Diffractive optical element and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11204453-B2
Application number	US-201916700260-A
Country	US
Kind code	B2
Filing date	Dec 2, 2019
Priority date	Sep 13, 2016
Publication date	Dec 21, 2021
Grant date	Dec 21, 2021

Abstract

A diffractive optical element prevents degradation of the optical performance of the element due to moisture absorption of the resin layers from taking place and also can prevent cracks of the resin layers and peeling of the resin layers along the interface thereof from taking place in a hot environment or in a cold environment. The diffractive optical element comprises a first layer and a second layer sequentially laid on a substrate, a diffraction grating being formed at the interface of the first layer and the second layer, the height d of the diffraction grating, the average film thickness t1 of the first layer and the average film thickness t2 of the second layer satisfying the relationship requirements expressed by the expressions of 1.1×d≤t1≤50 μm and 30 μm≤t2≤(400 μm−t1−d).

First claim

What is claimed is:

1. A diffractive optical element comprising:
a substrate;
a first resin layer arranged on the substrate; and
a second resin layer arranged on the first layer,
wherein a diffraction grating is formed at an interface of the first resin layer and the second resin layer such that the diffraction grating has a grating part including a plurality of annular zones of which top ends are arranged concentrically,
wherein when d is a height of a grating part of the diffraction grating:
t1 is an average thickness of the first layer, excluding the height of the grating part; and
t2 is an average thickness of the second layer, excluding the height of the grating part, and
wherein d, t1, and t2 are such that:
t1 is at least 1.1 times d;
t2 is at least 30 μm; and
a sum of d, t1, and t2 is not greater than 400 μm.

2. The diffractive optical element according to claim 1 , wherein t1 is not greater than 50 μm.

3. The diffractive optical element according to claim 2 , wherein a sum of t1 and d is not greater than 50 μm.

4. The diffractive optical element according to claim 1 , wherein the sum of d, t1, and t2 is not greater than 300 μm.

5. The diffractive optical element according to claim 1 , wherein the sum of d, t1, and t2 is not greater than 200 μm.

6. The diffractive optical element according to claim 1 , wherein d is 8 μm to 25 μm.

7. The diffractive optical element according to claim 1 , wherein the plurality of annular zones are arranged at intervals of 0.15 mm to 3.0 mm.

8. The diffractive optical element according to claim 1 , wherein the first layer and the second layer comprise different resins.

9. The diffractive optical element according to claim 1 , wherein the substrate is glass.

10. The diffractive optical element according to claim 1 , wherein the diffraction optical element further comprises a second substrate provided on the second layer.

11. An optical apparatus comprising at least one optical element, wherein the optical element is the diffractive optical element according to claim 1 .

12. The optical apparatus according to claim 11 , wherein the diffractive optical element is a lens, and
wherein the optical apparatus is a camera.

Assignees

• Canon Kk

Inventors

• Niwa Maiko

Classifications

• G02B5/1857

  using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams · CPC title

• G02B5/1814 Primary

  structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence) · CPC title

• G02B7/1815

  with cooling or heating systems (cooling arrangements for laser mirrors H01S3/0401) · CPC title

• G02B5/1838

  for use with ultraviolet radiation or X-rays · CPC title

• G02B5/1895

  such optical elements having dioptric power · CPC title