Liquid droplet discharging apparatus

Patent metadata

Field	Value
Publication number	US-11235599-B2
Application number	US-202016912920-A
Country	US
Kind code	B2
Filing date	Jun 26, 2020
Priority date	Jun 28, 2019
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

A liquid droplet discharging apparatus includes a transfer device, a discharging head, a first medium supply, a second medium supply and an imaging device. The transfer device is configured to transfer a work along a transfer direction. The discharging head is configured to discharge a liquid droplet of a functional liquid to the work. The first medium supply is configured to supply a first inspection medium, which receives the liquid droplet, in a direction orthogonal to the transfer direction. The second medium supply is configured to supply a second inspection medium, which receives the liquid droplet and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction. The imaging device is configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium.

First claim

I claim:

1. A liquid droplet discharging apparatus, comprising:
a transfer device configured to transfer a work along a transfer direction;
a discharging head configured to discharge a liquid droplet of a functional liquid to the work;
a first medium supply configured to supply a first inspection medium, which receives the liquid droplet discharged from the discharging head, in a direction orthogonal to the transfer direction;
a second medium supply configured to supply a second inspection medium, which receives the liquid droplet discharged from the discharging head and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction; and
an imaging device configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium,
wherein the first medium supply comprises:
a first unwinding shaft configured to unwind the first inspection medium; and
a first winding shaft configured to wind the first inspection medium,
wherein the second medium supply comprises:
a second unwinding shaft configured to unwind the second inspection medium; and
a second winding shaft configured to wind the second inspection medium, and
wherein the unwinding shafts are disposed at different positions in the direction orthogonal to the transfer direction, and the winding shafts are disposed at different positions in the direction orthogonal to the transfer direction.

2. The liquid droplet discharging apparatus of claim 1 ,
wherein the first medium supply supplies the first inspection medium along a first direction which is the direction orthogonal to the transfer direction,
the second medium supply supplies the second inspection medium along a second direction opposite to the first direction,
the first unwinding shaft is disposed closer to a discharge area, in which the liquid droplet is discharged from the discharging head, than the second winding shaft is, and
the second unwinding shaft is disposed closer to the discharge area than the first winding shaft is.

3. The liquid droplet discharging apparatus of claim 1 ,
wherein the first medium supply supplies the first inspection medium along a first direction which is the direction orthogonal to the transfer direction, and
the second medium supply supplies the second inspection medium along the first direction.

4. The liquid droplet discharging apparatus of claim 1 ,
wherein the first inspection medium and the second inspection medium are same.

5. The liquid droplet discharging apparatus of claim 1 ,
wherein the discharging head discharges a same functional liquid to the first inspection medium and the second inspection medium.

6. A liquid droplet discharging apparatus, comprising:
a transfer device configured to transfer a work along a transfer direction;
a discharging head configured to discharge a liquid droplet of a functional liquid to the work;
a first medium supply configured to supply a first inspection medium, which receives the liquid droplet discharged from the discharging head, in a direction orthogonal to the transfer direction;
a second medium supply configured to supply a second inspection medium, which receives the liquid droplet discharged from the discharging head and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction; and
an imaging device configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium,
wherein a first one of the first inspection medium and the second inspection medium is a medium having permeability, and
a second one of the first inspection medium and the second inspection medium is a medium having water repellency.

7. The liquid droplet discharging apparatus of claim 6 ,
wherein the discharging head discharges a same functional liquid to the first inspection medium and the second inspection medium.

8. The liquid droplet discharging apparatus of claim 6 ,
wherein the first inspection medium and the second inspection medium are same.

Assignees

• Tokyo Electron Ltd

Inventors

• Mine Yousuke

Classifications

• B41J29/393

  Devices for controlling or analysing the entire machine {; Controlling or analysing mechanical parameters involving printing of test patterns} · CPC title

• B41J15/22

  for feeding webs in separate paths during printing · CPC title

• B05C11/1034

  specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material (B05C5/0225, B05C11/1026 take precedence) · CPC title

• B05B13/0278

  Arrangement or mounting of spray heads (B05B13/0207 takes precedence) · CPC title

• B05B13/0221 Primary

  characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts (B05B13/0207 takes precedence; conveyors in general B65G) · CPC title