Methods of doping fin structures of non-planar transistor devices

Patent metadata

Field	Value
Publication number	US-11222947-B2
Application number	US-201515757251-A
Country	US
Kind code	B2
Filing date	Sep 25, 2015
Priority date	Sep 25, 2015
Publication date	Jan 11, 2022
Grant date	Jan 11, 2022

Abstract

Methods and structures formed thereby are described relating to the doping non-planar fin structures. An embodiment of a structure includes a substrate, wherein the substrate comprises silicon, a fin on the substrate comprising a first portion and a second portion; and a dopant species, wherein the first portion comprises a first dopant species concentration, and the second portion comprises a second dopant species concentration, wherein the first dopant species concentration is substantially less than the second dopant species concentration.

First claim

What is claimed is:

1. A microelectronic structure, comprising:
a substrate, wherein the substrate comprises silicon;
a fin on the substrate, wherein the fin comprises silicon, and wherein an entirety of a first portion of the fin comprises a first concentration of a dopant species, and an entirety of a second portion of the fin comprises a second concentration of the dopant species, wherein the first portion is above the second portion, and wherein the second concentration is at least an order of magnitude larger than the first concentration;
a dielectric material laterally adjacent to the fin, wherein a portion of the dielectric material is laterally adjacent to a sidewall of the second portion of the fin, and wherein an entirety of the portion of the dielectric material comprises the dopant species at a concentration exceeding the first concentration; and
a gate electrode on a first sidewall of the first portion of the fin, and on a second sidewall of the first portion of the fin, wherein the first sidewall is laterally opposite the second sidewall.

2. The structure of claim 1 , wherein the dopant species comprises a p type dopant species.

3. The structure of claim 1 , wherein the structure comprises a portion of a non-planar transistor structure.

4. The structure of claim 1 , wherein the structure comprises a portion of a lightly doped channel tri-gate transistor.

5. The structure of claim 1 , wherein a lattice parameter of the first portion is equal to a lattice parameter of the second portion.

6. The structure of claim 1 , wherein a source region is on a first side of the first portion of the fin, and a drain region is on a second, opposing side, of the first portion of the fin.

7. The structure of claim 1 , wherein a concentration of the dopant species increases from the first concentration in the first portion of the fin to the second concentration in the second portion of the fin, the second concentration being within 25 nm of an interface between the first and second portions.

8. The structure of claim 7 , wherein the first portion of the fin is no more than 50 nm in height, and the dopant species concentration increases from a minimum concentration to a peak concentration within 25 nm of the interface between the first and second portions.

9. The transistor structure of claim 1 , wherein the first concentration is less than 3e 17 atoms/cm 3 .

10. The transistor structure of claim 1 , wherein the second concentration within 75 nm below a top surface of the fin.

11. The transistor structure of claim 8 , wherein the dopant species concentration decreases from the second concentration to a third concentration within 100 nm below the top surface of the fin.

12. The transistor structure of claim 11 , wherein the minimum concentration is less than 5e17 atoms/cm 3 .

13. The transistor structure of claim 12 , wherein the second concentration is more than 1e18 atoms/cm 3 .

14. The transistor structure of claim 13 , wherein the third concentration is less than 1e18 atoms/cm 3 .

15. The transistor structure of claim 1 , wherein the dopant species comprises boron or arsenic.

16. The transistor structure of claim 1 , wherein the dopant species concentration within the fin decreases to the first concentration from a higher concentration proximal to a top surface of the fin.

17. The transistor structure of claim 16 , wherein the higher concentration is at least 3e18 atoms/cm 3 , and wherein the first concentration is less than 5e17 atoms/cm 3 .

Assignees

• Intel Corp

Inventors

• Weber Cory E
• Lilak Aaron D
• Liao Szuya S
• Budrevich Aaron A

Classifications

• H10P32/1408

  from or through or into an external applied layer, e.g. photoresist or nitride layers · CPC title

• H10P32/1406

  by ion implantation · CPC title

• H10P32/171

  being group IV material · CPC title

• H10P32/12

  between a solid phase and a gaseous phase · CPC title

• H10P30/212

  Through-implantation · CPC title