Concave cavity for integrated microfabricated sensor

Patent metadata

Field	Value
Publication number	US-11294002-B2
Application number	US-202016918098-A
Country	US
Kind code	B2
Filing date	Jul 1, 2020
Priority date	Mar 13, 2017
Publication date	Apr 5, 2022
Grant date	Apr 5, 2022

Abstract

An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

First claim

What is claimed is:

1. An integrated microfabricated sensor, comprising:
a sensor cell, comprising:
a cell body having:
a first surface;
a second surface parallel to the first surface; and
cell body walls extending between the first surface and the second surface, the cell body walls having a concave profile defining a cavity having:
a first boundary region along the first surface;
a second boundary region along the second surface; and
a central region between the first surface and the second surface, the central region being wider than the first boundary region and wider than the second boundary region;

a first window adjacent to the first surface and exposed to the cavity;
a second window adjacent to the second surface and exposed to the cavity; and
a sensor fluid material in the cavity;

a signal emitter outside of the cavity and proximate to the first window; and
a signal detector outside of the cavity and proximate to the second window.

2. The integrated microfabricated sensor of claim 1 , wherein the cell body walls have a first interior angle, extending from the cavity through the cell body walls to the first surface, the first interior angle being acute around a perimeter of the cavity at the first surface.

3. The integrated microfabricated sensor of claim 2 , wherein the cell body walls have a second interior angle, extending from the cavity through the cell body walls to the second surface, the second interior angle being acute around a perimeter of the cavity at the second surface.

4. The integrated microfabricated sensor of claim 1 , wherein:
the cell body walls include crystalline silicon;
first facets of the cell body walls in the first boundary region are aligned along first [111] crystal planes of the crystalline silicon; and
second facets of the cell body walls in the second boundary region are aligned along second [111] crystal planes of the crystalline silicon.

5. The integrated microfabricated sensor of claim 4 , wherein the first facets and second facets meet in the central region.

6. The integrated microfabricated sensor of claim 1 , wherein the cell body walls have substantially vertical profiles in the central region.

7. The integrated microfabricated sensor of claim 1 , wherein the sensor fluid material includes an alkali metal selected from the group consisting of cesium and rubidium.

8. A method, comprising:
providing a cell body substrate having a first surface, and a second surface parallel to the first surface;
removing material from the cell body substrate to form a cavity extending through the cell body substrate from the first surface to the second surface, wherein:
a cell body has cell body walls extending between the first surface and the second surface; and
the cell body walls have a concave profile, so that the cavity is wider in a central region, than at the first surface and at the second surface;

attaching a first window substrate to the cell body substrate at the first surface, the first window substrate being exposed to the cavity;
disposing a solution comprising a sensor fluid material and a solvent into the cavity on the first window substrate;
removing substantially all of the solvent; and
attaching a second window substrate to the cell body substrate at the second surface, the second window substrate being exposed to the cavity.

9. The method of claim 8 , wherein:
the cell body substrate comprises primarily crystalline silicon;
the cell body walls have a first interior angle, extending from the cavity through the cell body walls to the first surface, the first interior angle being acute around a perimeter of the cavity at the first surface; and
the cell body walls have a second interior angle, extending from the cavity through the cell body walls to the second surface, the second interior angle being acute around a perimeter of the cavity at the second surface.

10. The method of claim 8 , further comprising:
forming a first etch mask on the first surface of the cell body substrate, wherein the first etch mask exposes an area on the first surface for the cavity; and
forming a second etch mask on the second surface of the cell body substrate, wherein the second etch mask exposes an area on the second surface for the cavity;
wherein removing the material from the cell body substrate comprises a wet etch process which concurrently removes the material from the cell body in the area exposed by the first mask and removes the material from the cell body in the area exposed by the second mask.

11. The method of claim 10 , wherein the first etch mask comprises a first layer of silicon dioxide formed on the first surface of the cell body substrate, and further comprises a first layer of silicon nitride formed on the first layer of silicon dioxide, and the second etch mask comprises a second layer of silicon dioxide formed on the second surface of the cell body substrate, and further comprises a second layer of silicon nitride formed on the second layer of silicon dioxide.

12. The method of claim 11 , wherein the first layer of silicon dioxide and the second layer of silicon dioxide are formed concurrently, and the first layer of silicon nitride and the second layer of silicon nitride are formed concurrently.

13. The method of claim 8 , further comprising:
forming a first etch mask on the first surface of the cell body substrate, wherein the first etch mask exposes an area on the first surface for the cavity; and
forming a second etch mask on the second surface of the cell body substrate, wherein the second etch mask covers the second surface;
wherein removing the material from the cell body substrate comprises:
performing a deep reactive ion etch (DRIE) process which removes the material in an anisotropic manner in the area exposed by the first etch mask; and
performing a wet etch process which removes the material to form the cavity, the wet etch being performed after the DRIE process.

14. The method of claim 13 , wherein the first etch mask comprises hard mask material selected from the group consisting of silicon carbide and amorphous carbon.

15. The method of claim 8 , wherein removing the material from the cell body comprises a wet etch process with an aqueous alkaline solution.

16. The method of claim 8 , wherein the cell body substrate is a silicon wafer having areas for cell bodies, and wherein removing the material from the cell body substrate is performed concurrently with removing material from the cell body substrate to form a cavity in each of the cell bodies.

17. The method of claim 8 , wherein the sensor fluid material comprises an alkali metal salt and the solvent comprises a fluid selected from the group consisting of water and alcohol.

18. The method of claim 17 , wherein the alkali metal salt comprises cesium azide.

19. The method of claim 8 , wherein:
the first window substrate comprises a first glass layer;
attaching the first window substrate to the cell body substrate comprises a first anodic bonding process;
the second window substrate comprises a second glass layer; and
attaching the second window substrate to the cell body substrate comprises a second anodic bonding process.

20. A method, comprising:
providing a cell body substrate having a first surface, and a second surface parallel to the first surface;
removing material from the cell body substrate to form a cavity extending through the cell body substrate from the first surface to the second surface, wherein:
a cell body has cell body wall

Assignees

• Texas Instruments Inc

Inventors

• Gabrys Ann
• Brockie Nathan
• Dyer Terry
• Parsa Roozbeh
• French William

Classifications

• G04F5/14

  using atomic clocks · CPC title

• G01R33/032 Primary

  using magneto-optic devices, e.g. Faraday {or Cotton-Mouton effect} · CPC title