Supporting unit and substrate processing apparatus including the same

Patent metadata

Field	Value
Publication number	US-11320752-B2
Application number	US-202016913039-A
Country	US
Kind code	B2
Filing date	Jun 26, 2020
Priority date	Jun 27, 2019
Publication date	May 3, 2022
Grant date	May 3, 2022

Abstract

A supporting unit is provided to support a substrate. The supporting unit includes a supporting plate including a pressure reducing fluid passage formed inside the supporting plate, and a flanger provided in a groove formed in a top surface of the supporting plate. A lower area of the flanger is connected to the pressure reducing fluid passage in the groove, and the flanger moves up and down by reduced pressure applied through the pressure reducing fluid passage.

First claim

What is claimed is:

1. An apparatus for processing a substrate, the apparatus comprising:
a housing having a space inside the housing; and
a supporting unit configured to support the substrate, in the space,
wherein the supporting unit includes,
a supporting plate having a pressure reducing fluid passage inside the supporting plate,
a temperature adjusting member configured to adjust a temperature of the supporting plate,
a flanger in a groove, the groove in a top surface of the supporting plate, and a pin on the supporting plate,
wherein in the groove a lower area of the flanger is connected to the pressure reducing fluid passage,
the flanger is configured to move up or down by a change in pressure applied through the pressure reducing fluid passage, and
the pressure reducing fluid passage includes a channel extending through the support plate, the channel in fluid communication with the groove and with a vacuum hole on an upper surface of the supporting plate,
wherein a distance between a top surface of the supporting plate and an upper end of the pin is provided as a first distance,
wherein, in the flanger, the distance between the top surface of the supporting plate and an upper end of the flanger is a second distance, in response to the reduced pressure not being applied through the pressure reducing fluid passage,
the distance between the top surface of the supporting plate and the upper end of flanger is a third distance, in response to the reduced pressure being applied through the pressure reducing fluid passage,
the second distance is greater than the first distance, and
the third distance is less than or equal to the first distance.

2. The apparatus of claim 1 , wherein the flanger has a through hole passing through an upper portion of the flanger and through a lower portion of the flanger, and
wherein the through hole is in fluid communication with the pressure reducing fluid passage.

3. The apparatus of claim 2 , wherein the flanger includes:
a first body; and
a second body extending upward from the first body and having a diameter less than a diameter of the first body.

4. The apparatus of claim 3 , wherein the groove has a locking step which is stepped in a lateral direction of the groove, and
a locking member is between a top surface of the first body and the locking step.

5. The apparatus of claim 3 , further comprising:
an elastic member on a bottom surface of the first body.

6. The apparatus of claim 3 , wherein the first body defines an insertion end portion recessed upward from a bottom surface of the first body,
the insertion end portion is in fluid communication with the through hole, and
an elastic member is configured to be inserted into the insertion end portion.

7. The apparatus of claim 3 , wherein an upper end of the second body has a rounded shape.

8. The apparatus of claim 1 , wherein the apparatus further includes:
a controller configured to control the supporting unit,
wherein the controller is configured to,
control the supporting unit to reduce a distance between the supporting plate and the substrate by moving the Hanger down as the reduced pressure is applied through the pressure reducing fluid passage, the reducing the distance being in response to adjusting a temperature of the substrate supported to the supporting unit.

9. The apparatus of claim 1 , wherein the pressure reducing fluid passage includes:
a main fluid passage;
a first fluid passage branching from the main fluid passage; and
a second fluid passage branching from the main fluid passage at a point, which is different from a point from which the first fluid passage branches,
wherein the first fluid passage is connected to the groove, and
the second fluid passage extends to the top surface of the supporting plate.

10. The apparatus of claim 1 , wherein the supporting plate defines a heat transfer fluid passage through which a fluid supplied by the temperature adjusting member flows.

11. A supporting unit to support a substrate, the supporting unit comprising:
a supporting plate defining a pressure reducing fluid passage inside the supporting plate;
a flanger in a groove, the groove in a top surface of the supporting plate; and
a pin on the supporting plate,
wherein a lower area of the flanger is connected to the pressure reducing fluid passage in the groove, and
the flanger is configured to move up and down based on the pressure applied through the pressure reducing fluid passage,
the pressure reducing fluid passage includes a channel extending through the support plate, the channel in fluid communication with the groove and with a vacuum hole on an upper surface of the supporting plate,
wherein a distance between a top surface of the supporting plate and an upper end of the pin is provided as a first distance,
wherein, in the flanger, the distance between the top surface of the supporting plate and an upper end of the flanger is a second distance, in response to the reduced pressure not being applied through the pressure reducing fluid passage,
the distance between the top surface of the supporting plate and the upper end of flanger is a third distance, in response to the reduced pressure being applied through the pressure reducing fluid passage,
the second distance is greater than the first distance, and
the third distance is less than or equal to the first distance.

12. The supporting unit of claim 11 , wherein the flanger has a through hole passing through an upper portion and a lower portion of the flanger, and
the through hole is in fluid communication with the pressure reducing fluid passage.

13. The supporting unit of claim 12 , wherein the flanger includes:
a first body; and
a second body extending upward from a top surface of the first body and having a diameter less than a diameter of the first body.

14. The supporting unit of claim 13 , wherein the groove has a locking step which is stepped in a lateral direction of the groove, and
a locking member is interposed between a top surface of the first body and the locking step.

15. The supporting unit of claim 13 , further comprising:
an elastic member on a bottom surface of the first body.

16. The supporting unit of claim 15 , wherein the elastic member is a spring.

17. The supporting unit of claim 13 , wherein the first body includes an insertion end portion recessed upward from a bottom surface of the first body,
the insertion end portion communicates with the through hole, and
an elastic member is inserted into the insertion end portion.

18. The supporting unit of claim 13 , wherein an upper end of the second body has a rounded shape.

Assignees

• Semes Co Ltd

Inventors

• Bang Jaeoh

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title