Method for measuring a temperature

Patent metadata

Field	Value
Publication number	US-11262250-B2
Application number	US-201916271336-A
Country	US
Kind code	B2
Filing date	Feb 8, 2019
Priority date	Feb 28, 2018
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

Implementations described herein generally relate to semiconductor manufacturing, and more specifically to a temperature measurement device. In one implementation, the temperature measurement device includes a substrate and a stack of metal layers coupled to the substrate. Each metal layer of the stack of metal layers extends continuously uninterrupted from edge to edge of the substrate. The first metal layer has a lower electrical resistivity than the second metal layers. The electrical resistivity of the stack is based on the electrical resistivity of the first metal layer, which is temperature dependent. Utilizing a known relationship between temperature measurements and resistivity measurements, the temperature measurement device can measure and store temperature information in various substrate processing processes.

First claim

What is claimed is:

1. A temperature measuring device, comprising:
a substrate including a first side and a second side opposite the first side the first side and second side meeting at an edge circumscribing the first side and second side, the substrate configured to replicate a workpiece used in vacuum processing; and
a stack extending substantially across the first side of the substrate to the edge, the stack comprising:
a first metal layer comprising a first material; and
two second metal layers each comprising a second material different than the first material, the first metal layer being disposed between the two second metal layers wherein the second metal layers are configured to diffuse atoms into the first metal layer at elevated temperatures.

2. The temperature measuring device of claim 1 , wherein the first material comprises aluminum, tungsten, or silver.

3. The temperature measuring device of claim 2 , wherein the second material comprises titanium.

4. The temperature measuring device of claim 1 , wherein the stack is in direct contact with the substrate.

5. The temperature measuring device of claim 1 , further comprising a layer disposed between the substrate and the stack.

6. The temperature of claim 5 , wherein the layer comprises a dielectric material.

7. The temperature measuring device of claim 1 , further comprising a passivation layer encapsulating the stack.

8. The temperature measuring device of claim 7 , wherein the passivation layer comprises a dielectric material.

9. The temperature measuring device of claim 1 , wherein the substrate comprises semiconductor, glass, or polymer.

10. A temperature measuring device, comprising:
a substrate including a first side and a second side opposite the first side, the first side and second side meeting at an edge circumscribing the first side and second side, the substrate configured to replicate a workpiece used in vacuum processing; and
a stack extending substantially across the first side of the substrate to the edge, the stack comprising:
a first metal layer having a first electrical resistivity; and
two second metal layers each having a second electrical resistivity greater than the first electrical resistivity, the first metal layer being disposed between the two second metal layers wherein the second metal layers are configured to diffuse atoms into the first metal layer to permanently change the electrical resistivity of the first metal layer.

11. The temperature measuring device of claim 10 , wherein the first material comprises aluminum, tungsten, or silver.

12. The temperature measuring device of claim 11 , wherein the second material comprises titanium.

13. The temperature measuring device of claim 10 , wherein the stack is in direct contact with the substrate.

14. The temperature measuring device of claim 10 , further comprising a layer disposed between the substrate and the stack.

15. The temperature measuring device of claim 10 , further comprising a passivation layer encapsulating the stack.

16. A method for measuring a temperature, comprising:
placing a first temperature measuring device into a process chamber, the first temperature measuring device extending from edge to edge of a substrate and having a first metal layer disposed between two second metal layers wherein the two second metal layers each having a second electrical resistivity greater than a first electrical resistivity of the first metal layer;
perform a process on the first temperature measuring device;
removing the first temperature measuring device from the process chamber;
measuring a sheet resistivity of the first temperature measuring device; and
converting the sheet resistivity to determine a temperature experienced in the process chamber.

17. The method of claim 16 , wherein the converting the sheet resistivity to a temperature comprises using a regression model previously identified during a calibration process, the calibration process performed using a second temperature measuring device different than the first temperature measuring device.

18. The method of claim 17 , wherein the calibration process comprises incrementally heating the second temperature measuring device to multiple temperatures.

19. The method of claim 18 , wherein the calibration process further comprises measuring a sheet resistivity of the second temperature measuring device at each temperature of the multiple temperatures.

20. The method of claim 19 , further comprising establishing the regression model using the multiple temperatures and the corresponding sheet resistivity.

Assignees

• Applied Materials Inc

Inventors

• Weber Heiko

Classifications

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• G01K13/12

  combined with sampling devices for measuring temperatures of samples of materials · CPC title

• G01K1/024

  for remote indication · CPC title

• G01K7/183 Primary

  characterised by the use of the resistive element · CPC title