Single-shot, adaptive metrology of rotationally variant optical surfaces using a spatial light modulator

Patent metadata

Field	Value
Publication number	US-11168979-B2
Application number	US-201816758092-A
Country	US
Kind code	B2
Filing date	Oct 23, 2018
Priority date	Oct 24, 2017
Publication date	Nov 9, 2021
Grant date	Nov 9, 2021

Abstract

Single-shot, adaptive metrology of rotationally variant optical surfaces, such as toroids, off-axis conies and freeform surfaces. An adaptive interferometric null test uses a high definition liquid crystal phase-only spatial light modulator (SLM) as the reconfigurable null element, on which a simulated nulling phase function is encoded, based on the specifications of the surface under test to generate a null interferogram. The power component of the surface sag is nulled by system design, not the SLM, enabling the SLM to fully compensate the residual departure without the need to tilt the optic or use a custom Offner-null. By wrapping the phase function at multiples of 2*pi radian, the upper limit in sag of the optic under test is theoretically removed.

First claim

The invention claimed is:

1. A method for testing a rotationally variant optical surface relative to a design specification for the optical surface, comprising:
providing a sample beam from an interferometer in the form of a collimated beam from electromagnetic radiation;
diffracting the sample beam in the form of a collimated beam with a phase-only liquid crystal spatial light modulator, wherein the phase-only liquid crystal spatial light modulator is controlled to form a shaped wavefront for a diffraction order +1 designed to null the departure of the optical surface under test, from a sphere or a flat, based on the design specifications of the optical surface;
spatially filtering to remove other diffraction orders and imaging the +1 order diffracted beam shaped wavefront onto the optical surface being tested;
conditioning the shaped wavefront with the optical surface being tested;
producing a fringe pattern based on optical path differences and resulting interference between the shaped wavefront conditioned by the optical surface being tested and a reference beam of electromagnetic radiation provided from the interferometer; and
analyzing the shape of the optical surface based on the fringe pattern;
wherein a nulling phase function designed for the +1st order at the wavelength of the interferometer and matching an optical path difference based on the design specifications for the surface being tested is phase wrapped and encoded on the phase only liquid crystal spatial light modulator, and further comprising adding a tilt carrier phase function to the nulling phase function to form a composite phase function encoded on the phase only liquid crystal spatial light modulator to increase spatial separation of the +1 order diffracted beam from other orders of diffraction.

2. The method of claim 1 , wherein the design specification for the rotationally variant optical surface being tested is for a freeform rotationally variant surface whose rotational asymmetry goes beyond bi-axial symmetry or toroidal shape.

3. The method of claim 1 , wherein the nulling phase function is encoded on the phase only liquid crystal spatial light modulator with a minimum of 2 pixels per period to satisfy Nyquist sampling.

4. The method of claim 1 , wherein the nulling phase function is encoded on the phase only liquid crystal spatial light modulator with a minimum of 3 pixels per period.

5. The method of claim 1 , wherein the nulling phase function is encoded on the phase only liquid crystal spatial light modulator with a minimum of 4 pixels per period.

6. The method of claim 1 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 10 μm.

7. The method of claim 1 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 5 μm.

8. The method of claim 1 , wherein the sample beam is linearly polarized prior to being diffracted by the phase-only liquid crystal spatial light modulator.

9. The method of claim 1 , wherein the phase-only liquid crystal spatial light modulator is tilted at an angle of from about 1-15 degrees relative to normal to the sample beam from the interferometer.

10. The method of claim 1 , wherein the design specification of the rotationally variant optical surface being tested has a base spherical power component, and further comprising placing the optical surface being tested with the optical axis of the +1 order diffracted sample beam concentric to its medial center of curvature and imaging the +1 order diffracted beam shaped wavefront onto the optical surface with a spherical lens to null out a base spherical power component in optical path length differences between the shaped wavefront conditioned by the optical surface being tested and the reference beam provided from the interferometer.

11. The method of claim 1 , wherein the design specification of the rotationally variant optical surface being tested has a toroidal component in addition to a base spherical power component, and further comprising placing the optical surface being tested with the optical axis of the +1 order diffracted sample beam concentric to its medial center of curvature and imaging the +1 order diffracted beam shaped wavefront onto the optical surface with a spherical lens to null out the base spherical power component in optical path length differences between the shaped wavefront conditioned by the optical surface being tested and the reference beam of electromagnetic radiation provided from the interferometer, and tilting the optical surface being tested relative to the optical axis of the +1 order diffracted sample beam, and using a spherical mirror to return the sample beam reflected off the tilted optical surface being tested back to the sample being tested, to null the toroidal component of the optical path length difference between the shaped wavefront conditioned by the optical surface being tested and the reference beam of electromagnetic radiation provided from the interferometer.

12. The method of claim 11 , wherein the phase-only liquid crystal spatial light modulator is encoded with the composite wrapped phase function to null the residual optical path length difference between the shaped wavefront conditioned by the optical surface being tested and the reference beam of electromagnetic radiation provided from the interferometer, after nulling the toroidal component and base spherical power component by geometry of the configuration.

13. The method of claim 1 , wherein the design specification of the rotationally variant optical surface being tested does not have a base spherical power component and further comprising placing the optical surface being tested along the optical axis of the +1 order diffracted sample beam and imaging the +1 order diffracted beam shaped wavefront onto the optical surface with an afocal telescope.

14. The method of claim 13 , wherein the phase-only liquid crystal spatial light modulator is encoded with the composite wrapped phase function to null the residual optical path length difference between the shaped wavefront conditioned by the optical surface being tested and the reference beam of electromagnetic radiation provided from the interferometer.

15. The method of claim 1 , wherein the phase only liquid crystal spatial light modulator comprises a two-dimensional array of pixels having at least 1000 pixels in each dimension of the array.

16. The method of claim 15 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 10 μm in each dimension of the array.

17. The method of claim 15 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 5 μm in each dimension of the array.

18. The method of claim 1 , wherein the phase only liquid crystal spatial light modulator comprises a two-dimensional array of pixels having at least 2000 pixels in each dimension of the array.

19. The method of claim 18 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 10 μm in each dimension of the array.

20. The method of claim 18 , wherein the phase only liquid crystal spatial light modulator comprises pixels having a pixel pitch of less than 5 μm in each dimension of the array.

21. The method of claim 1 , wherein the composite phase function is encoded on the phase only liquid crystal spatial light modulator with a minimum

Assignees

• Univ Rochester

Inventors

• Chaudhuri Romita
• Rolland-Thompson Jannick

Classifications

• G01B11/2441 Primary

  using interferometry · CPC title

• G01M11/005

  Testing of reflective surfaces, e.g. mirrors · CPC title

• G01M11/0271

  by using interferometric methods · CPC title

• G01B9/02039 Primary

  by matching the wavefront with a particular object surface shape · CPC title