Tunable nano-antenna and methods of manufacturing and operating the same

Patent metadata

Field	Value
Publication number	US-9904077-B2
Application number	US-201414916052-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Sep 2, 2013
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

Provided are an optical nano-antenna including a tunable material layer and methods of manufacturing and operating the optical nano-antenna. The optical nano-antenna includes a substrate; and a plurality of material layers sequentially laminated on the substrate. The plurality of material layers include at least one tunable material layer and at least one slot. A first tunable material layer and a metal layer are sequentially laminated on the substrate, and a first slot is formed in the metal layer. A metal layer and a first tunable material layer are sequentially laminated on the substrate, and a first slot is formed in the metal layer. A first tunable material layer, a metal layer, and a second tunable material layer are sequentially laminated on the substrate, and a first slot is formed in the metal layer. A second slot tilted with respect to the first slot is formed in the metal layer.

First claim

The invention claimed is:

1. An optical antenna comprising:
a substrate; and
a plurality of material layers sequentially laminated on the substrate;
wherein the plurality of material layers comprise at least one tunable material layer, at least one metal layer, and at least one slot in at least one of the at least one metal layer.

2. The optical antenna of claim 1 , wherein:
the at least one tunable material layer comprises a first tunable material layer,
the at least one metal layer comprises a first metal layer,
the first tunable material layer and the first metal layer are sequentially laminated on the substrate, and
a first slot is formed in the first metal layer.

3. The optical antenna of claim 2 , wherein a second slot, tilted with respect to the first slot, is formed in the first metal layer.

4. The optical antenna of claim 1 , wherein:
the at least one metal layer comprises a first metal layer,
the at least one tunable material layer comprises a first tunable material layer,
the first metal layer and the first tunable material layer are sequentially laminated on the substrate, and
a first slot is formed in the first metal layer.

5. The optical antenna of claim 4 , wherein a second slot, tilted with respect to the first slot, is formed in the first metal layer.

6. The optical antenna of claim 1 , wherein:
the at least one tunable material layer comprises a first and a second tunable material layer,
the at least one metal layer comprises a first metal layer,
the first tunable material layer, the first metal layer, and the second tunable material layer are sequentially laminated on the substrate, and
a first slot is formed in the first metal layer.

7. The optical antenna of claim 6 , wherein a second slot, tilted with respect to the first slot, is formed in the first metal layer.

8. The optical antenna of claim 1 , wherein the at least one tunable material layer is one of a liquid crystal layer, a phase change material layer, and a graphene layer.

9. A method of manufacturing an optical antenna, the method comprising:
forming a plurality of material layers comprising a metal layer and a first tunable material layer on a substrate; and
forming a first slot in the metal layer.

10. The method of claim 9 , wherein the forming of the plurality of material layers comprises sequentially laminating the first tunable material layer and the metal layer on the substrate.

11. The method of claim 9 , wherein the forming of the plurality of material layers comprises sequentially laminating the metal layer and the first tunable material layer on the substrate.

12. The method of claim 9 , wherein the forming of the plurality of material layers comprises sequentially laminating the first tunable material layer, the metal layer, and a second tunable material layer on the substrate.

13. The method of claim 9 , further forming a second slot in the metal layer for changing a traveling direction of light.

14. The method of claim 9 , wherein the first tunable material layer is one of a liquid crystal layer, a phase change material layer, and a graphene layer.

15. A method of operating an optical antenna comprising a plurality of material layers sequentially laminated on a substrate, the plurality of material layers comprising at least one tunable material layer, at least one metal layer, and at least one slot in at least one of the at least one metal layer, the method comprising:
changing an optical characteristic of at least one of the at least one tunable material layer by applying an operation signal to the at least one of the at least one tunable material layer.

16. The method of claim 15 , wherein the operation signal is one of an electrical signal, an optical signal, and a thermal signal.

17. The method of claim 15 , wherein:
the plurality of material layers comprise a first tunable material layer and a first metal layer which are sequentially laminated on the substrate, and a first slot is formed in the first metal layer.

18. The method of claim 17 , further comprising forming a second slot tilted with respect to the first slot in the first metal layer.

19. The method of claim 15 , wherein:
the plurality of material layers comprise a first metal layer and a first tunable material layer which are sequentially laminated on the substrate, and a first slot is formed in the first metal layer.

20. The method of claim 15 , wherein:
the plurality of material layers comprise a first tunable material layer, a first metal layer, and a second tunable material layer which are sequentially laminated on the substrate, and a first slot is formed in the first metal layer.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Yeonsang
• Kim Jineun
• Roh Younggeun
• Lee Changwon
• Cheon Sangmo
• Kim Unjeong
• Baik Chanwook
• Yoon Youngzoon
• Lee Jaesoong

Classifications

• G02F1/0018

  Electro-optical materials · CPC title

• H01Q5/22

  RF wavebands combined with non-RF wavebands, e.g. infrared or optical · CPC title

• G02F1/0045

  Liquid crystals characterised by their physical properties · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y20/00 Primary

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title