Electrically rotatable antennas formed from an optically tunable material

Patent metadata

Field	Value
Publication number	US-11322684-B2
Application number	US-201916541866-A
Country	US
Kind code	B2
Filing date	Aug 15, 2019
Priority date	Aug 15, 2019
Publication date	May 3, 2022
Grant date	May 3, 2022

Abstract

An apparatus includes two or more electrically rotatable antennas providing a reconfigurable metasurface, each of the electrically rotatable antennas including a disk of optically tunable material. The apparatus also includes a control circuit including a plurality of switches each coupled to (i) one of a plurality of electrodes, the plurality of electrodes being arranged proximate different portions of at least one surface of each of the disks of optically tunable material and (ii) to at least one of a current source and a ground voltage. The control circuit is configured to modify states of portions of the optically tunable material in each of the disks of optically tunable material utilizing current supplied between at least two of the plurality of electrodes to adjust reflectivity of the portions of the optically tunable material to dynamically reconfigure respective antenna shape configurations of each of the electrically rotatable antennas.

First claim

What is claimed is:

1. A semiconductor structure comprising:
a substrate;
a disk of optically tunable material disposed over the substrate; and
a plurality of electrodes disposed proximate different portions of the disk of optically tunable material, each of the plurality of electrodes being coupled to a switch providing at least one of a current source and a ground voltage;
wherein the plurality of electrodes are configured to modify a state of at least a portion of the disk of optically tunable material to dynamically reconfigure an antenna shape configuration of an electrically rotatable antenna comprising the disk of optically tunable material; and
wherein the plurality of electrodes comprise two or more electrodes disposed adjacent an outer edge lateral surface of the disk of optically tunable material.

2. The semiconductor structure of claim 1 , wherein the optically tunable material comprises a chalcogenide phase-change material, and wherein the plurality of electrodes are configured to modify the state of the chalcogenide phase-change material via heating to change the chalcogenide phase-change material between an amorphous and a crystalline phase.

3. The semiconductor structure of claim 2 , wherein the chalcogenide phase-change material comprises at least one of germanium antinomy telluride, germanium telluride, antimony telluride and silver antimony telluride.

4. The semiconductor structure of claim 1 , wherein the optically tunable material comprises an electrically tunable plasmonic material.

5. The semiconductor structure of claim 1 , wherein the optically tunable material comprises a metal-insulator transition material.

6. The semiconductor structure of claim 1 , wherein the plurality of electrodes comprises at least a first electrode disposed proximate a center of a top surface of the disk of optically tunable material and the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

7. The semiconductor structure of claim 1 , further comprising:
a first dielectric layer disposed between the substrate and the disk of optically tunable material;
a second dielectric layer disposed over the disk of optically tunable material; and
a transparent conductor disposed over the second dielectric layer;
wherein the plurality of electrodes comprise at least a first electrode disposed over the transparent conductor and the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

8. The semiconductor structure of claim 7 , further comprising a metal mirror disposed between the substrate and the first dielectric layer.

9. The semiconductor structure of claim 1 , further comprising:
a first dielectric layer disposed between the substrate and the disk of optically tunable material;
a second dielectric layer disposed over the disk of optically tunable material; and
a metal mirror disposed between the substrate and the first dielectric layer;
wherein the plurality of electrodes comprise at least a first electrode embedded in the substrate and the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

10. The semiconductor structure of claim 1 , wherein the plurality of electrodes comprise at least a first electrode disposed over a top surface of the disk of optically tunable material and the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material, and further comprising:
a first dielectric layer disposed between the substrate and the disk of optically tunable material;
a second dielectric layer disposed over the top surface of the disk of optically tunable material surrounding the first electrode; and
a metal mirror disposed between the substrate and the first dielectric layer.

11. The semiconductor structure of claim 1 , wherein at least one of the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material is further disposed adjacent a portion of a top surface of the disk optically tunable material.

12. The semiconductor structure of claim 1 , wherein first and second ones of the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material are further disposed adjacent respective first and second portions of the top surface of the disk of optically tunable material.

13. The semiconductor structure of claim 1 , wherein the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material are uniformly spaced around the outer edge lateral surface of the disk of optically tunable material.

14. The semiconductor structure of claim 1 , wherein at least first and second ones of the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material are non-uniformly spaced around the outer edge lateral surface of the disk of optically tunable material.

15. The semiconductor structure of claim 1 , wherein the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material comprise at least eight electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

16. The semiconductor structure of claim 1 , wherein the plurality of electrodes further comprises at least one electrode disposed proximate a center of a top surface of the disk of optically tunable material, and wherein the plurality of electrodes are configured to modify the state of two or more portions of the disk of optically tunable material disposed between the center of the top surface of the disk of optically tunable material and the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

17. The semiconductor structure of claim 16 , wherein the two or more portions of the disk of optically tunable material comprise two or more line segments connecting the center of the top surface of the disk of optically tunable material with two or more points on the outer edge lateral surface of the disk of optically tunable material where the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material are located.

18. The semiconductor structure of claim 1 , wherein the plurality of electrodes are configured to modify the state of at least one portion of the disk of optically tunable material disposed between the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material.

19. The semiconductor structure of claim 18 , wherein said at least one portion of the disk of optically tunable material comprises a line segment connecting two or more points on the outer edge lateral surface of the disk of optically tunable material where two of the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material are located.

20. The semiconductor structure of claim 1 , wherein the disk of optically tunable material comprises optically tunable material etched into a pattern on a background of a dielectric material, the pattern defining current pathways between the two or more electrodes disposed adjacent the outer edge lateral surface of the disk of optically tunable material and one or more other ones of the plurality of electrodes.

Assignees

• IBM

Inventors

• Falk Abram L
• Rosenberg Jessie Carrigan
• Farmer Damon Brooks
• Lai Kafai

Classifications

• H01Q1/2283

  mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package · CPC title

• H01Q15/0086

  said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials · CPC title

• H01Q3/01

  varying the shape of the antenna or antenna system · CPC title

• H01Q3/44

  varying the electric or magnetic characteristics of reflecting, refracting, or diffracting devices associated with the radiating element · CPC title

• H01L45/1213 Primary

  Electricity · mapped topic