Mono-crystalline silicon growth apparatus

Patent metadata

Field	Value
Publication number	US-11326272-B2
Application number	US-201916727937-A
Country	US
Kind code	B2
Filing date	Dec 27, 2019
Priority date	Dec 28, 2018
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

A mono-crystalline silicon growth apparatus includes a furnace, a support base, a crucible, a heating module disposed outside of the crucible, and a heat adjusting module above the crucible. The heat adjusting module includes a diversion tube, a plurality of heat preservation sheets, and a hard shaft. The diversion tube includes a tube body and a carrying body connected to the tube body. The heat preservation sheets are sleeved around the tube body and are stacked and disposed on the carrying body. The hard shaft passes through the tube body and does not rotate. The hard shaft includes a water flow channel disposed therein and a clamping portion configured to clamp a seed crystal. Therefore, a fluid injected into the water flow channel takes away the heat near the clamping portion. A heat adjusting module and a hard shaft of the mono-crystalline silicon growth apparatus are provided.

First claim

What is claimed is:

1. A mono-crystalline silicon growth apparatus, comprising:
a furnace;
a support base disposed in the furnace;
a crucible disposed on the support base, wherein both the support base and the crucible do not rotate relative to a heating module; and
a heat adjusting module disposed in the furnace and above the crucible, wherein the heat adjusting module includes:
a diversion tube including a tube body and a carrying body, wherein one end of the tube body is disposed on the furnace and another end of the tube body is connected to the carrying body, the carrying body surrounds the tube body, and the tube body is arranged above the crucible;
a plurality of heat preservation sheets which are annular and sleeved around the tube body, wherein the heat preservation sheets are stacked and disposed on the carrying body; and
a shaft passing through the tube body, wherein the shaft does not rotate relative to the furnace, and wherein a water flow channel is disposed in the shaft, the shaft includes a clamping portion and at least a part of the clamping portion is disposed in the crucible to be configured to clamp a seed crystal,
wherein a gas flow channel is disposed in the shaft, the water flow channel spirals surroundingly around the gas flow channel, and the clamping portion is adjacent to the water flow channel and the gas flow channel so that the shaft is configured to inject flowing water into the water flow channel and to inject flowing gas into the gas flow channel to take away heat near the clamping portion.

2. The mono-crystalline silicon growth apparatus according to claim 1 , wherein each of the heat preservation sheets has a thermal radiation reflective rate greater than or equal to 70%, and wherein only less than 10% of heat at one side of the heat preservation sheets passes through the heat preservation sheets to another side of the heat preservation sheets.

3. The mono-crystalline silicon growth apparatus according to claim 1 , wherein the shaft is configured to move back and forth along the axial direction of the tube body with a pulling speed and the pulling speed is less than or equal to 50 mm/hr.

4. The mono-crystalline silicon growth apparatus according to claim 1 , wherein the heating module includes a first heating unit, a second heating unit, and a third heating unit, and the first heating unit, the second heating unit, and the third heating unit are respectively disposed at positions with different heights corresponding to the axial direction.

5. The mono-crystalline silicon growth apparatus according to claim 4 , wherein the first heating unit surrounds and faces toward an upper half of the crucible, the second heating unit surrounds and faces toward a lower half of the crucible, and the third heating unit is disposed under the crucible.

6. A heat adjusting module of a mono-crystalline silicon growth apparatus configured to be disposed in a furnace, comprising:
a diversion tube including a tube body and a carrying body, wherein one end of the tube body is configured to be disposed on the furnace and another end of the tube body is connected to the carrying body, and the carrying body surrounds the tube body;
a plurality of heat preservation sheets which are annular and sleeved around the tube body, wherein the heat preservation sheets are stacked and disposed on the carrying body; and
a shaft passing through the tube body, wherein the shaft does not rotate relative to the furnace, and wherein a water flow channel is disposed in the shaft, the shaft includes a clamping portion and at least a part of the clamping portion is disposed in the crucible to be configured to clamp a seed crystal,
wherein a gas flow channel is disposed in the shaft, the water flow channel spirals surroundingly around the gas flow channel, and the clamping portion is adjacent to the water flow channel and the gas flow channel so that the shaft is configured to inject flowing water into the water flow channel and to inject flowing gas into the gas flow channel to take away heat near the clamping portion.

7. A shaft of a mono-crystalline silicon growth apparatus configured to be unrotatably disposed in a furnace, comprising:
a gas flow channel disposed in the shaft;
a water flow channel disposed in the shaft, wherein the water flow channel spirals surroundingly around the gas flow channel; and
a clamping portion adjacent to the water flow channel and the gas flow channel and configured to clamp a seed crystal, wherein the shaft is configured to inject flowing water into the water flow channel and to inject flowing gas into the gas flow channel to take away heat near the clamping portion.

Assignees

• Globalwafers Co Ltd

Inventors

• Chen Chun-Hung
• Wang Hsing-Pang
• Hsu Wen-Ching
• Li I-Ching

Classifications

• C30B29/06

  Silicon · CPC title

• C30B15/14 Primary

  Heating of the melt or the crystallised materials · CPC title

• C30B15/32 Primary

  Seed holders, e.g. chucks · CPC title

• C30B15/10

  Crucibles or containers for supporting the melt · CPC title

• C30B15/206 Primary

  the thermal history of growing the ingot · CPC title