Diagnostic device, semiconductor manufacturing equipment system, semiconductor equipment manufacturing system, and diagnostic method
US-2024321608-A1 · Sep 26, 2024 · US
US11262322B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11262322-B2 |
| Application number | US-202016993299-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 14, 2020 |
| Priority date | Mar 10, 2020 |
| Publication date | Mar 1, 2022 |
| Grant date | Mar 1, 2022 |
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Official abstract text for this publication.
A thermal insulation property measuring device, including a tank, a thermal insulator, a cuboidal frame, a support bracket, and a data collector. The tank includes an upper body, a first lower body, and a second lower body. The thermal insulator includes a first thermal insulation layer, a second thermal insulation layer, a first membrane, a second membrane, and a third membrane. The support bracket includes a trapezoidal support and a transition support. The tank is disposed on the support bracket. The support bracket is disposed in the cuboidal frame. The upper body, the first lower body, and the second lower body are spherical and communicate with each other. A filling tube, a pressure relief tube and a piezometer tube are disposed on the upper body. The first membrane is disposed on the tank. The first thermal insulation layer is coated on the first membrane.
Opening claim text (preview).
What is claimed is: 1. A device, comprising: a tank comprising an upper body, a first lower body, and a second lower body; a thermal insulator comprising a first thermal insulation layer, a second thermal insulation layer, a first membrane, a second membrane, and a third membrane; a cuboidal frame comprising a first rectangular frame, a second rectangular frame, four angle steels connecting the first rectangular frame and the second rectangular frame, a base plate disposed below the second rectangular frame, four jacks respectively disposed on four corners of the second rectangular frame, and a ladder disposed between the first rectangular frame and the second rectangular frame; a support bracket comprising a trapezoidal support and a transition support; and a data collector comprising a table, a computer disposed on the table, a first hub, a second hub, a weighing machine, a camera, a pressure gauge, a thermometer, and a plurality of temperature sensors; wherein: the tank is disposed on the support bracket; the support bracket is disposed in the cuboidal frame; the upper body, the first lower body, and the second lower body are spherical and communicate with each other; the thermal insulator is disposed on the tank; the upper body is provided with a filling tube, a pressure relief tube and a piezometer tube; the first membrane is disposed on the tank; the first thermal insulation layer is coated on the first membrane; the second membrane is coated on the first thermal insulation layer; the second thermal insulation layer is coated on the second membrane; and the third membrane is coated on the second thermal insulation layer; the second rectangular frame comprises a transverse H-shaped beam and a longitudinal H-shaped beam; the transition support is disposed on the transverse H-shaped beam; the trapezoidal support is disposed on the transition support; the tank is disposed on the trapezoidal support; and the first hub, the camera, the pressure gauge, and the thermometer are disposed on the first rectangular frame; the weighing machine is disposed below the second rectangular frame; the plurality of temperature sensors is secured to the first membrane and the second membrane; the pressure gauge, the thermometer, and the plurality of temperature sensors are connected to the first hub; the weighing machine and the first hub are connected to the second hub; the second hub is connected to the computer; and the pressure gauge is connected to the piezometer tube. 2. The device of claim 1 , wherein a plurality of step joints are disposed in the first thermal insulation layer and the second thermal insulation layer; the plurality of step joints each comprises a cavity filled with a filler; the first thermal insulation layer comprises multilayered materials; the second thermal insulation layer comprises an impact resistant material; the second membrane comprises a thin film material; the third membrane comprises a tarpaulin; a fence is disposed on an upper body of the thermal insulator; one end of the filling tube, one end of the pressure relief tube and one end of the piezometer tube are disposed in the fence; and a filling valve, a pressure relief valve, and a safety valve are disposed in the fence and are connected to the filling tube, the pressure relief tube, and the piezometer tube, respectively. 3. The device of claim 1 , wherein the first rectangular frame comprises two transverse steel plates and two longitudinal steel plates; the second rectangular frame comprises two longitudinal H-shaped beams and two transverse vertical plates; the transverse H-shaped beam is disposed between the two longitudinal H-shaped beams; the four angle steels each comprise a plurality of bolt holes; and four toughened transparent glass plates are fixed on four facades of the cuboidal frame via the plurality of bolt holes. 4. The device of claim 1 , wherein the trapezoidal support comprises a plurality of cemented hardwood blocks; the transition support comprises wood or hard plastics; and the transition support comprises a faceplate, a baseboard, and a plurality of vertical plates disposed between the faceplate and the baseboard.
by investigating thermal conductivity (by calorimetry G01N25/20; by measuring change of resistance of an electrically-heated body G01N27/18) · CPC title
by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity (calorimeters per se G01K) · CPC title
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