Semiconductor cleaning apparatus and method
US-12551934-B2 · Feb 17, 2026 · US
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Chen Che-Fu patents
Chen Che-Fu is listed as an inventor on 71 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Che-Fu |
| Total patents | 71 |
| First publication | May 7, 2019 |
| Latest publication | Feb 17, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Systems and methods for inspection stations
US-12482682-B2 · Nov 25, 2025 · US
Wafer processing method
US-2025357218-A1 · Nov 20, 2025 · US
Semiconductor device
US-2025331264-A1 · Oct 23, 2025 · US
Wafer processing method
US-12444657-B2 · Oct 14, 2025 · US
Semiconductor cleaning apparatus and method
US-12420314-B2 · Sep 23, 2025 · US
Method of manufacturing a semiconductor device and a semiconductor device
US-12414347-B2 · Sep 9, 2025 · US
Screwless semiconductor processing chambers
US-2025069944-A1 · Feb 27, 2025 · US
Screwless semiconductor processing chambers
US-12165909-B2 · Dec 10, 2024 · US
Electrostatic chuck sidewall gas curtain
US-12154813-B2 · Nov 26, 2024 · US
Recent patents
Latest publications not already listed above.
Electrostatic Chuck Sidewall Gas Curtain
US-2024387228-A1 · Nov 21, 2024 · US
Fin Field-Effect Transistor With Void and Method of Forming The Same
US-2024371980-A1 · Nov 7, 2024 · US
Systems and methods for inspection stations
US-2024339344-A1 · Oct 10, 2024 · US
Semiconductor process chamber contamination prevention system
US-12090503-B2 · Sep 17, 2024 · US
Method of manufacturing a semiconductor device and a semiconductor device
US-2024297225-A1 · Sep 5, 2024 · US
Fin field-effect transistor with void and method of forming the same
US-12068398-B2 · Aug 20, 2024 · US
Systems and methods for inspection stations
US-12040205-B2 · Jul 16, 2024 · US
Method of manufacturing a semiconductor device and a semiconductor device
US-12027594-B2 · Jul 2, 2024 · US
Robot arm device and method for transferring wafer
US-11837484-B2 · Dec 5, 2023 · US
Semiconductor process chamber contamination prevention system
US-2023372960-A1 · Nov 23, 2023 · US
Wafer processing method
US-2023360977-A1 · Nov 9, 2023 · US
Semiconductor process chamber contamination prevention system
US-11779949-B2 · Oct 10, 2023 · US
Reflectance measurement system and method thereof
US-11756840-B2 · Sep 12, 2023 · US
Fin Field-Effect Transistor With Void and Method of Forming The Same
US-2023268427-A1 · Aug 24, 2023 · US
Semiconductor process chamber with heat pipe
US-11710620-B2 · Jul 25, 2023 · US
Systems and methods for orientator based wafer defect sensing
US-11664260-B2 · May 30, 2023 · US
Fin field-effect transistor with void and method of forming the same
US-11664444-B2 · May 30, 2023 · US
Systems and methods for robotic arm sensing
US-11664265-B2 · May 30, 2023 · US
Electrostatic chuck sidewall gas curtain
US-2023078610-A1 · Mar 16, 2023 · US
Screwless semiconductor processing chambers
US-11600517-B2 · Mar 7, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 72 |
| Taiwan Semoconductor Mfg Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 32 |
| H01L21/68707 | 32 |
| H10P72/0604 | 23 |
| H10P72/72 | 17 |
| H10P74/203 | 16 |