Radiation imaging apparatus and radiation imaging system

Patent metadata

Field	Value
Publication number	US-11280919-B2
Application number	US-201916720989-A
Country	US
Kind code	B2
Filing date	Dec 19, 2019
Priority date	Jul 10, 2017
Publication date	Mar 22, 2022
Grant date	Mar 22, 2022

Abstract

A radiation imaging apparatus is provided. The apparatus includes a substrate in which conversion elements are arranged and which transmits light beams, a first scintillator arranged on a first surface side of the substrate, and a second scintillator arranged on a second surface side opposite to the first surface. The conversion elements include first conversion elements and second conversion elements. The first conversion elements are arranged so as to receive light beams from the first scintillator and the second scintillator. A light-shielding layer is arranged between the first scintillator and each of the second conversion elements so as to set light amounts of the second conversion elements from the first scintillator smaller than those of the first conversion elements from the first scintillator, and the second conversion elements are arranged to receive a light beam from the second scintillator.

First claim

The invention claimed is:

1. A radiation imaging apparatus, comprising:
a substrate in which a plurality of conversion elements is arranged in a two-dimensional array and which transmits light beams, the plurality of conversion elements including a first conversion element and a second conversion element;
a first scintillator arranged on a first surface side of the substrate; and
a second scintillator arranged on a second surface side of the substrate opposite to the first surface, wherein
a light-shielding layer is arranged between the first scintillator and a semiconductor layer of the second conversion element so as to set light amounts received by the semiconductor layer of the second conversion element from the first scintillator smaller than those of the first conversion element from the first scintillator, and the semiconductor layer of the second conversion element is arranged to receive a light beam from the second scintillator,
with the provisos that a light shielding layer is not disposed between a semiconductor layer of the first conversion element and the first scintillator, and a light shielding layer is not disposed between the semiconductor layer of the first conversion element and the second scintillator.

2. The radiation imaging apparatus according to claim 1 , wherein the plurality of conversion elements is arranged between the first surface and the first scintillator.

3. The radiation imaging apparatus according to claim 2 , wherein each of the plurality of conversion elements includes a first electrode, the semiconductor layer, and a second electrode in this order from the first surface side to the first scintillator, and
the second electrode is configured to function as the light-shielding layer in the second conversion element.

4. The radiation imaging apparatus according to claim 2 , comprising a scattering preventive layer arranged between the second scintillator and the second surface.

5. The radiation imaging apparatus according to claim 1 , wherein the plurality of conversion elements is arranged between the second surface and the second scintillator.

6. The radiation imaging apparatus according to claim 5 , wherein each of the plurality of conversion elements includes a first electrode, the semiconductor layer, and a second electrode in this order from the second surface side to the second scintillator, and
the first electrode is configured to function as the light-shielding layer in the second conversion element.

7. The radiation imaging apparatus according to claim 6 , wherein the first electrode is a metal material, and
an area of the first electrode arranged in the first conversion element out of the first electrode is smaller than an area of the first electrode and the semiconductor layer arranged in the second conversion element out of the first electrode in a planar view with respect to the substrate.

8. The radiation imaging apparatus according to claim 1 , which is configured for radiation to enter from the first surface side.

9. The radiation imaging apparatus according to claim 1 , which is configured for radiation to enter from the second surface side.

10. The radiation imaging apparatus according to claim 1 , further comprising:
a plurality of signal lines along a column direction in which signals generated by the plurality of conversion elements are configured to be output, wherein
the plurality of conversion elements includes a plurality of the first conversion elements and a plurality of the second conversion elements, and
among conversion elements aligned in a row direction crossing the column direction out of the plurality of conversion elements, the numbers of the plurality of included second conversion elements are equal to each other for the respective rows.

11. The radiation imaging apparatus according to claim 10 , wherein among conversion elements aligned in the column direction out of the plurality of conversion elements, the numbers of the plurality of included second conversion elements are equal to each other for the respective columns.

12. The radiation imaging apparatus according to claim 1 , further comprising:
a plurality of signal lines along a column direction in which signals generated by the plurality of conversion elements are configured to be output, wherein
among conversion elements aligned in the column direction out of the plurality of conversion elements, the numbers of the plurality of included second conversion elements are equal to each other for the respective columns.

13. The radiation imaging apparatus according to claim 1 , wherein the plurality of conversion elements includes a plurality of the first conversion elements and a plurality of the second conversion elements, and
the number of the plurality of second conversion elements is smaller than the number of the plurality of first conversion elements.

14. A radiation imaging system, comprising:
the radiation imaging apparatus according to claim 1 ; and
a signal processing unit configured to process a signal from the radiation imaging apparatus.

15. The radiation imaging system according to claim 14 , wherein the signal processing unit is configured to generate an energy subtraction image based on signals output from the first conversion element and signals output from the second conversion element.

16. The radiation imaging system according to claim 14 , wherein the signal processing unit is configured to generate an energy subtraction image based on differences between signals output from the second conversion element and differences between signals output from the first conversion element and signals output from the second conversion element.

17. The radiation imaging system according to claim 14 , wherein the signal processing unit is configured to generate a normal radiation image based on signals output from the first conversion element.

Assignees

• Canon Kk

Inventors

• Takenaka Katsuro
• Saruta Shoshiro
• Iwashita Atsushi
• Fujiyoshi Kentaro
• Nomura Keiichi
• Nagano Kazumi
• Ishida Yohei
• Komatsu Tomoki

Classifications

• G01T1/20 Primary

  with scintillation detectors · CPC title

• G01T1/20184

  Detector read-out circuitry, e.g. for clearing of traps, compensating for traps or compensating for direct hits · CPC title

• G01T1/20183 Primary

  Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk · CPC title

• G01T1/2018 Primary

  Scintillation-photodiode combinations · CPC title