Superconducting nanowire avalanche photodetectors with reduced current crowding

Patent metadata

Field	Value
Publication number	US-10505094-B2
Application number	US-201514983139-A
Country	US
Kind code	B2
Filing date	Dec 29, 2015
Priority date	Dec 29, 2015
Publication date	Dec 10, 2019
Grant date	Dec 10, 2019

Abstract

Superconducting nanowire avalanche photodetectors (SNAPs) have using meandering nanowires to detect incident photons. When a superconducting nanowire absorbs a photon, it switches from a superconducting state to a resistive state, producing a change in voltage that can be measured across the nanowire. A SNAP may include multiple nanowires in order to increase the fill factor of the SNAP's active area and the SNAP's detection efficiency. But using multiple meandering nanowires to achieve high fill-factor in SNAPs can lead to current crowding at bends in the nanowires. This current crowding degrades SNAP performance by decreasing the switching current, which the current at which the nanowire transitions from a superconducting state to a resistive state. Fortunately, staggering the bends in the nanowires reduces current crowding, increasing the nanowire switching current, which in turn increases the SNAP dynamic range.

First claim

The invention claimed is:

1. A superconducting nanowire photodetector comprising:
a substrate;
a first nanowire disposed on the substrate and having a first straight section extending along a first direction and a first bent section electrically coupled to the first straight section; and
a second nanowire disposed on the substrate and having a second straight section parallel to the first straight section and a second bent section electrically coupled to the second straight section and staggered in the first direction with respect to the first bent section,
wherein the second bent section is staggered with respect to the first bent section by an offset selected to set a peak current density in the second bent section to within about 20% of an average current density in the second straight section.

2. The superconducting nanowire photodetector of claim 1 , wherein the first straight section has a width of about 10 nm to about 300 nm.

3. The superconducting nanowire photodetector of claim 1 , wherein the first straight section and the second straight section are arrayed on a pitch of about 50 nm to about 500 nm.

4. The superconducting nanowire photodetector of claim 1 , wherein the first bent section comprises a boundary defining at least a portion of one of a circle, a parabola, or a hyperbola.

5. The superconducting nanowire photodetector of claim 1 , wherein the offset between the second bent section and the first bent section is further selected to set the peak current density in the second bent section to within about 10% of the average current density in the second straight section.

6. The superconducting nanowire photodetector of claim 1 , wherein the offset between the second bent section and the first bent section is further selected to set the peak current density in the second bent section to less than or equal to about 110% of a peak current in the first straight section.

7. The superconducting nanowire photodetector of claim 1 , wherein the superconducting nanowire photodetector has an avalanche current of about 10 μA.

8. The superconducting nanowire photodetector of claim 7 , wherein the superconducting nanowire photodetector is configured to be biased at about 10 μA to about 100 μ A above the avalanche current.

9. The superconducting nanowire photodetector of claim 1 , further comprising:
a third nanowire disposed on the substrate and having a third straight section parallel to the first straight section and a third bent section electrically coupled to the third straight section, the third bent section staggered in the first direction with respect to at least one of the first bent section or the second bent section.

10. The superconducting nanowire photodetector of claim 1 , wherein the first nanowire and the second nanowire are disposed on a first side of the substrate.

11. A method of detecting photons with a superconducting nanowire detector comprising a substrate, a first nanowire disposed on the substrate and having a first straight section extending along a first direction and a first bent section electrically coupled to the first straight section, and a second nanowire disposed on the substrate and having a second straight section parallel to the first straight section and a second bent section electrically coupled to the second straight section and staggered in the first direction with respect to the first bent section, the method comprising:
cooling the superconducting nanowire detector below a critical temperature so as to cause the first nanowire and the second nanowire to become superconducting;
applying a bias current to the first nanowire and the second nanowire; and
measuring a change in resistance of the first nanowire caused by generation of a photoelectron in response to absorption of a photon by the first nanowire,
wherein applying the bias current comprises generating a peak current density in the second bent section that is within about 20% of an average current density in the second straight section.

12. The method of claim 11 , wherein the peak current density in the second bent section is within about 10% of an average current density in the second straight section.

13. The method of claim 11 , wherein applying the bias current comprises running a current of over about 10 μA through the first nanowire.

14. The method of claim 11 , wherein applying the bias current comprises running a current about 10 μA to about 100 μA above the avalanche current through the first nanowire.

15. The method of claim 11 , wherein measuring the change in resistance comprises measuring a change of about 100 kΩ to about 10 MΩ.

16. A superconducting nanowire photodetector comprising:
a planar substrate;
conductive material, disposed on the planar substrate, to carry a bias current and an avalanche current generated in response to detection of a photon; and
a plurality of insulating areas formed in the conductive material, the plurality of insulating areas comprising:
a first insulating area defining a first straight edge of the conductive material, the first insulating area having a first curved end tangent to a first line perpendicular to the first straight edge; and
a second insulating area defining a second straight edge of the conductive material parallel to the first straight edge, the second insulating area having a second curved end tangent to a second line parallel to the first line and perpendicular to the first straight edge and the second straight edge,
wherein the first line and the second line are separated by a distance selected to set a peak current density in the conductive material bordering the second curved end to within about 20% of an average current density in the conductive material bordering the second straight edge.

17. The superconducting nanowire photodetector of claim 16 , wherein the first curved end has a first shape and the second curved end has a second shape different than the first shape.

18. The superconducting nanowire photodetector of claim 16 , wherein a ratio of peak current density of the conductive material bordering the first curved end to an average current density of the conductive material bordering the first straight section is about 1.0 to about 1.2.

19. The superconducting nanowire photodetector of claim 16 , wherein the plurality of insulating areas further comprises:
a third insulating area defining a third straight edge of the conductive material parallel to the first straight edge and the second straight edge, the third insulating area having a third curved end tangent to a third line parallel to the first line and the second line and perpendicular to the first straight edge, the second straight edge, and the third straight edge.

20. The superconducting nanowire photodetector of claim 16 , wherein the plurality of insulating areas is formed on a first side of the substrate.

Assignees

• Massachusetts Inst Technology

Inventors

• Sunter Kristen Ann
• Najafi Faraz
• Mccaughan Adam Nykoruk
• Berggren Karl Kimon

Classifications

• G01J2001/4466

  Avalanche · CPC title

• G01J2001/442

  Single-photon detection or photon counting · CPC title

• H01L39/02 Primary

  Electricity · mapped topic

• H01L31/107

  Electricity · mapped topic

• G01J1/42 Primary

  using electric radiation detectors (optical or mechanical part G01J1/04; by comparison with a reference light or electric value G01J1/10) · CPC title