Tube body and pumping device

Patent metadata

Field	Value
Publication number	US-11333142-B2
Application number	US-202016775468-A
Country	US
Kind code	B2
Filing date	Jan 29, 2020
Priority date	Feb 8, 2019
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

There is disclosed a hollow tube body used for a liquid feeding member and deformable by pressurization, wherein: an axial cross-section of the tube body has two opposing long side parts and two opposing short side parts; four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward; each of the long side parts has a recessed part recessed inward and continuing from the corner portions; and a portion other than the corner portions of each of the short side parts is in a flat shape.

First claim

What is claimed is:

1. A hollow tube body used for a liquid feeding member, the hollow tube body having two end parts thereof and being connected, at the two end parts thereof, to a flow path, and made of a flexible material to be deformable, wherein:
the hollow tube body is configured to be deformable by pressurization and depressurization of an outside space formed between (a) an outside tube body arranged outside the hollow tube body and (b) the hollow tube body, the outside space being disposed along the hollow tube body between the two end parts;
the hollow tube body is able to repeatedly perform feeding of liquid from an inside space of the hollow tube body and replenishment of the liquid into the inside space by deformation caused by the pressurization and depressurization of the outside space in a state in which the hollow tube body deforms by the pressurization and depressurization between the two end parts;
an axial cross-section of the hollow tube body has two opposing long side parts and two opposing short side parts during the pressurization and depressurization;
four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward during the pressurization and depressurization;
each of the long side parts has a recessed part recessed inward and continuing from the corner portions during the pressurization and depressurization; and
a portion other than the corner portions of each of the short side parts is in a flat shape.

2. The hollow tube body according to claim 1 , wherein
the recessed part of the long side part has a flat part.

3. The tube hollow body according to claim 1 , wherein
the recessed part of the long side part has a curved shape part protruding inward.

4. The hollow tube body according to claim 1 , wherein
at least a middle of the recessed part of the long side part is larger in thickness than other portions of the hollow tube body.

5. The tube body according to claim 1 , wherein, during the pressurization and depressurization,
a straight line length of the recessed part of the long side part is 20 to 60% of a length of the long side part;
a straight line length of the recessed part of the long side part is 100 to 140% of a length of the portion in the flat shape of each of the short side parts; and
a length of the long side part is 150 to 190% of a distance between the recessed parts of the long side parts.

6. The hollow tube body according to claim 1 , wherein
in a state where the liquid exists in the inside space,
during pressurization of the outside space, the hollow tube body starts to crush inward at the recessed parts of the long sides while the four corner portions protrude outward and before the flat shape of the short side parts deform.

7. A pumping device which replenishes liquid from a liquid feeding source, the pumping device comprising:
a hollow tube body used for a liquid feeding member, the hollow tube body having two end parts thereof and being connected, at the two end parts thereof, to a flow path, and made of a flexible material to be deformable, and
an outside tube body, wherein:
the hollow tube body is configured to be deformable by pressurization and depressurization of an outside space formed between (a) the outside tube body arranged outside the hollow tube body and (b) the hollow tube body, the outside space being disposed along the hollow tube body between the two end parts,
the hollow tube body is able to repeatedly perform feeding of liquid from an inside space of the hollow tube body and replenishment of the liquid into the inside space by deformation caused by the pressurization and depressurization of the outside space in a state in which the hollow tube body deforms by the pressurization and depressurization between the two end parts;
an axial cross-section of the hollow tube body has two opposing long side parts and two opposing short side parts during the pressurization and depressurization;
four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward during the pressurization and depressurization;
each of the long side parts has a recessed part recessed inward and continuing from the corner portions during the pressurization and depressurization;
a portion other than the corner portions of each of the short side parts is in a flat shape; and
the pumping device is configured to feed liquid in the hollow tube body by supplying gas into the outside space, and replenish the liquid from the liquid feeding source into the hollow tube body by venting gas in the outside space to the atmosphere.

8. The pumping device according to claim 7 , wherein
the recessed part of the long side part has a flat part.

9. The pumping device according to claim 7 , wherein
the recessed part of the long side part has a curved shape part protruding inward.

10. The pumping device according to claim 7 , wherein
at least a middle of the recessed part of the long side part is larger in thickness than other portions of the tube body.

11. The pumping device according to claim 7 , wherein, during the pressurization and depressurization,
a straight line length of the recessed part of the long side part is 20 to 60% of a length of the long side part;
a straight line length of the recessed part of the long side part is 100 to 140% of a length of the portion in the flat shape of each of the short side parts; and
a length of the long side part is 150 to 190% of a distance between the recessed parts of the long side parts.

12. The pumping device according to claim 7 , wherein
in a state where the liquid exists in the inside space,
during pressurization of the outside space, the hollow tube body starts to crush inward at the recessed parts of the long sides while the four corner portions protrude outward and before the flat shape of the short side parts deform.

Assignees

• Tokyo Electron Ltd

Inventors

• Ishimaru Daisuke
• Hashimoto Katsuya
• Takaki Yasuhiro

Classifications

• F04B43/0072 Primary

  of tubular flexible members · CPC title

• F04B43/08

  having tubular flexible members (F04B43/12 takes precedence) · CPC title

• F04B43/10

  Pumps having fluid drive · CPC title

• F04B43/084

  the tubular member being deformed by stretching or distortion · CPC title

• F04B43/113 Primary

  the actuating fluid being controlled by at least one valve · CPC title