Superconducting element, particle detection device, and particle detection method

Patent metadata

Field	Value
Publication number	US-11211541-B2
Application number	US-201916459777-A
Country	US
Kind code	B2
Filing date	Jul 2, 2019
Priority date	Jul 4, 2018
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

According to one embodiment, a superconducting element used as a pixel for detecting a particle is disclosed. The superconducting element includes at least one superconducting strip. The at least one superconducting strip includes a superconducting portion extending in a first direction, including first and second ends and made of a first superconducting material, a first conductive portion connected to the first end of the superconducting portion, and a second conductive portion connected to the second end of the superconducting portion. A superconducting region of the superconducting portion is configured to be dived when the particle is made incident on the superconducting portion along the first direction via the first conductive portion.

First claim

What is claimed is:

1. A superconducting element which is used as a pixel for detecting a particle, the superconducting element comprising at least one superconducting strip,
the at least one superconducting strip comprising:
a superconducting portion extending in a first direction, including first and second ends and made of a first superconducting material;
a first conductive portion connected to the first end of the superconducting portion; and
a second conductive portion connected to the second end of the superconducting portion,
wherein a superconducting region of the superconducting portion is configured to be divided when the particle is incident on the superconducting portion along the first direction via the first conductive portion.

2. The superconducting element of claim 1 , wherein the at least one superconducting strip is a plurality of superconducting strips.

3. The superconducting element of claim 2 , wherein:
the first conductive portion and the second conductive portion are made of the first superconducting material, and
a dimension in the first direction of the first conductive portion and a dimension in the first direction of the second conductive portion are greater than a dimension in a second direction perpendicular to the first direction of the superconducting portion.

4. The superconducting element of claim 3 , wherein:
the dimension in the second direction perpendicular to the first direction of the superconducting portion is less than or equal to 200 nm, and
a dimension in a third direction perpendicular to the first direction and the second direction of the superconducting portion is less than or equal to 200 nm.

5. The superconducting element of claim 4 , wherein the dimension in the first direction of the first conductive portion and the dimension in the first direction of the second conductive portion are greater than 200 nm.

6. The superconducting element of claim 1 , wherein the first conductive portion is made of a second superconducting material which is different from the first superconducting material.

7. The superconducting element of claim 6 , wherein a critical temperature of the second superconducting material is higher than a critical temperature of the first superconducting material.

8. The superconducting element of claim 4 , wherein the plurality of superconducting strips are arranged in the third direction without contacting each other.

9. The superconducting element of claim 4 , wherein the plurality of superconducting strips are two-dimensionally arranged in the second direction and the third direction without contacting each other.

10. The superconducting element of claim 1 , wherein the particle includes an X-ray photon, an extreme ultraviolet photon, an ultraviolet photon, an infrared photon, a visible light photon, an electron, a neutron, or an ion.

11. A particle detection device comprising:
a superconducting element used as a pixel for detecting a particle and comprising at least one superconducting strip; and
a current source which supplies a bias current to the at least one superconducting strip, and
the at least one superconducting strip comprising:
a superconducting portion extending in a first direction, including first and second ends and made of a first superconducting material;
a first conductive portion connected to the first end of the superconducting portion; and
a second conductive portion connected to the second end of the superconducting portion,
wherein a superconducting region of the superconducting portion is configured to be dived when the particle is incident on the superconducting portion along the first direction via the first conductive portion.

12. The particle detection device of claim 11 , wherein the at least one superconducting strip is a plurality of superconducting strips.

13. The particle detection device of claim 11 , wherein the bias current is smaller than a critical current of the first superconducting material.

14. The particle detection device of claim 11 , further comprising a measuring instrument which detects the particle based on a state in which the superconducting region of the superconducting portion is divided, and wherein the state arises in the at least one superconducting strip.

15. The particle detection device of claim 11 , further comprising a refrigerator which cools the at least one superconducting strip and maintains a superconducting state.

16. A particle detection method employing a superconducting element comprising at least one superconducting strip, each of the at least one superconducting strip comprising a superconducting portion extending in a first direction, including first and second ends and made of a first superconducting material, a first conductive portion connected to the first end of the superconducting portion, and a second conductive portion connected to the second end of the superconducting portion,
the particle detection method comprising:
cooling the at least one superconducting strip to set the at least one superconducting strip into a superconducting state;
supplying a bias current to the superconducting portion from the first conductive portion; and
causing a particle to be incident on the superconducting portion along the first direction via the first conductive portion to set a superconducting region of the superconducting portion into a divided state.

17. The particle detection method of claim 16 , wherein before irradiating the superconducting portion with the particle, the particle penetrates a sample.

18. The particle detection method of claim 16 , wherein the at least one superconducting strip is a plurality of superconducting strips.

19. The particle detection method of claim 16 , wherein the bias current is smaller than a critical current of the first superconducting material.

20. The particle detection method of claim 16 , wherein the particle includes any one of an X-ray photon, an extreme ultraviolet photon, an ultraviolet photon, an infrared photon, a visible light photon, an electron, a neutron, and an ion.

Assignees

• Toshiba Memory Corp

Inventors

• Yamane Takeshi

Classifications

• G01K7/006

  using superconductive elements · CPC title

• G01J2001/442

  Single-photon detection or photon counting · CPC title

• G01J1/44

  Electric circuits {(for command of an exposure part G03B7/02)} · CPC title

• G01J2001/4446

  Type of detector · CPC title

• H01L39/12 Primary

  Electricity · mapped topic