CPC title

• G01B2290/70

  Using polarization in the interferometer · CPC title

• G01B9/02074 Primary

  of the detector · CPC title

• G01M11/0271 Primary

  by using interferometric methods · CPC title