Photocatalyst electrode for oxygen generation, production method for same, and module
US-2019323134-A1 · Oct 24, 2019 · US
US11248304B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11248304-B2 |
| Application number | US-202016784678-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 7, 2020 |
| Priority date | Aug 9, 2017 |
| Publication date | Feb 15, 2022 |
| Grant date | Feb 15, 2022 |
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A method for producing a transparent electrode for oxygen production having a Ta nitride layer on a transparent substrate, including: a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas containing ammonia and a carrier gas.
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The invention claimed is: 1. A method for producing a transparent electrode for oxygen production comprising a Ta nitride layer on a transparent substrate, comprising: forming a Ta nitride precursor layer comprising Tantalum on the transparent substrate; and nitriding the Ta nitride precursor layer with a mixed gas comprising ammonia and nitrogen gas, wherein a volume ratio of ammonia and nitrogen in the mixed gas is from 15:85 to 70:30. 2. The production method according to claim 1 , wherein the Ta nitride layer is a Ta 3 N 5 layer. 3. The production method according to claim 1 , wherein the transparent substrate is a sapphire substrate or a SiO 2 substrate. 4. The production method according to claim 1 , wherein a volume ratio of ammonia and nitrogen in the mixed gas is from 20:80 to 50:50.
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