Methods for cleaning semiconductor device manufacturing apparatus

Patent metadata

Field	Value
Publication number	US-11211232-B2
Application number	US-201916398667-A
Country	US
Kind code	B2
Filing date	Apr 30, 2019
Priority date	Oct 29, 2018
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

The present disclosure describes a chuck-based device and a method for cleaning a semiconductor manufacturing system. The semiconductor manufacturing system can include a chamber with the chuck-based device configured to clean the chamber, a loading port coupled to the chamber and configured to hold one or more wafer storage devices, and a control device configured to control a translational displacement and a rotation of the chuck-based device. The chuck-based device can include a based stage, one or more supporting rods disposed at the base stage and configured to be vertically extendable or retractable, and a padding film disposed on the one or more supporting rods.

First claim

What is claimed is:

1. A method for cleaning a chamber of a semiconductor device manufacturing apparatus, comprising:
determining a contamination level in the chamber, wherein the chamber comprises an electrostatic chuck (ESC);
in response to the contamination level being equal to or above a reference level, loading a padding film on a substrate that is supported by one or more vertically retractable supporting rods on a stage of the ESC; and
moving, by displacing the stage of the ESC and stretching or retracting the one or more supporting rods, the padding film in contact with a component in the chamber.

2. The method of claim 1 , wherein determining the contamination level in the chamber comprises:
placing an other substrate in the chamber;
conducting a semiconductor manufacturing process on the other substrate; and
determining a particle count on a surface of the other substrate.

3. The method of claim 1 , wherein loading the padding film comprises:
attaching the padding film on the substrate via an adhesive, a tape, or a mechanical component; and
placing the substrate with the padding film on the stage of the ESC.

4. The method of claim 1 , wherein loading the padding film comprises dipping the padding film in an isopropanol, an alcohol, an organic solvent, or a de-ionized water.

5. The method of claim 1 , wherein moving the padding film in contact with the component comprises shifting the padding film towards inner surfaces of the chamber, a plasma cell housed in the chamber, or a gas cell housed in the chamber.

6. The method of claim 1 , wherein moving the padding film in contact with the component comprises wiping or rubbing the component using the padding film.

7. The method of claim 1 , wherein moving the padding film in contact with the component comprises rotating or displacing a stage of the ESC.

8. A method for operating an electrostatic chuck (ESC) to clean a chamber, comprising:
in response to a comparison result that a contamination level in the chamber is equal to or above a reference level, placing a padding film on a carrier substrate;
placing the carrier substrate on or re or more vertically retractable supporting rods on a stage of the ESC; and
shifting and rotating the padding film by displacing and rotating the stage of the ESC and stretching or retracting the one or more supporting rods, to conduct a wiping activity on a target inside the chamber.

9. The method of claim 8 , further comprising purging the ESC with an inert gas or air.

10. The method of claim 8 , further comprising spraying the padding film with an isopropanol, an alcohol, an organic solvent, or a de-ionized water.

11. The method of claim 8 , wherein placing the padding film on the carrier substrate comprises attaching the padding film to the carrier substrate via an adhesive, a tape, a mechanical component, or a Van der Waals force provided by a liquid.

12. The method of claim 8 , wherein placing the carrier substrate on the stage comprises securing the carrier substrate on the stage via an electrostatic force.

13. The method of claim 8 , wherein the ESC is housed in the chamber, and wherein shifting and rotating the padding film to conduct the wiping activity comprises contactingthe padding film with one or more inner surfaces of the chamber, a gas cell in the chamber, or a plasma cell in the chamber.

14. A method for cleaning a chamber of a semiconductor device manufacturing apparatus, comprising:
conducting one or more semiconductor manufacturing processes in the semiconductor device manufacturing apparatus, wherein a contaminant from the one or more semiconductor manufacturing processes adheres to a component in the chamber, and wherein the chamber comprises an electrostatic chuck (ESC);
placing a padding film on a carrier substrate;
placing the carrier substrate on one or more vertically retractable supporting rods on a stage of the ESC;
displacing the stage of the ESC and stretching the one or more supporting rods to move the padding film to be in contact with the component; and
shifting and rotating the padding film to remove the contaminant from the component.

15. The method of claim 14 , wherein placing the padding film comprises attaching the padding film to the carrier substrate via an adhesive, a tape, or a clamp.

16. The method of claim 14 , wherein placing the carrier substrate comprises:
applying, via a power supply, a voltage on an electrode of the ESC to secure the carrier substrate on the stage.

17. The method of claim 14 , wherein placing the carrier substrate comprises spraying an organic solvent on the padding film.

18. The method of claim 14 , wherein shifting and rotating the padding film comprises wiping the component with the padding film.

19. The method of claim 14 , wherein shifting and rotating the padding film comprises shifting and rotating the stage.

20. The method of claim 14 , wherein shifting and rotating the padding film comprises shifting and rotating the ESC while the component is under a vacuum environment.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsieh Ian
• Chen Che-Fu
• Liu Yan-Hong

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/72

  using electrostatic chucks · CPC title