Showerhead and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-11239057-B2
Application number	US-201816633651-A
Country	US
Kind code	B2
Filing date	Jun 25, 2018
Priority date	Jul 28, 2017
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

A showerhead provided in a chamber of a semiconductor manufacturing apparatus and facing a wafer holder includes: a disk-shaped member having a plurality of through holes penetrating the disk-shaped member in a direction of a thickness thereof; a high-frequency conductor embedded in the disk-shaped member; a hole provided in the disk-shaped member, extending in the direction of the thickness of the disk-shaped member and having a bottom exposing a portion of the conductor; an electrode terminal portion disposed in the hole and having a base portion electrically connected to the conductor and a columnar portion provided on the base portion; a cylindrical member having a first end portion fitted outside the columnar portion and facing the conductor and a second end portion facing away from the first end portion, and a sealing member surrounding the first end portion.

First claim

The invention claimed is:

1. A showerhead provided in a chamber of a semiconductor manufacturing apparatus and facing a wafer holder, comprising: a disk-shaped member having a plurality of through holes penetrating the disk-shaped member in a direction of a thickness thereof; a high-frequency conductor embedded in the disk-shaped member; a hole provided in the disk-shaped member, extending in the direction of the thickness of the disk-shaped member and having a bottom exposing a portion of the conductor; an electrode terminal portion disposed in the hole and having a base portion electrically connected to the conductor and a columnar portion provided on the base portion; a cylindrical member having a first end portion fitted outside the columnar portion and facing the conductor and a second end portion facing away from the first end portion, the second end portion's outer diameter being smaller than the first end portion's outer diameter, the second end portion's inner diameter being larger than the first end portion's inner diameter; and a sealing member surrounding the first end portion.

2. The showerhead according to claim 1 , further comprising a connection portion (Applicant's 20 ; FIG. 3A ) that is disposed in the hole and electrically connects the conductor and the base portion.

3. The showerhead according to claim 1 , wherein the base portion has a flange portion facing the conductor.

4. The showerhead according to claim 3 , wherein the cylindrical member covers at least a portion of an upper surface of the flange portion by the first end portion.

5. The showerhead according to claim 2 , wherein the connection portion includes a conductive annular member.

6. The showerhead according to claim 2 , wherein the connection portion includes a conductive member in a form of a hollowed conical frustum increased in diameter in a direction from the conductor toward the base portion.

7. The showerhead according to claim 1 , wherein the sealing member fills a gap formed between the cylindrical member and the electrode terminal portion and a gap formed between the cylindrical member and the hole.

8. The showerhead according to claim 1 , wherein the cylindrical member is made of aluminum nitride, and the sealing member is made of glass.

9. A method for manufacturing a showerhead, comprising: forming a hole in a disk-shaped member, which has a high-frequency conductor embedded therein, in a direction of a thickness of the disk-shaped member to expose a portion of the conductor; connecting an electrode terminal portion to the conductor exposed at a bottom of the hole; fitting a glass preform in a form of a doughnut to the electrode terminal portion; fitting to the electrode terminal portion a cylindrical member having a first end portion facing the conductor and a second end portion facing away from the first end portion, the second end portion's outer diameter being smaller than the first end portion's outer diameter, the second end portion's inner diameter being larger than the first end portion's inner diameter; fusing the glass preform; pressing the cylindrical member toward the conductor until the fused glass preform protrudes into a gap between the second end portion's outer diameter and an inner wall of the hole and a gap between the diameter-increased portion and an outer peripheral surface of the electrode terminal portion; and solidifying the fused glass preform to seal the cylindrical member.

Assignees

• Sumitomo Electric Industries

Inventors

• Kimura Koichi
• Mikumo Akira

Classifications

• H10P50/242

  of Group IV materials · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• C23C16/505

  using radio frequency discharges · CPC title

• H01J37/3244 Primary

  Gas supply means · CPC title