Method to selectively pattern a surface for plasma resistant coat applications

Patent metadata

Field	Value
Publication number	US-11124659-B2
Application number	US-201815883787-A
Country	US
Kind code	B2
Filing date	Jan 30, 2018
Priority date	Jan 30, 2018
Publication date	Sep 21, 2021
Grant date	Sep 21, 2021

Abstract

A method for providing a part with a plasma resistant ceramic coating for use in a plasma processing chamber is provided. A patterned mask is placed on the part. A film is deposited over the part. The patterned mask is removed. A plasma resistant ceramic coating is applied on the part.

First claim

What is claimed is:

1. A method for providing an etch chamber part with a plasma resistant ceramic coating, comprising:
placing a patterned mask on the etch chamber part, wherein the patterned mask comprises a layer of at least one of a powder coating, adhesive tapes, photosensitive resist, paint, silicones, or hardmasks;
depositing a film over the etch chamber part, wherein the film is a molecular monolayer;
removing the patterned mask after depositing the film;
applying a plasma resistant ceramic coating on the etch chamber part after removing the patterned mask; and
removing the film after applying the plasma resistant ceramic coating on the part.

2. The method, as recited in claim 1 , wherein the removing the film removes part of the plasma resistant ceramic coating that is applied over the film.

3. The method, as recited in claim 1 , wherein the film is a monolayer formed from a chemical precursor agent of at least one of a group comprising of hexamethyldisilazane (HMDS), alkoxysilanes and alkysilanes.

4. The method, as recited in claim 1 , further comprising removing one or more parts of the plasma resistant ceramic coating that is deposited over the film, comprising wiping or soaking the plasma resistant ceramic coating with at least one of isopropyl alcohol, PVA, alternative soft scrubbing or polish media, acetone, hydrogen fluoride/hydrogen peroxide solution, hydrogen fluoride solutions with glycerin, glycols or an ammonia containing solution or cleaning with detergents, ultrasonication or megasonication, water jet, CO 2 blasting or soft bead blasting.

5. The method, as recited in claim 1 , further comprising removing one or more parts of the plasma resistant ceramic coating that is deposited over the film, comprising directing solid CO 2 shavings towards the plasma resistant ceramic coating at a pressure greater than about 25 psi, wherein parts of the plasma ceramic coating that are not over the film are not removed.

6. The method, as recited in claim 1 , wherein the applying the plasma resistant ceramic coating comprises applying a thermal spray coating.

7. The method, as recited in claim 1 , further comprising cleaning the part after the removing the patterned mask and before applying the plasma resistant ceramic coating.

8. The method, as recited in claim 1 , wherein the plasma resistant ceramic coating comprises one or more of yttria, zirconia, or alumina.

9. The method, as recited in claim 1 , wherein the plasma resistant ceramic coating comprises one or more of a lanthanide series of a Group III or Group IV element.

10. The method, as recited in claim 1 , wherein the etch chamber part is at least one of a chamber liner, door, or pinnacle.

11. The method, as recited in claim 1 , wherein the applying the plasma resistant ceramic coating is after removing the patterned mask, and wherein the removing the patterned mask is after depositing the film, and wherein the depositing the film is after placing the patterned mask.

12. The method, as recited in claim 1 , further comprising using the part as a chamber liner, chamber door, or chamber pinnacle in an etch chamber.

Assignees

• Lam Res Corp

Inventors

• Yasseri Amir A
• Outka Duane
• Shih Hong
• Daugherty John

Classifications

• C09D1/00

  Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances · CPC title

• C23C4/18

  After-treatment · CPC title

• C01F7/02

  Aluminium oxide; Aluminium hydroxide; Aluminates · CPC title

• C23C4/02

  Pretreatment of the material to be coated, e.g. for coating on selected surface areas · CPC title

• C23C4/12

  characterised by the method of spraying · CPC title