Vacuum pump and control apparatus associated with vacuum pump

Patent metadata

Field	Value
Publication number	US-11333153-B2
Application number	US-201716467416-A
Country	US
Kind code	B2
Filing date	Dec 8, 2017
Priority date	Dec 16, 2016
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.

First claim

What is claimed is:

1. A vacuum pump, comprising:
a vacuum pump main body comprising a housing in which an inlet port and an outlet port are formed;
a control apparatus provided with a control board portion equipped with a control circuit for controlling operations performed in the vacuum pump main body;
a regenerative resistor for treating regenerative energy generated by controlling the operations performed in the vacuum pump main body; and
a hollow portion having an opening portion on an outer peripheral surface of the housing of the vacuum pump main body,
wherein the control board portion is disposed inside a control board portion casing, which encloses the control board portion, and
the regenerative resistor is inserted into the hollow portion, disposed in the vacuum pump main body and connected to the control board portion by a wire.

2. The vacuum pump according to claim 1 , wherein
the housing is configured with at least an inlet port-side casing portion and an outlet port-side casing portion, and
the regenerative resistor is disposed in the outlet port-side casing portion.

3. The vacuum pump according to claim 2 , wherein the outlet port-side casing portion is controlled to keep a predetermined temperature.

4. The vacuum pump according to claim 3 , wherein the control board portion casing is disposed under the outlet port-side casing portion and integrated with the vacuum pump main body.

5. The vacuum pump according to claim 4 , wherein a predetermined gap for thermal insulation is provided between the outlet port-side casing portion and the control board portion casing.

6. The vacuum pump according to claim 5 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

7. The vacuum pump according to claim 4 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

8. The vacuum pump according to claim 3 , wherein a predetermined gap for thermal insulation is provided between the outlet port-side casing portion and the control board portion casing.

9. The vacuum pump according to claim 3 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

10. The vacuum pump according to claim 2 , wherein the control board portion casing is disposed under the outlet port-side casing portion and integrated with the vacuum pump main body.

11. The vacuum pump according to claim 2 , wherein a predetermined gap for thermal insulation is provided between the outlet port-side casing portion and the control board portion casing.

12. The vacuum pump according to claim 11 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

13. The vacuum pump according to claim 2 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

14. The vacuum pump according to claim 10 , wherein a predetermined gap for thermal insulation is provided between the outlet port-side casing portion and the control board portion casing.

15. The vacuum pump according to claim 10 , further comprising an outer covering body for covering at least a part of a section of the outlet port-side casing portion in which the hollow portion housing the regenerative resistor is disposed.

16. A control apparatus for controlling operations performed in a vacuum pump main body, the control apparatus comprising:
a regenerative resistor configured to treat regenerative energy generated by controlling the operations performed in the vacuum pump main body; and
a control board portion equipped with a control circuit for controlling the operations performed in the vacuum pump main body, wherein the control board portion is disposed inside a control board portion casing, which encloses the control board portion, and
wherein the regenerative resistor is inserted into a hollow portion of a housing of the vacuum pump main body through an opening portion on an outer peripheral surface of the housing and connected to the control board portion by a wire, wherein the housing defines an inlet port and an outlet port.

17. The control apparatus according to claim 16 , wherein the control board portion casing is disposed under an outlet port-side casing portion of the vacuum pump main body housing and integrated with the vacuum pump main body.

18. The control apparatus according to claim 17 , wherein a predetermined gap for thermal insulation is provided between the outlet port-side casing portion and the control board portion casing.

Assignees

• Edwards Japan Ltd

Inventors

• Omori Hideki
• Sun Yanbin
• SAEGUSA Kengo
• Sakaguchi Yoshiyuki

Classifications

• F04D29/5813

  Cooling the control unit · CPC title

• F04D19/04 Primary

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title

• F04D25/068

  Mechanical details of the pump control unit (pump control details F04D27/00) · CPC title

• F05D2260/20

  Heat transfer, e.g. cooling · CPC title