Gas distribution assembly mounting for fragile plates to prevent breakage

Patent metadata

Field	Value
Publication number	US-11332828-B2
Application number	US-202017061844-A
Country	US
Kind code	B2
Filing date	Oct 2, 2020
Priority date	Oct 4, 2019
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

Apparatus and methods for processing substrates using a gas injector unit with a quartz plate are provided. The gas injector unit comprises an injector body with a first opening extending through the injector body. The first opening has a nut portion and a clamp portion. A nut is positioned within the nut portion spaced from the injector body by a spring. A clamp is positioned within the clamp portion, which may be remotely located on a hub for connection with the injector body. A screw extends through the opening in the clamp, a portion of the injector body, the spring and into a connection portion of the nut. Gas distribution assemblies and processing chambers incorporating the gas injector unit are also described.

First claim

What is claimed is:

1. A gas injector unit comprising:
an injector body having a front surface and a back surface defining a thickness, the front surface having a plurality of apertures extending into the injector body to allow a flow of gas from within the injector body to exit through the front surface;
a first opening extending from the back surface to the front surface of the injector body, the first opening having a nut portion adjacent the back surface and a clamp portion adjacent the front surface;
a quartz plate having a front surface and a back surface, the back surface positioned adjacent the front surface of the injector body, the quartz plate having a plurality of apertures to allow a flow of gas to pass through the quartz plate;
a first nut located within the nut portion of the first opening;
a first clamp located within the clamp portion of the first opening, the first clamp having a clamp body with an opening therethrough and a support surface extending a distance from the clamp body, the support surface in contact with an edge of the quartz plate;
a first spring located within the nut portion of the first opening between the first nut and the injector body; and
a first screw extending through the opening in the first clamp, a portion of the injector body, the first spring and into a connection portion of the first nut.

2. The gas injector unit of claim 1 , further comprising:
a second opening extending from the back surface to the front surface of the injector body, the second opening having a nut portion adjacent the back surface;
a second nut located within the nut portion of the second opening; and
a second spring located within the nut portion of the second opening between the second nut and the injector body.

3. The gas injector unit of claim 2 , further comprising:
a second clamp located within a clamp portion of the second opening located adjacent the front surface of the injector body, the second clamp having a clamp body with an opening therethrough and a support surface extending a distance from the clamp body, the support surface in contact with an edge of the quartz plate; and
a second screw extending through the opening in the second clamp, a portion of the injector body, the second spring and into a connection portion of the second nut.

4. The gas injector unit of claim 3 , wherein the injector body has a wedge-shape with an inner peripheral edge and an outer peripheral edge, the first opening located adjacent the outer peripheral edge and the second open adjacent the inner peripheral edge.

5. The gas injector unit of claim 4 , further comprising a hub connected to the inner peripheral edge of the injector body.

6. The gas injector unit of claim 5 , wherein the second opening extends through the injector body and the hub so that the clamp portion of the second opening is in the hub and the second screw further extends through the hub.

7. The gas injector unit of claim 1 , wherein the first nut comprises an anti-rotation nut.

8. The gas injector unit of claim 7 , wherein the nut portion of the first opening and the first nut have complementary shapes that restrict rotational movement of the first nut within the first opening.

9. The gas injector unit of claim 1 , wherein the first spring comprises a wave spring.

10. The gas injector unit of claim 1 , wherein the injector body has a round shape and the first opening is adjacent an outer edge of the injector body.

11. The gas injector unit of claim 1 , wherein the quartz plate has a thickness defined by the front surface and back surface in the range of about 5 mm to about 25 mm.

12. The gas injector unit of claim 1 , wherein the support surface of the first clamp provides an interference fit with the quartz plate.

13. A gas distribution assembly comprising:
a central hub having at least one opening therethrough having a clamp portion adjacent a bottom surface of the hub; and
a plurality of injector units arranged around the central hub, at least one of the injector units comprising:
an injector body having a front surface and a back surface defining a thickness, the front surface having a plurality of apertures extending into the injector body to allow a flow of gas from within the injector body to exit through the front surface;
a first opening extending from the back surface to the front surface of the injector body, the first opening having a nut portion adjacent the back surface and a clamp portion adjacent the front surface;
a quartz plate having a front surface and a back surface, the back surface positioned adjacent the front surface of the injector body, the quartz plate having a plurality of apertures to allow a flow of gas to pass through the quartz plate;
a first nut located within the nut portion of the first opening;
a first clamp located within the clamp portion of the first opening, the first clamp having a clamp body with an opening therethrough and a support surface extending a distance from the clamp body, the support surface in contact with an edge of the quartz plate;
a first spring located within the nut portion of the first opening between the first nut and the injector body; and
a first screw extending through the opening in the first clamp, a portion of the injector body, the first spring and into a connection portion of the first nut;
a second opening extending from the back surface to the front surface of the injector body aligned with the opening in the central hub, the second opening having a nut portion adjacent the back surface of the injector body;
a second nut located within the nut portion of the second opening;
a second spring located within the nut portion of the second opening between the second nut and the injector body;
a second clamp located within the clamp portion of the central hub, the second clamp having a clamp body with an opening therethrough and a support surface extending a distance from the clamp body, the support surface in contact with an edge of the quartz plate; and
a second screw extending through the opening in the second clamp, the central hub, a portion of the injector body, the second spring and into a connection portion of the second nut.

14. The gas distribution assembly of claim 13 , wherein the injector body has a wedge-shape with an inner peripheral edge and an outer peripheral edge, the first opening located adjacent the outer peripheral edge and the second open adjacent the inner peripheral edge.

15. The gas distribution assembly of claim 13 , wherein the first nut comprises an anti-rotation nut.

16. The gas distribution assembly of claim 15 , wherein the nut portion of the first opening and the first nut have complementary shapes that restrict rotational movement of the first nut within the first opening.

17. The gas distribution assembly of claim 16 , wherein the nut portion of the second opening and the second nut have complementary shapes that restrict rotational movement of the second nut within the second opening.

18. The gas distribution assembly of claim 13 , wherein one or more of the first spring or second spring comprises a wave spring.

19. The gas distribution assembly of claim 13 , wherein each of the injector units comprises the quartz plate, first opening, second opening, first nut, second nut, first clamp, second clamp, first spring, second spring, first screw and second screw.

20. A processing chamber comprising:
a gas distribution assembly comprising:
a central hub having at least one opening therethrough having a clamp portion

Assignees

• Applied Materials Inc

Inventors

• Griffin Kevin
• Sun Guangwei

Classifications

• C23C16/4584

  the substrate being rotated · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• C23C16/45551

  for relative movement of the substrate and the gas injectors or half-reaction reactor compartments · CPC title