Composition for tin or tin alloy electroplating comprising suppressing agent

Patent metadata

Field	Value
Publication number	US-11242606-B2
Application number	US-201917048770-A
Country	US
Kind code	B2
Filing date	Apr 11, 2019
Priority date	Apr 20, 2018
Publication date	Feb 8, 2022
Grant date	Feb 8, 2022

Abstract

The present invention provides an aqueous composition comprising tin ions and at least one compound of formula I wherein X1 is selected from a linear or branched C1-C12 alkanediyl, which may optionally be interrupted by O or S or a C5 to C12 aromatic moiety, R11 is a copolymer of ethylene oxide and a further C3 to C6 alkylene oxide, wherein the content of ethylene oxide is from 5 to 30% by weight, R12 is selected from H, R11, R40, R13, R14, are (a) independently selected from H, R11, R40, or (b) may together form a divalent group X13; X13 is selected from a linear or branched C1-C12 alkanediyl, which may optionally be interrupted by O, S or NR43; R40 is H or a linear or branched C1-C20 alkyl, R43 is selected from H, R11 and a linear or branched C1-C20 alkyl.

First claim

The invention claimed is:

1. An aqueous composition comprising tin ions and at least one compound of formula I

wherein:
X 1 is —(CHR 42 ) u —Y—(CHR 42 ) v —;
R 11 is a copolymer of ethylene oxide and a further C 3 to C 6 alkylene oxide, having a content of ethylene oxide is from 5 to 30% by weight relative to the copolymer weight;
R 12 is at least one selected from the group consisting of H, R 11 , and R 40 ;
R 13 , R 14 are each independently selected from the group consisting of H, R 11 , and R 40 ;
R 40 is at least one selected from the group consisting of H, a linear C 1 -C 20 alkyl, and a branched C 1 -C 20 alkyl;
Y is a divalent aromatic moiety;
u, v are integers each independently selected from 1 to 6; and
R 42 is a C 1 to C 4 alkanediyl.

2. The aqueous composition according to claim 1 , wherein Y is a divalent mono or bicyclic C 5 to C 12 aromatic moiety.

3. The aqueous composition according to claim 1 , wherein R 12 , R 13 , and R 14 are each independently selected from R 11 .

4. The aqueous composition according to claim 1 , wherein the further C 3 to C 6 alkylene oxide is propylene oxide.

5. The aqueous composition according to claim 1 , wherein the content of ethylene oxide in the copolymer of ethylene oxide and the further C 3 to C 6 alkylene oxide is from 10 to 25% by weight relative to the weight of the copolymer.

6. The aqueous composition according to claim 1 , further comprising a single grain refiner that is not an α,β-unsaturated aliphatic carbonyl compound.

7. The aqueous composition according to claim 1 , which comprises essentially no grain refiner.

8. The aqueous composition according to claim 1 , wherein Y is at least one selected from the group consisting of ortho phenylene, meta phenylene, para phenylene, and toluylene.

9. The aqueous composition according to claim 1 , wherein R 42 is at least one selected from the group consisting of methanediyl and ethanediyl.

10. The aqueous composition according to claim 1 , wherein X 1 is xylylene.

11. The aqueous composition according to claim 1 , which further comprises silver ions.

12. A method for depositing tin or tin alloys on a substrate comprising features having an aperture size from 500 nm to 500 μm, the method comprising:
contacting the substrate with the composition of claim 1 .

13. A process for electrodepositing a tin or a tin alloy onto a substrate, comprising:
contacting the composition of claim 1 with the substrate, and
applying a current to the substrate after the contacting for a time sufficient to deposit a tin or tin alloy layer onto the substrate,
wherein the substrate comprises features having an aperture size from 500 nm to 500 μm, and the deposition is performed to fill these features.

14. The process according to claim 13 , wherein the aperture size is from 1 μm to 200 μm.

Assignees

• Basf Se

Inventors

• Fluegel Alexander
• Arnold Marco
• Engelhardt Nadine
• Kienle Marcel Patrik

Classifications

• H10W72/232

  Plan-view shape, i.e. in top view · CPC title

• H10W72/01235

  by plating, e.g. electroless plating or electroplating · CPC title

• C25D3/60

  containing more than 50% by weight of tin · CPC title

• C25D3/32 Primary

  characterised by the organic bath constituents used · CPC title

• C25D7/12

  Semiconductors · CPC title