Switched closed loop read-out methods and systems for resonant sensing platforms

Patent metadata

Field	Value
Publication number	US-11221354-B2
Application number	US-201615201144-A
Country	US
Kind code	B2
Filing date	Jul 1, 2016
Priority date	Jul 1, 2016
Publication date	Jan 11, 2022
Grant date	Jan 11, 2022

Abstract

Embodiments of the invention include a resonant sensing system comprising driving circuitry to generate a drive signal during excitation time periods, a first switch coupled to the driving circuitry, and a sensing device coupled to the driving circuitry via the first switch during the excitation time periods. The sensing device includes beams to receive the drive signal during a first excitation time period that causes the beams to mechanically oscillate and generate a first induced electromotive force (emf) in response to the drive signal. The first switch decouples the sensing device and the driving circuitry during measurement time periods for measurement of the induced emf.

First claim

The invention claimed is:

1. A resonant sensing system comprising:
driving circuitry to generate a drive signal during excitation time periods;
a first switch coupled to the driving circuitry;
a sensing device coupled to the driving circuitry via the first switch during the excitation time periods, the sensing device having beams to receive the drive signal during a first excitation time period that causes the beams to mechanically oscillate and generates a first induced electromotive force (emf) in response to the drive signal, the first switch to decouple the sensing device and the driving circuitry during measurement time periods for measurement of the induced emf;
a second switch;
a signal conditioning interface circuitry coupled to the sensing device via the second switch during the measurement time periods and decoupled from the sensing device during the excitation time periods, the signal conditioning interface circuitry to receive a sense signal associated with the first induced emf during a first measurement time period and to generate a conditioned sense signal that is amplified and filtered by the signal conditioning interface circuitry; and
frequency detection circuitry coupled to the signal conditioning interface circuitry, the frequency detection circuitry to detect an extracted frequency of the conditioned sense signal during the first measurement time period, wherein the frequency detection circuitry provides the extracted frequency of the conditioned sense signal during the first measurement time period to the driving circuitry and this causes an adjustment of a frequency of the drive signal for a second excitation time period.

2. The resonant sensing system of claim 1 , wherein the driving circuitry sends the drive signal having the adjusted frequency to the sensing device during the second excitation time period and this drive signal causes the beams of the sensing device to mechanically oscillate and generate a second induced electromotive force (emf) in response to the drive signal.

3. The resonant sensing system of claim 2 , wherein the signal conditioning interface circuitry to receive a sense signal associated with the second induced emf during a second measurement time period.

4. The resonant sensing system of claim 3 , further comprising:
digital circuitry to control switching of the first and second switches between excitation and measurement periods until an extracted frequency of the conditioned sense signal matches a frequency of the drive signal and this causes the sensing device to be mechanically oscillating at a natural resonant frequency of the sensing device.

5. The resonant sensing system of claim 1 , wherein the frequency detection circuitry comprises a digital core to perform frequency extraction utilizing fast fourier transform techniques.

6. The resonant sensing system of claim 1 , wherein the frequency detection circuitry comprises a comparator and a digital counting circuitry to extract a frequency of the conditioned sense signal by counting a number of zero crossings within a pre-defined time period.

7. The resonant sensing system of claim 1 , wherein the sensing device includes the beams and a mass each being a conductive portion of a package-integrated resonant accelerometer which is fabricated using panel level processing.

Assignees

• Intel Corp

Inventors

• Dogiamis Georgios C
• Oster Sasha N
• Eid Feras
• Young Ian A

Classifications

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W72/252

  comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu · CPC title

• G01D18/006 Primary

  Intermittent recalibration · CPC title

• G01P15/097

  by vibratory elements · CPC title

• G01R23/02 Primary

  Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage · CPC title