Efficient energy recovery in a nanosecond pulser circuit

Patent metadata

Field	Value
Publication number	US-11302518-B2
Application number	US-202016737615-A
Country	US
Kind code	B2
Filing date	Jan 8, 2020
Priority date	Jul 27, 2018
Publication date	Apr 12, 2022
Grant date	Apr 12, 2022

Abstract

Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

First claim

That which is claimed:

1. A nanosecond pulser system comprising:
a high voltage power supply;
a nanosecond pulser electrically coupled with the high voltage power supply and switching voltage from the high voltage power supply at high frequencies;
a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and
an energy recovery circuit electrically coupled with the secondary side of the transformer, the energy recovery circuit comprising:
an energy recovery inductor electrically coupled with the high voltage power supply;
a crowbar diode arranged in parallel with the secondary side of the transformer; and
a second diode disposed in series with the energy recovery inductor and arranged to conduct current from a load through the energy recovery inductor to the high voltage power supply.

2. The nanosecond pulser circuit according to claim 1 , wherein the energy recovery inductor comprises an inductance greater than about 50 μH.

3. The nanosecond pulser circuit according to claim 1 , wherein the nanosecond pulser switches voltage from the high voltage power supply at frequencies of about 400 kHz.

4. The nanosecond pulser circuit according to claim 1 , wherein the nanosecond pulser circuit provides voltage greater than 5 kV to a load.

5. The nanosecond pulser circuit according to claim 1 , wherein the load comprises a capacitive load.

6. The nanosecond pulser circuit according to claim 1 , wherein the load comprises a plasma deposition chamber.

7. The nanosecond pulser circuit according to claim 1 , wherein the energy recovery circuit further comprises a high voltage switch in series with the second diode and the energy recovery inductor.

8. The nanosecond pulser circuit according to claim 7 , wherein the high voltage switch switches voltages greater than 5 kV.

9. The nanosecond pulser circuit according to claim 1 , wherein the high voltage power supply provides DC power with a voltage greater than 1 kV.

10. A system comprising:
a storage capacitor;
a switching circuit coupled with the storage capacitator, the switching circuit outputs waveforms with voltages greater than 1 kV and with frequencies greater than 1 kHz;
a transformer having a primary side and a secondary side, the switching circuit electrically coupled with the primary side of the transformer; and
an energy recovery circuit electrically coupled with the secondary side of the transformer and the storage capacitor, the energy recovery circuit comprising:
an energy recovery inductor electrically coupled with the high voltage power supply; and
a second diode disposed in series with the energy recovery inductor and arranged to conduct current from a load through the energy recovery inductor to the high voltage power supply.

11. The circuit according to claim 10 , wherein the energy recovery circuit comprises a crowbar diode arranged in parallel with the secondary side of the transformer.

12. The circuit according to claim 10 , wherein the switching circuit comprises a nanosecond pulser.

13. The circuit according to claim 10 , wherein the switching circuit comprises an RF driver that operates at frequencies above about 400 kHz.

14. The circuit according to claim 13 , wherein the RF driver comprises either a half-bridge driver or a full-bridge driver.

15. The circuit according to claim 10 , further comprising a bias compensation circuit includes a bias compensation diode in parallel with the bias compensation switch; and a DC power supply arranged in series with the bias compensation diode and the bias compensation switch.

16. The circuit according to claim 10 , wherein the energy recovery inductor comprises an inductance greater than 50 μH.

17. A method for creating high voltage pulses, the method comprising:
opening a bias compensation switch within a bias compensation circuit while closing a pulser switch, the bias compensation circuit coupled with a secondary side of a transformer;
closing the pulser switch of a nanosecond pulser to create a pulse, the nanosecond pulser coupled with a primary side of the transformer and a DC power supply, the pulse having a voltage greater than 1 kV on the secondary side of the transformer;
opening an energy recovery switch within an energy recovery circuit while closing the pulser switch, the energy recovery circuit coupled with the secondary side of the transformer and the DC power supply;
pausing for a period of time less than about 100 nanoseconds;
closing the pulser switch of the nanosecond pulser; and
opening the energy recovery switch within the energy recovery circuit while closing the pulser switch.

18. The method for creating high voltage pulses according to claim 17 , wherein the energy recovery circuit comprises an inductor and a diode in series with the energy recovery switch.

19. The method for creating high voltage pulses according to claim 17 , wherein the energy recovery switch comprises a plurality of switches arranged in series and having a plurality of voltage sharing resistors such that each voltage sharing resistor of the plurality of voltage sharing resistors is arranged across a corresponding switch of the plurality of switches.

20. The method for creating high voltage pulses according to claim 17 , wherein the bias compensation circuit comprises a bias compensation diode in parallel with the bias compensation switch; and a DC power supply arranged in series with the bias compensation diode and the bias compensation switch.

21. A method for creating high voltage pulses, the method comprising:
prior to a burst of pulses, opening a bias compensation switch within a bias compensation circuit coupled with a nanosecond pulser through a transformer, the bias compensation circuit coupled with the secondary of the transformer;
during the burst of pulses, repeatedly opening and closing a pulser switch of a nanosecond pulser to create a plurality of pulses within the burst of pulses, the nanosecond pulser coupled with a primary side of the transformer and a DC power supply, the opening and closing of the pulser switch occurring with a pulse repetition frequency greater than about 1 kHz, and the closing of the pulser switch produces pulses with a voltage greater than 1 kV on the secondary side of the transformer;
during the burst of pulses, repeatedly closing and opening an energy recovery switch within an energy recovery circuit such that the energy recovery switch is closed when the pulser switch is open and the energy recovery switch is open when the pulser switch is closed, the energy recovery circuit coupled with a secondary side of the transformer and the DC power supply; and
after the burst of pulses, closing bias compensation switch within a bias compensation circuit.

22. The method for creating high voltage pulses according to claim 21 , further comprising:
pausing for period of time less than about 100 microseconds;
prior to a second burst of pulses, opening the bias compensation switch;
during the second burst of pulses, opening and closing the pulser switch;
during the second burst of pulses, closing and opening an energy recovery switch; and
after the second burst, closing the bias compensation switch.

23. The method for creating high voltage pulses according to claim 21 , wherein the energy recovery circuit comprises an inductor and a diode in series with the energy recovery switch.

24. The method for cre

Assignees

• Eagle Harbor Tech Inc

Inventors

• Prager James
• Ziemba Timothy
• Miller Kenneth
• Slobodov Ilia
• Quinley Morgan

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H01J37/32146 Primary

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title