IPS thin-film transistor array substrate and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11114475-B2
Application number	US-201715744067-A
Country	US
Kind code	B2
Filing date	Dec 20, 2017
Priority date	Nov 22, 2017
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

The present invention provides an IPS TFT array substrate and a manufacturing method thereof. The manufacturing method of an IPS TFT array substrate of the present invention includes: forming a gate electrode, a scan line, a pixel electrode, and a common electrode with a first mask-involved operation, forming a first through hole and a second through hole in the gate insulation layer and an active layer with a second mask-involved operation, and forming a source electrode, a drain electrode, a data line, and a common electrode line with a third mask-involved operation. The present invention uses only three mask-involved operations to complete the manufacturing of an IPS TFT array substrate. Compared to the state of the art, the number of masks used is reduced, the manufacturing time is shortened, and thus the manufacturing cost is lowered. The IPS TFT array substrate of the present invention has a simple manufacturing process, a low manufacturing cost, and excellent electrical properties.

First claim

What is claimed is:

1. A method for manufacturing an in-plane switching (IPS) thin-film transistor (TFT) array substrate, comprising the following steps:
S1: providing a backing plate and forming a gate electrode, a scan line, a pixel electrode, and a common electrode on the backing plate with a first mask-involved operation, wherein the scan line and the gate electrode are connected to each other;
S2: depositing a gate insulation layer on the gate electrode, the scan line, the pixel electrode, the common electrode, and the backing plate, depositing a semiconductor layer on the gate insulation layer, and subjecting the gate insulation layer and the semiconductor layer to patterning treatment with a second mask-involved operation to form a first through hole and a second through hole in the gate insulation layer and an active layer located above and corresponding to the gate electrode, wherein the first through hole and the second through hole are respectively corresponding to and located above the pixel electrode and the common electrode; and
S3: depositing a source-drain metal layer on the active layer and the gate insulation layer and subjecting the source-drain metal layer to patterning treatment with a third mask-involved operation so as to form a source electrode, a drain electrode, a data line, and a common electrode line, wherein the source electrode and the drain electrode are respectively in contact engagement with two sides of the active layer; the data line and the source electrode are connected to each other; the drain electrode is connected through the first through hole of the gate insulation layer to the pixel electrode; and the common electrode line is connected through the second through hole of the gate insulation layer to the common electrode;
wherein Step S1 comprises:
S11: depositing a first metal layer on the backing plate with physical vapor deposition;
S12: subjecting the first metal layer to patterning treatment with the first mask-involved operation to form a predetermined gate electrode pattern and a predetermined scan line pattern, and the pixel electrode and the common electrode; and
S13: carrying out an operation of coating a second metal layer on the predetermined gate electrode pattern and the predetermined scan line pattern to form the gate electrode and the scan line, wherein the second metal layer has electrical conductance greater than electrical conductance of the first metal layer; and
wherein the first metal layer is subjected to the patterning treatment of Step S12 to form a first metal pattern that includes a first part and a second part different from the first part, the first part including the predetermined gate electrode pattern and the predetermined scan line pattern, the second part including the pixel electrode and the common electrode, wherein the operation of coating is carried out after the formation of the first metal pattern such that the second metal layer is coated on the first part of the first metal pattern to cover the first part of the first metal pattern, while the second part of the first metal pattern does not include the second metal layer coated thereon and is completely exposed outside from the second metal layer.

2. The method for manufacturing the IPS TFT array substrate according to claim 1 , wherein the first metal layer is formed of a material comprising one or multiple ones of molybdenum, molybdenum-titanium alloy, indium tin oxide, molybdenum-tungsten alloy, molybdenum-tantalum alloy, and molybdenum-niobium alloy.

3. The method for manufacturing the IPS TFT array substrate according to claim 1 , wherein the second metal layer is formed of a material comprising copper.

4. The method for manufacturing the IPS TFT array substrate according to claim 1 , wherein an operation of coating the second metal layer on the predetermined gate electrode pattern and the predetermined scan line pattern comprises electrical plating.

5. The method for manufacturing the IPS TFT array substrate according to claim 1 , wherein the second mask-involved operation comprises a half-tone mask based operation and Step S2 comprises:
S21: depositing the gate insulation layer on the gate electrode, the scan line, the pixel electrode, the common electrode, and the backing plate and depositing the semiconductor layer on the gate insulation layer; and
coating a photoresist layer on the semiconductor layer, subjecting the photoresist layer to exposure and development with a half-tone mask, forming, in the photoresist layer, a first via that corresponds to and is located above the pixel electrode and a second via that corresponds to and is located above the common electrode, and a bump that corresponds to and is located above the gate electrode;
S22: subjecting the gate insulation layer and the semiconductor layer to etching with the photoresist layer as a barrier layer so as to form a third via and a fourth via extending through the gate insulation layer and the semiconductor layer, wherein the third via and the fourth via respectively correspond to the first via and the second via;
S23: subjecting the photoresist layer to ashing treatment to thin a portion of the photoresist layer corresponding to the bump and remove a remaining area of the photoresist layer;
S24: subjecting the semiconductor layer to etching with the portion of the photoresist layer corresponding to the bump as a barrier layer so as to form an active layer that is located above and corresponds to the gate electrode, and an upper section of each of the third via and the fourth via that is located in the semiconductor layer is removed so as to convert into the first through hole and the second through hole located in the gate insulation layer, respectively; and
S25: removing a remaining portion of the photoresist layer.

6. The method for manufacturing the IPS TFT array substrate according to claim 5 , wherein the half-tone mask comprises a first area that corresponds to the first via and the second via, a second area that corresponds to the bump, and a third area other than the first area and the second area, wherein the first area has light transmittance greater than light transmittance of the third area and the light transmittance of the third area is greater than light transmittance of the second area; and the photoresist layer comprises a positive photoresist material.

7. The method for manufacturing the IPS TFT array substrate according to claim 6 , wherein the light transmittance of the first area is 100%, the light transmittance of the second area is 0, and the light transmittance of the third area is 0-100%.

8. A method for manufacturing an in-plane switching (IPS) thin-film transistor (TFT) array substrate, comprising the following steps:
S1: providing a backing plate and forming a gate electrode, a scan line, a pixel electrode, and a common electrode on the backing plate with a first mask-involved operation, wherein the scan line and the gate electrode are connected to each other;
S2: depositing a gate insulation layer on the gate electrode, the scan line, the pixel electrode, the common electrode, and the backing plate, depositing a semiconductor layer on the gate insulation layer, and subjecting the gate insulation layer and the semiconductor layer to patterning treatment with a second mask-involved operation to form a first through hole and a second through hole in the gate insulation layer and an active layer located above and corresponding to the gate electrode, wherein the first through hole and the second through hole are respectively corresponding to and located above the pixel electrode and the common electrode; and
S3: depositing a source-drain metal layer on the active layer and the gate insulation layer and subjecting the source-drai

Assignees

• Shenzhen China Star Optoelectronics Semiconductor Display Tech Co Ltd

Inventors

• Zhou Zhichao
• Xia Hui
• Chen Meng

Classifications

• H10D86/441

  Interconnections, e.g. scanning lines · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title

• H10D86/021

  of multiple TFTs · CPC title

• H10D86/0231 Primary

  using masks, e.g. half-tone masks · CPC title

• G02F1/136295

  Materials; Compositions; Manufacture processes · CPC title