Ion beam etching chamber with etching by-product redistributor

Patent metadata

Field	Value
Publication number	US-11239060-B2
Application number	US-201815991029-A
Country	US
Kind code	B2
Filing date	May 29, 2018
Priority date	May 29, 2018
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

In some embodiments, the present disclosure relates to an ion beam etching apparatus. The ion beam etching apparatus includes a substrate holder disposed within a processing chamber and a plasma source in communication with the processing chamber. A vacuum pump is coupled to the processing chamber by way of an inlet. One or more baffles are arranged between the substrate holder and a lower surface of the processing chamber. A by-product redistributor is configured to move a by-product from an etching process from outside of the one or more baffles to directly below the one or more baffles.

First claim

What is claimed is:

1. An ion beam etching apparatus, comprising:
a substrate holder disposed within a processing chamber;
a plasma source in communication with the processing chamber;
a vacuum pump coupled to the processing chamber by way of an inlet;
a first baffle and a second baffle arranged vertically between the substrate holder and a lower surface of the processing chamber;
a by-product redistributor configured to move a by-product from an etching process from a first part on the lower surface that is on a first area laterally outside of a second area to a second part of the lower surface that is directly below the first baffle, wherein the second area is directly below the first baffle;
wherein the substrate holder comprises a surface configured to hold a wafer, and wherein the surface is facing at least a portion of the lower surface of the processing chamber; and
wherein the lower surface of the processing chamber continuously extends from a first end of the lower surface that is directly below the first baffle, to the first area laterally outside of the second area and directly below the surface of the substrate holder, to an opposing second end of the lower surface that is directly below the second baffle, as viewed along a cross-sectional view of the processing chamber.

2. The etching apparatus of claim 1 ,
wherein a sidewall of the first baffle is directly above the lower surface and is vertically separated from the lower surface by a non-zero distance; and
wherein the substrate holder extends laterally past the sidewall of the first baffle in opposing directions.

3. The etching apparatus of claim 1 ,
wherein the first baffle comprises outermost surfaces that continuously extend along an unbroken path having a first lower surface facing the lower surface of the processing chamber and a second lower surface that is facing the lower surface of the processing chamber and that is between the first lower surface and the lower surface of the processing chamber; and
wherein the second lower surface is arranged along an outermost edge of the first baffle.

4. The etching apparatus of claim 1 , wherein the by-product redistributor comprises:
an additional vacuum pump coupled to the processing chamber by way of an additional inlet that is arranged directly below the first baffle.

5. The etching apparatus of claim 1 , wherein the first baffle continuously extends around an outermost perimeter of the processing chamber.

6. An ion beam etching apparatus, comprising:
a substrate holder disposed within a processing chamber and configured to hold a workpiece;
a plasma source in communication with the processing chamber;
a vacuum pump operable coupled to the processing chamber;
a first baffle extending outward from a first sidewall of the processing chamber and vertically between the substrate holder and a lower surface of the processing chamber, as viewed along a cross-sectional view of the processing chamber;
a second baffle extending outward from a second sidewall of the processing chamber and vertically between the substrate holder and the lower surface of the processing chamber, as viewed along the cross-sectional view, wherein the lower surface of the processing chamber continuously extends from directly below the first baffle to directly below the second baffle, as viewed along the cross-sectional view; and
a by-product redistributor configured to move a by-product from an etching process from a first part of the lower surface of the processing chamber that is on a first area laterally outside of a second area directly below the first baffle to a second part of the lower surface that is directly below the first baffle.

7. The etching apparatus of claim 6 , wherein the by-product redistributor comprises:
a heater arranged below the lower surface of the processing chamber and laterally outside of the first baffle.

8. The etching apparatus of claim 6 , wherein the by-product redistributor comprises:
an additional vacuum pump coupled to the processing chamber by way of an additional inlet that is arranged directly below the first baffle.

9. The etching apparatus of claim 6 , wherein the first baffle has an upper surface facing a top of the processing chamber and a protrusion extending outward from a lower surface of the first baffle, the upper surface continuously extending between outermost sidewalls of the first baffle and the protrusion defined by two sidewalls that continuously extend to a bottommost surface of the first baffle.

10. The etching apparatus of claim 6 , wherein the first baffle and the second baffle respectively comprise a conductive material.

11. An ion beam etching apparatus, comprising:
a substrate holder disposed within a processing chamber;
a plasma source in communication with the processing chamber;
a vacuum pump coupled to the processing chamber;
a first baffle and a second baffle respectively having a horizontally extending surface disposed vertically between the substrate holder and a lower surface of the processing chamber, as viewed along a cross-sectional view of the processing chamber;
a by-product redistributor, comprising:
a cooler arranged below the lower surface of the processing chamber and directly below the horizontally extending surface of the first or the second baffle; and
a heater arranged below the lower surface of the processing chamber laterally outside of the first and the second baffle;

wherein the lower surface of the processing chamber continuously extends from directly below the first baffle, to outside of the first baffle and directly below the substrate holder, to directly below the second baffle, as viewed along the cross-sectional view; and
wherein a first part of the lower surface of the processing chamber, which is laterally outside of a second part of the lower surface that is directly below the first baffle, is configured to receive a by-product of an etching process; and
wherein the heater and the cooler are configured to move the by-product from the first part of the lower surface of the processing chamber to the second part of the lower surface of the processing chamber.

12. The etching apparatus of claim 11 , wherein the heater is substantially centered along the lower surface of the processing chamber.

13. The etching apparatus of claim 11 , wherein the cooler is laterally between the heater and a side of the processing chamber.

14. The etching apparatus of claim 11 , wherein the horizontally extending surface laterally extends from directly over the cooler to laterally past the cooler.

15. The etching apparatus of claim 6 , wherein an outer surface of the first baffle contacts an outermost surface of the processing chamber.

16. The etching apparatus of claim 11 , wherein a sidewall of the first baffle is directly below the substrate holder, the substrate holder extending to laterally past the sidewall of the first baffle.

17. The etching apparatus of claim 11 , wherein the first baffle comprises a continuous upper surface facing away from the lower surface of the processing chamber and directly over the cooler, the lower surface of the processing chamber being directly between the cooler and the continuous upper surface of the first baffle.

18. The etching apparatus of claim 6 , wherein the by-product redistributor comprises a cooler arranged directly below the lower surface of the processing chamber and directly below the first baffle, and wherein the lower surface of the processing chamber continuously extends between outer sidewalls of the processing ch

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsieh Te-Hsien
• Tseng Lee-Chuan

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/267

  using plasmas · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H01J37/32422

  Arrangement for selecting ions or species in the plasma · CPC title