Compact gas sensor including a MEMS element having capillaries to facilitate gas diffusion

Patent metadata

Field	Value
Publication number	US-11268928-B2
Application number	US-201816019373-A
Country	US
Kind code	B2
Filing date	Jun 26, 2018
Priority date	Jun 27, 2017
Publication date	Mar 8, 2022
Grant date	Mar 8, 2022

Abstract

Apparatus and associated methods relate to a compact gas sensor (CGS) including a housing with a central stepped cavity with one or more first lead contact(s) forming a portion of a base plane in a bottom of the cavity and one or more second lead contact(s) forming a portion of a stepped plane higher than the base plane, the cavity sized to receive a chemically based stack of material made up of a bottom diffusion electrode layer, a middle electrolyte gel layer, and a top diffusion electrode layer. The bottom diffusion electrode layer is in electrical contact with the first lead contact(s). The top diffusion electrode layer electrically couples to the second lead contact(s) via an overlaying micro electromechanical system (MEMS) element layer with conductive coating. In an illustrative example, the CGS may provide gas sensing in small spaces.

First claim

What is claimed is:

1. A gas sensor assembly comprising:
a sensor housing defining a cavity to receive an electrolyte subassembly;
a lid configured to mechanically couple with the sensor housing, the lid defining a gas inlet aperture to permit fluid communication between ambient gases around the gas sensor assembly and the cavity of the sensor housing;
the electrolyte subassembly disposed in the cavity, the electrolyte subassembly comprising:
a top diffusion electrode layer,
a bottom diffusion electrode layer, and
a gel electrolyte sandwiched between the top diffusion electrode layer and the bottom diffusion electrode layer;
a micro electromechanical system (MEMS) element lying between the sensor housing and a compliant media seal, the MEMS element comprising an array of capillaries configured to permit fluid communication between ambient gases around the gas sensor assembly and the cavity via the gas inlet aperture, wherein the MEMS element is in direct contact with the top diffusion electrode layer and a working electrode, the working electrode and the top diffusion electrode layer being different from each other; and
wherein the lid is further configured to compress the compliant media seal against the MEMS element to force the electrolyte subassembly and MEMS element to stack into electrical conduction, wherein the MEMS element is forcibly held in place by the compliant media seal and the lid, wherein the gas inlet aperture defines a diffusion restriction based on a ratio between a diameter of the gas inlet aperture and a length of the gas inlet aperture.

2. The gas sensor assembly of claim 1 , wherein:
the sensor housing further comprises at least one latch ledge,
the lid further comprises at least one latching finger, and
each latching finger of the at least one latching finger is configured to mechanically couple with a respective latch ledge of the at least one latch ledge of the sensor housing to mechanically couple the sensor housing with the lid.

3. The gas sensor assembly of claim 2 , wherein the sensor housing further comprises at least one latching ramp, wherein each latching ramp of the at least one latching ramp is associated with a respective latch ledge of the at least one latch ledge, such that each of the at least one latching finger translates along a respective latching ramp of the at least one latching ramp as the sensor housing is being assembled with the lid.

4. The gas sensor assembly of claim 3 , wherein:
the at least one latching finger comprises four latching fingers, each of the four latching fingers being disposed at a different corner of the lid,
the at least one latch ledge comprises four latch ledges, each of the four latch ledges being disposed at a different corner of the sensor housing, and
the at least one latching ramp comprises four latching ramps, each of the four latching ramps being disposed at a different corner of the sensor housing.

5. The gas sensor assembly of claim 1 , further comprising electrical contacts extending through the sensor housing and into the cavity of the sensor housing, the electrical contacts comprising:
the working electrode electrically coupled to the top diffusion electrode layer via the MEMS element,
a counter electrode electrically coupled to the bottom diffusion electrode layer, and
a reference electrode electrically coupled to the bottom diffusion electrode layer.

6. The gas sensor assembly of claim 5 , wherein the cavity of the sensor housing comprises a stepped cavity having an upper deck and a lower deck, wherein:
the working electrode forms a portion of the upper deck,
the counter electrode and the reference electrode form a portion of the lower deck,
the MEMS element sits atop the upper deck, and,
the electrolyte subassembly sits atop the lower deck.

7. The gas sensor assembly of claim 5 , further comprising a sensor receptacle comprising sensor pins each configured to electrically couple with a respective one of the electrical contacts.

8. The gas sensor assembly of claim 7 , wherein the sensor receptacle further comprises at least one supporting latch arm configured to latchingly engage the sensor housing to support the sensor housing when the sensor housing is in electrical engagement with the sensor receptacle.

9. The gas sensor assembly of claim 1 , wherein the ratio is 1:100.

10. The gas sensor assembly of claim 1 , wherein the MEMS element comprises a platinum coating electronically connecting the sensor housing with the electrolyte subassembly.

11. A gas sensor assembly comprising:
a sensor housing defining a cavity to receive an electrolyte subassembly;
a lid configured to mechanically couple with the sensor housing, the lid defining a gas inlet aperture to permit fluid communication between ambient gases around the gas sensor assembly and the cavity of the sensor housing;
the electrolyte subassembly disposed in the cavity, the electrolyte subassembly comprising:
a top diffusion electrode layer, and
a bottom diffusion electrode layer; and
a micro electromechanical system (MEMS) element lying between the sensor housing and a compliant media seal, the MEMS element comprising an array of capillaries configured to permit fluid communication between ambient gases around the gas sensor assembly and the cavity via the gas inlet aperture, wherein the MEMS element is in direct contact with the top diffusion electrode layer and a working electrode, the working electrode and the top diffusion electrode layer being different from each other,
wherein the lid is further configured to compress the compliant media seal against the MEMS element to force the electrolyte subassembly and MEMS element to stack into electrical conduction, wherein the gas inlet aperture defines a diffusion restriction based on a ratio between a diameter of the gas inlet aperture and a length of the gas inlet aperture.

12. The gas sensor assembly of claim 11 , wherein:
the sensor housing further comprises at least one latch ledge,
the lid further comprises at least one latching finger, and
each latching finger of the at least one latching finger is configured to mechanically couple with a respective latch ledge of the at least one latch ledge of the sensor housing to mechanically couple the sensor housing with the lid.

13. The gas sensor assembly of claim 12 , wherein the sensor housing further comprises at least one latching ramp, wherein each latching ramp of the at least one latching ramp is associated with a respective latch ledge of the at least one latch ledge, such that each latching finger of the at least one latching finger translates along a respective latching ramp of the at least one latching ramp as the sensor housing is being assembled with the lid.

14. The gas sensor assembly of claim 13 , wherein:
the at least one latching finger comprises four latching fingers, each of the four latching fingers being disposed at a different corner of the lid,
the at least one latch ledge comprises four latch ledges, each of the four latch ledges being disposed at a different corner of the sensor housing, and
the at least one latching ramp comprises four latching ramps, each of the four latching ramps being disposed at a different corner of the sensor housing.

15. The gas sensor assembly of claim 11 , further comprising electrical contacts extending through the sensor housing and into the cavity of the sensor housing, the electrical contacts comprising:
the working electrode electrically coupled to the MEMS element,
a counter electrode electrically coupled to a first portion of the bottom diffusion electrode layer of the elec

Assignees

• Honeywell Int Inc

Inventors

• Wade Richard
• Pratt Keith Francis Edwin
• Higashi Robert
• Beck Scott Edward
• S Vijayakumar
• Diaconu Cristian

Classifications

• G01N33/004 Primary

  CO or CO2 · CPC title

• G01N27/4045

  for gases other than oxygen · CPC title

• G01N27/304

  Gas permeable electrodes · CPC title

• G01N27/4062

  Electrical connectors associated therewith · CPC title

• B81B1/004

  Through-holes, i.e. extending from one face to the other face of the wafer · CPC title