Apparatus for storing mask

Patent metadata

Field	Value
Publication number	US-11262649-B2
Application number	US-202016901466-A
Country	US
Kind code	B2
Filing date	Jun 15, 2020
Priority date	Jul 30, 2019
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.

First claim

What is claimed is:

1. An apparatus for storing a mask, comprising:
a main body defining a first region and a second region around the first region;
a plurality of mask containers in the first region, the plurality of mask containers configured to store masks;
a gas supply pipe having an outer portion, the outer portion of the gas supply pipe being outside of the main body, the gas supply pipe configured to supply gas to the main body;
a fan in the first region, the fan configured to propel the gas from the second region to the first region;
a filter disposed at at least one of a front end and a rear end of the fan, the filter in a gas flow path of the gas;
a heat exchanger in the second region, the heat exchanger configured to exchange heat with the gas;
a Peltier element at the outer portion of the gas supply pipe;
a first sensor in the gas supply pipe, the first sensor upstream of the Peltier element in the gas flow path;
a second sensor in the second region of the main body, the second sensor lower in the second region than the heat exchanger; and
a controller connected to the first sensor, the second sensor, and the Peltier element.

2. The apparatus of claim 1 , wherein
the controller is configured to control the Peltier element to adjust a temperature of the gas supplied to the main body according to a signal from the first sensor, and
the controller is configured to adjust a temperature of cooling water flowing into the heat exchanger and an amount of the gas flowing through the gas supply pipe according to a signal from the second sensor.

3. The apparatus of claim 1 , wherein the filter comprises a first filter configured to eliminate a chemical substance and a second filter configured to eliminate particles.

4. The apparatus of claim 1 , wherein the heat exchanger comprises a cooling water-flow tube configured to carry cooling water.

5. The apparatus of claim 4 , wherein the heat exchanger is in a lower portion of the second region.

6. The apparatus of claim 1 , wherein the gas supply pipe is connected to a mask container of the plurality of mask containers to directly supply the gas to an inside of the mask container.

7. The apparatus of claim 1 , wherein the gas supply pipe is configured to supply the gas into the first region.

8. The apparatus of claim 1 , wherein the main body is configured such that the gas flows to a lower portion of the first region, from the lower portion of the first region to a lower portion of the second region, from the lower portion of the second region to an upper portion of the second region, and then re-introduced into the first region.

9. The apparatus of claim 1 , further comprising:
a supplementary chamber adjacent to the main body, wherein the Peltier element is inside the supplementary chamber.

10. The apparatus of claim 1 , wherein the plurality of mask containers are configured to store a mask for extreme ultraviolet (EUV).

11. The apparatus of claim 2 , wherein the controller is configured to maintain an internal space of the main body at 22° C.±0.5° C.

12. The apparatus of claim 2 , wherein the controller is configured to maintain a humidity of an interior of the main body at 5% or lower.

13. An apparatus for saving a mask, comprising:
a main body having an interior space, the interior space being divided by a wall into at least a first region and a second region;
a mask container in the interior space of the main body;
a gas supply pipe configured to provide gas to the interior space of the main body, the gas supply pipe having an outer portion, the outer portion of the gas supply pipe being outside the main body;
a fan configured to flow the gas introduced into the interior space of the main body;
a filter installed at at least one end of a front end and a rear end of the fan in a gas flow path;
a heat exchanger configured to exchange heat with the gas flowing in the interior space; and
a Peltier element in the outer portion of the gas supply pipe.

14. The apparatus of claim 13 , further comprising:
a first sensor installed in the gas supply pipe upstream of the Peltier element in the gas flow path.

15. The apparatus of claim 14 , further comprising:
a second sensor installed in the second region of the main body in a lower portion of the heat exchanger.

16. The apparatus of claim 15 , further comprising:
a controller connected to the first sensor, the second sensor, and the Peltier element.

17. The apparatus of claim 13 , further comprising:
a supplementary chamber adjacent to the main body,
wherein the Peltier element is inside the supplementary chamber.

18. The apparatus of claim 13 , further comprising:
a first filter configured to eliminate a chemical substance; and
a second filter configured to eliminate a foreign substance particle.

19. The apparatus of claim 13 , wherein the mask container is configured to store a mask for extreme ultraviolet (EUV).

20. The apparatus of claim 13 , further comprising:
a controller configured to maintain an internal space of the main body at 22° C.±0.5° C.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Ginam
• Kim Sangmin
• Kim Jongsam
• Kim Hongjin
• Park Chuljun
• Ahn Yongjun
• Lee Sangkyung
• Lee Junyong
• Jeon Taijo
• Cho Kyubum

Classifications

• G03F1/66 Primary

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title

• F24F3/14

  by humidification; by dehumidification · CPC title

• F25B2321/0251

  by a gas · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title

• F25B2700/2104

  of an indoor room or compartment · CPC title