Intrinsically tunable and ultra-linear multi-fin MIS-HEMT devices

Patent metadata

Field	Value
Publication number	US-11233142-B2
Application number	US-201816759653-A
Country	US
Kind code	B2
Filing date	Oct 31, 2018
Priority date	Oct 31, 2017
Publication date	Jan 25, 2022
Grant date	Jan 25, 2022

Abstract

Devices and methods of the invention use a plurality of Fin structures and or combine a planar portion with Fin structures to compensate for the first derivative of transconductance, gm. In preferred methods and devices, Fins have a plurality of widths and are selected to lead to the separate turn-on voltage thresholds for the largest, intermediate and smallest widths of the MIS HEMT fins flatten the transconductance gm curve over an operational range of gate source voltage.

First claim

The invention claimed is:

1. A MIS-HEMT, comprising a substrate, a buffer layer upon the substrate, a plurality of multi-layer fins having a plurality of widths including fins with largest, intermediate and smallest widths, each fin having channel material and barrier material, wherein the plurality of multi-layer fins are formed upon the buffer layer, a gate insulator surrounds the plurality of multi-layer fins and gate metal conformally covers the gate insulator, wherein the largest, intermediate and smallest widths, are selected to lead to different turn-on voltage thresholds for the fins that have the largest, intermediate and smallest widths, such that a transconductance g m curve of the MIS-HEMT exhibits a peak transconductance plateau over an operational range of gate-source voltage.

2. The MIS-HEMT of claim 1 , wherein the channel material in each of the plurality of multi-layer fins forms a planar channel.

3. The MIS-HEMT of claim 2 , wherein the plurality of multi-layer fins are sized such that their current carrying capacity becomes larger than the planar channel to provide current linearization over the operational range.

4. The MIS-HEMT of claim 2 , wherein the planar channel comprises a width greater than 1 μm, and all of the plurality of widths are less than 500 nm.

5. The MIS-HEMT of claim 1 , wherein the plurality of multi-layer fins comprises multiple AIGaN/GaN fins and the gate insulator comprises one of Al 2 O 3 and HfO 2 .

6. The MIS-HEMT of claim 1 , wherein the plurality of multi-layer fins comprises families of fins, each family including a plurality of fins, with each family structured and sized to turn on at a different bias voltage.

7. The MIS-HEMT of claim 6 , wherein a number of fins of each family is proportional to a threshold voltage and current overdrive and varies from one fin family to another fin family.

8. The MIS-HEMT of claim 1 , wherein the plurality of widths are selected such that the threshold voltages (V T ) and a peak point of transconductance g m of single fins from the plurality of multi-layer fins lift up a decreasing region of transconductance g m at higher VGS in larger fins of the plurality of multi-layer fins.

9. The MIS-HEMT of claim 1 , wherein the plurality of widths are selected such that threshold voltage V T and g m,peak shift of transconductance g m contributed by a larger fin in a decreasing region of transconductance g m are compensated by smaller fins that have increasing g m at in the decreasing region of g m of the large fin.

10. The MIS-HEMT of claim 1 , comprising unetched source and drain regions.

11. The MIS-HEMT of claim 1 , wherein the channel and barrier materials comprise Group III-V materials.

12. The MIS-HEMT of claim 1 , wherein the channel and barrier materials comprise silicon with different ion-implant doses.

13. The MIS-HEMT of claim 1 , wherein the plurality of widths are selected such that the plurality of multi-layer fins are uniformly separated from each other by gate voltages in second derivative of transconductance g m ″ curves of the plurality multi-layer fins to complement each other for reducing the first derivative of transconductance g m ′ close to zero over the operational range.

Assignees

• Univ California
• The Regents of the Unverslty of California

Inventors

• Dayeh Shadi A
• Choi Woojin
• Chen Renjie
• Tanaka Atsunori
• Liu Ren

Classifications

• H10D62/8503

  Nitride Group III-V materials, e.g. AlN or GaN · CPC title

• H10D30/4755

  having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs · CPC title

• H10D30/475 Primary

  having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs · CPC title

• H10D30/62

  Fin field-effect transistors [FinFET] · CPC title

• H10D62/117

  Shapes of semiconductor bodies · CPC title