Method for the formation of tantalum carbides on graphite substrate

Patent metadata

Field	Value
Publication number	US-11130152-B2
Application number	US-201916699093-A
Country	US
Kind code	B2
Filing date	Nov 28, 2019
Priority date	Nov 28, 2019
Publication date	Sep 28, 2021
Grant date	Sep 28, 2021

Abstract

A method for the formation of tantalum carbides on a graphite substrate includes the steps of: (a) adding an organic tantalum compound, a chelating agent, a pre-polymer to an organic solvent to form a tantalum polymeric solution; (b) subjecting a graphite substrate with the tantalum polymeric solution to a curing process to form a polymeric tantalum film on the graphite substrate; and (c) subjecting the polymeric tantalum film on the graphite substrate in an oven to a pyrolytic reaction in the presence of a protective gas to obtain a protective tantalum carbide on the graphite substrate.

First claim

What is claimed is:

1. A method for the formation of tantalum carbides on a graphite substrate, comprising:
(A) providing an organic tantalum compound;
(B) adding the organic tantalum compound to a chelating agent to form a chelated tantalum compound;
(C) adding the chelated tantalum compound to an organic solvent to form a tantalum solution;
(D) adding a pre-polymer to the tantalum solution to form a tantalum polymeric solution;
(E) applying the tantalum polymeric solution onto a graphite substrate;
(F) subjecting the graphite substrate with the tantalum polymeric solution to a curing process to form a polymeric tantalum film on the graphite substrate;
(G) placing the polymeric tantalum film on the graphite substrate in an oven; and
(H) subjecting the polymeric tantalum film on the graphite substrate in the oven to a pyrolytic reaction in the presence of a protective gas to obtain a protective tantalum carbide on the graphite substrate.

2. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the organic tantalum compound is a liquid organic tantalum source.

3. The method for the formation of tantalum carbides on a graphite substrate of claim 2 , wherein the liquid organic tantalum source is selected from a group consisting of tantalum methoxide, tantalum ethoxide, tantalum isopropoxide and tantalum butoxide.

4. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the organic solvent is selected from a group consisting of methylpyrrolidone and dimethylacetamide.

5. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the pre-polymer is selected from a group consisting of phenolic resins, polyimide and furfural resin.

6. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , further comprising:
adding tantalum powders to the tantalum polymeric solution before applying the tantalum polymeric solution onto the graphite substrate.

7. The method for the formation of tantalum carbides on a graphite substrate of claim 6 , wherein the tantalum powders have a particle size not greater than 30 μm and a weight of 20% to 50% of a total weight of the tantalum polymeric solution with the tantalum powders.

8. The method for the formation of tantalum carbides on a graphite substrate of claim 6 , wherein the tantalum powders are selected from a group consisting of tantalum metal powders and tantalum oxide powders.

9. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the curing process is performed at a temperature of 120° C.-450° C. for 1 hour to 3 hours.

10. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the pyrolytic reaction is performed at a temperature of 2000° C.-2300° C. for 12 hour to 24 hours under a pressure of 50 torr-600 torr.

11. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the pyrolytic reaction is performed 5 to 10 times.

12. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the protective gas is selected from a group consisting of argon, helium and an argon/hydrogen mixture.

13. The method for the formation of tantalum carbides on a graphite substrate of claim 1 , wherein the protective tantalum carbide has a thickness of 40 μm to 250 μm.

Assignees

• Nat Chung Shan Inst Science & Tech

Inventors

• Ko Cheng-Jung
• Huang jun-bin
• Kuo Chih-Wei
• Ma Dai-Liang
• Yu Bang-Ying

Classifications

• C23C18/02

  by thermal decomposition · CPC title

• C01G35/00

  Compounds of tantalum · CPC title

• C23C18/1204 Primary

  inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds · CPC title

• B05D2601/28

  Metals · CPC title

• B05D2518/00

  Other type of polymers · CPC title