Deposition mask and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11326258-B2
Application number	US-201715668982-A
Country	US
Kind code	B2
Filing date	Aug 4, 2017
Priority date	Nov 30, 2016
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

The present disclosures provide a deposition mask and a method of manufacturing the same. The disclosed deposition mask may include: a deposition portion including a plurality of deposition patterns; and a boundary portion surrounding the deposition portion and including a first region and a second region extending from the first region. The boundary portion may have a thickness thicker than that of the deposition portion. Through this, it is possible to prevent a thermal deformation of the mask which may occur when the mask and mask frame are welded to each other.

First claim

What is claimed is:

1. A mask for processing thin films, comprising:
a deposition portion having a plurality of deposition patterns; and
a boundary portion surrounding the deposition portion and having a first region, and a second region extending from the first region and separately formed from the first region;
a welding line provided to surround the deposition portion in the boundary portion; and
a mask frame attached to the boundary portion of the mask along the welding line,
wherein the boundary portion has a thickness greater than that of the deposition portion,
wherein the deposition patterns have a shape tapered towards an opposite surface of the deposition pattern from the mask frame, and the first region of the boundary portion has a shape tapered towards an opposite surface of the first region of the boundary portion from the mask frame, and
wherein the welding line comprises of four welding lines that respectively each run along a side of the deposition portion and are separated from one another in corners of the boundary portion, the separation of the four welding lines in the corners of the boundary portion being used when a glass substrate is disposed to cover areas corresponding to the corners of the boundary portion.

2. The mask of claim 1 , wherein the first region has a thickness equal to or greater than that of the deposition portion.

3. The mask of claim 1 , wherein the first region has a maximum width wider than that of the second region.

4. The mask of claim 1 , wherein the mask frame is attached to a first surface of the second region.

5. The mask of claim 4 , wherein the welding line is provided on a second surface of the first region.

6. The mask of claim 1 , wherein the welding line includes a solid line shape or a dotted line shape.

7. A mask for processing thin films, comprising:
a deposition portion having a plurality of deposition patterns;
a boundary portion surrounding the deposition portion and having first and second regions, wherein the second region extends from the first region and is separately formed from the first region, and the boundary portion has a thickness greater than that of the deposition portion;
a welding line provided to surround the deposition portion in the boundary portion; and
a mask frame attached to a first surface of the second region along the welding line,
wherein the deposition patterns have a shape tapered towards an opposite surface of the deposition pattern from the mask frame, and the first region of the boundary portion has a shape tapered towards an opposite surface of the first region of the boundary portion from the mask frame, and
wherein the welding line comprises of four welding lines that respectively each run along a side of the deposition portion and are separated from one another in corners of the boundary portion, the separation of the four welding lines in the corners of the boundary portion being used when a glass substrate is disposed to cover areas corresponding to the corners of the boundary portion.

8. The mask of claim 7 , wherein the welding line is on a second surface of the first region.

Assignees

• Lg Display Co Ltd

Inventors

• Yoo Myungjae
• Lim Hyuntaek
• Yu Huiseong
• Hwang Joohwan

Classifications

• C23C14/042 Primary

  using masks · CPC title

• C25D1/10 Primary

  Moulds; Masks; Masterforms · CPC title

• C23C16/042

  using masks · CPC title

• B23K26/244 Primary

  Overlap seam welding · CPC title

• C23C18/1633 Primary

  Process of electroless plating · CPC title