Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

Patent metadata

Field	Value
Publication number	US-11199771-B2
Application number	US-201716339402-A
Country	US
Kind code	B2
Filing date	Sep 18, 2017
Priority date	Oct 20, 2016
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

First claim

The invention claimed is:

1. A pressure control valve comprising:
a passageway having a portion defining an opening for the flow of liquid and/or gas therethrough;
an obstructing member, displaceable relative to the opening, to obstruct the opening by differing amounts to regulate a volumetric flow rate of liquid and/or gas through the opening;
a piezo actuator; and
a linkage mechanism configured to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing member relative to the opening,
wherein the linkage mechanism comprises one or more members attached, or attachable, to a wall so as to be fixed at a first end in relation to the passageway, a moveable member of the one or more members moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending, or arranged to extend, between the wall and the moveable member such that an expansion of the piezo actuator results in movement of the moveable member in the first direction by an amount greater than the expansion of the piezo actuator, the moveable member connected to the obstructing member.

2. The pressure control valve of claim 1 , wherein, in use, the piezo actuator is provided at an angle of at least 2° to the second direction.

3. The pressure control valve of claim 1 , wherein the obstructing member is arranged such that the obstructing member is spaced apart from the portion of the passageway defining the opening in all positions.

4. The pressure control valve of claim 1 , further comprising a flexible portion defining a portion of a sidewall of the passageway, the flexible portion adapted to enable, by flexing, the linkage mechanism to transmit movement from outside the passageway to inside the passageway to displace the obstructing member.

5. The pressure control valve of claim 4 , wherein the flexible portion is a bellow, and/or the flexible portion comprises a metal.

6. The pressure control valve of claim 1 , further comprising an obstruction in the passageway placed and shaped to separate the flow of liquid and/or gas through the passageway into two separate flows.

7. The pressure control valve of claim 6 , further comprising a controller configured to control the pressure control valve at least partly based on a feed-back loop involving a signal indicative of pressure from a pressure sensor and/or a signal indicative of a position of the obstructing member from a position sensor.

8. The pressure control valve of claim 1 , wherein the linkage mechanism comprises a lever configured to amplify the magnitude of the dimensional change in the piezo actuator.

9. The pressure control valve of claim 8 , wherein the lever has its fulcrum at a first end and the obstructing member at a second end opposite the first end such that force from the piezo actuator is applied between the first end and the second end and/or the lever is in the passageway.

10. The pressure control valve of claim 8 , wherein the portion of the passageway defines a plurality of the openings for the flow of liquid and/or gas therethrough and the obstructing member comprises a plurality of through holes which align with the plurality of the openings for a maximum volumetric flow rate and which are movable out of alignment with the plurality of openings to reduce the volumetric flow rate.

11. The pressure control valve of claim 1 , wherein the linkage mechanism further comprises a hinged member hinged at a first portion so as to be in a fixed position relative to the passageway, at a second portion to a first end of the piezo actuator and at a third portion via linkage to the obstructing member, the piezo actuator having a second end hinged so as to be in fixed position relative to the passageway such that an expansion of the piezo actuator results in movement of the third portion relative to the passageway with a magnitude greater than the magnitude of the expansion.

12. The pressure control valve of claim 1 , wherein a surface of the obstructing member and a surface defining the passageway radially outward of the opening are tapered.

13. The pressure control valve of claim 1 , wherein, in use, the piezo actuator is provided at an angle of at least 2° but less than or equal to 45° to the second direction.

14. A fluid handling structure configured to confine immersion fluid to a region of a lithographic apparatus, the fluid handling structure comprising the pressure control valve of claim 1 .

15. An immersion lithographic apparatus comprising the fluid handling structure of claim 14 .

16. The pressure control valve of claim 1 , wherein the piezo actuator is external of the passageway.

17. The pressure control valve of claim 1 , wherein the piezo actuator is attached or attachable at a first end to the wall and connected at a second end to the moveable member.

18. The pressure control valve of claim 1 , further comprising a pressure sensor positioned downstream of the opening.

19. The pressure control valve of claim 1 , further comprising a position sensor to measure a position of the obstructing member.

20. A pressure control valve comprising:
a passageway having a portion defining an opening for the flow of liquid and/or gas therethrough;
a member, displaceable relative to the opening, to obstruct the opening by differing amounts to regulate flow of liquid and/or gas through the opening;
an actuator; and
a linkage mechanism configured to amplify a magnitude of a dimensional change in the actuator and to use the amplified dimensional change to displace the member relative to the opening,
wherein the linkage mechanism comprises a structure arranged to be fixed at an end in relation to the passageway, a moveable portion of the structure moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the actuator extending, or arranged to extend, between a wall and the moveable portion such that an expansion of the actuator results in movement of the moveable portion in the first direction by an amount greater than the expansion of the actuator, the moveable portion connected to the member.

Assignees

• Asml Netherlands Bv

Inventors

• Janssens Stef Marten Johan
• Cuypers Koen
• Cortie Rogier Hendrikus Magdalena
• Srivastava Sudhir
• Renckens Theodorus Johannes Antonius
• Gosen Jeroen Gerard
• Eummelen Erik Henricus Egidius Catharina
• Schellens Hendrikus Johannes
• Heeren Adrianus Marinus Wouter
• Lenssen Bo

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F16K37/0041

  for measuring valve parameters (F16K37/0033 takes precedence) · CPC title

• F16K31/008

  for sliding valves · CPC title

• H02N2/043

  Mechanical transmission means, e.g. for stroke amplification · CPC title

• G03F7/70341 Primary

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title