Stress compensation for piezoelectric optical MEMS devices

Patent metadata

Field	Value
Publication number	US-11148939-B2
Application number	US-201815890781-A
Country	US
Kind code	B2
Filing date	Feb 7, 2018
Priority date	Jun 30, 2014
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

An apparatus includes a lens material forming a lens. The apparatus also includes a piezoelectric capacitor over the lens material, where the piezoelectric capacitor is configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens. The apparatus further includes at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor. The at least one stress compensation ring is configured to at least partially reduce bending of the lens material caused by stress on or in the lens material.

First claim

What is claimed is:

1. An apparatus comprising:
a lens formed from a lens material;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second continuous ring-shaped electrode having a first surface facing away from the first electrode, the first electrode located between the second electrode and the lens material;
a first ring-shaped stress compensation structure extending over the lens material and having a first segment that covers an outer circumferential perimeter of the second electrode and having a second segment that covers a first portion of the first surface that forms a first edge with the outer circumferential perimeter; and
a second ring-shaped stress compensation structure extending over the lens material and having a third segment that covers an inner circumferential perimeter of the second electrode and having a second segment that covers a second portion of the first surface that forms a second edge with the inner circumferential perimeter,
wherein the first surface of the second electrode includes a third portion that is separate from the first and second portions and is not covered by the first and second ring-shaped stress compensation structures.

2. The apparatus of claim 1 , wherein the first and second ring-shaped stress compensation structures are each ring-shaped and are arranged concentrically with respect to one another.

3. The apparatus of claim 1 , wherein the first and second ring-shaped stress compensation structures are not connected to each other.

4. The apparatus of claim 1 , wherein:
the second electrode is ring-shaped; and
the third portion of the first surface of the second electrode is ring-shaped.

5. The apparatus of claim 1 , wherein a surface of the lens material is substantially planar when no voltage is applied across the piezoelectric capacitor.

6. The apparatus of claim 1 , wherein:
a surface of the lens material bulges downward when no voltage is applied across the piezoelectric capacitor; and
the piezoelectric capacitor is configured to cause the surface of the lens material to bulge upward in response to a voltage applied across the piezoelectric capacitor.

7. The apparatus of claim 1 , comprising a piezoelectric material disposed between the first and second electrodes of the piezoelectric capacitor, wherein the piezoelectric material is configured to change shape in response to a voltage applied across the piezoelectric capacitor.

8. The apparatus of claim 7 , wherein the first and second electrodes comprise at least one of platinum, nickel, or palladium, and the piezoelectric material comprises lead zirconium titanate (PZT).

9. The apparatus of claim 1 , further comprising a piezoelectric material between the first and second electrodes, and wherein the first ring-shaped stress compensation structure covers sidewalls of the first and second electrodes and a sidewall of the piezoelectric material, the sidewall of the piezoelectric material being coplanar with the sidewalls of the first and second electrodes.

10. The apparatus of claim 1 , wherein the first and second ring-shaped stress compensation structures touch the lens material.

11. A system comprising:
an auto-focus lens assembly comprising:
a lens formed from a lens material;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second electrode having a first surface facing away from the first electrode; and
a stress compensation structure comprising:
a first contiguous portion that extends over the lens material and covers an outer circumferential perimeter of the second electrode and a first portion of the first surface that forms a first edge with the outer circumferential perimeter, the first edge extending along the entire outer circumferential perimeter and being covered by the first contiguous portion; and
a second contiguous portion that extends over the lens material and covers an inner circumferential perimeter of the second electrode and a second portion of the first surface that forms a second edge with the inner circumferential perimeter, the second contiguous portion covering the entire second edge,
wherein the first and second contiguous portions of the stress compensation structure are disconnected from each other, and the second electrode is shaped as a ring, the first edge is an outer edge of the ring, and the second edge is an inner edge of the ring.

12. The system of claim 11 , comprising a piezoelectric material disposed between the first and second electrodes of the piezoelectric capacitor, wherein the piezoelectric material is configured to change shape in response to a voltage applied across the piezoelectric capacitor.

13. The system of claim 12 , wherein the piezoelectric capacitor causes a surface of the lens material to change shape in response to the voltage applied across the piezoelectric capacitor.

14. The system of claim 11 , wherein:
the outer edge is substantially circular; and
the inner edge is substantially circular.

15. The system of claim 11 , wherein the first and second contiguous portions of the stress compensation structure are disconnected from each other so that a third portion of the second electrode remains uncovered by the stress compensation structure.

16. The system of claim 11 , wherein the first and second contiguous portions are each ring-shaped and are arranged concentrically with respect to one another with the first contiguous portion being around the second contiguous portion.

17. An apparatus comprising:
a lens formed from a lens material;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second electrode having a first surface facing away from the first electrode;
a first ring-shaped stress compensation structure extending over the lens material and covering an outer circumferential perimeter of the second electrode and a first portion of the first surface that forms a first edge with the outer circumferential perimeter; and
a second ring-shaped stress compensation structure extending over the lens material and covering an inner circumferential perimeter of the second electrode and a second portion of the first surface that forms a second edge with the inner circumferential perimeter,
wherein the first surface of the second electrode includes a third portion that is separate from the first and second portions and is not covered by the first and second ring-shaped stress compensation structures, and the first and second contiguous portions are each ring-shaped and are arranged concentrically with respect to one another with the first contiguous portion being around the second contiguous portion.

18. A system comprising:
an auto-focus lens assembly comprising:
a lens formed from a lens material;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second electrode having a first surface facing away from the first electrode; and
a stress compensation structure comprising:
a first contiguous portion that extends over the lens material and covers an outer circumferential perimeter of the second electrode and a first portion of the first surface that forms a first edge with the outer circumferential perimeter, the first edge extending along the entire outer circumferential perimeter and being covered by the first contiguous portion; and
a second contiguous portion that extends over the lens material and covers an inner circumferential perimeter of the second electrode and a second portion of the first surface that forms a seco

Assignees

• Texas Instruments Inc

Inventors

• Chang Yungshan
• Jackson Ricky A
• Ritchison Jeff W
• Jiang Neng

Classifications

• B81B3/0072 Primary

  For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers · CPC title

• B81B2201/047

  Optical MEMS not provided for in B81B2201/042 - B81B2201/045 · CPC title

• B81C1/00349

  Creating layers of material on a substrate · CPC title

• B81C2201/0174

  for making multi-layered devices, film deposition or growing · CPC title

• B81C1/00523 Primary

  Etching material · CPC title