Method and tip substrate for scanning probe microscopy

Patent metadata

Field	Value
Publication number	US-11112427-B2
Application number	US-202017069228-A
Country	US
Kind code	B2
Filing date	Oct 13, 2020
Priority date	Oct 17, 2019
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure.

First claim

What is claimed is:

1. A method for performing a scanning probe microscopy (SPM) measurement on a sample, the method comprising:
attaching the sample to a cantilever;
providing a substrate comprising on a surface of the substrate a first SPM tip and second SPM tip that differ from each other in material composition, shape, or size;
performing a first SPM measurement by scanning the sample across the first SPM tip, wherein performing the first SPM measurement comprises slicing away a layer of the sample using the first SPM tip; and
performing a second SPM measurement by scanning the sample across the second SPM tip after performing the first SPM measurement.

2. The method according to claim 1 , wherein the first SPM tip and the second SPM tip differ from each other in material composition.

3. The method according to claim 1 , wherein the first SPM tip and the second SPM tip differ from each other in shape.

4. The method according to claim 1 , wherein the first SPM tip and the second SPM tip differ from each other in size.

5. The method according to claim 1 , wherein the first SPM tip is electrically coupled to an electronic component mounted on or incorporated in the substrate.

6. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement as the cantilever is held parallel to the surface of the substrate.

7. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement as the cantilever is held at an angle relative to the substrate.

8. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement such that a surface of the sample is essentially parallel to the substrate.

9. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement such that a first surface of the cantilever is opposite the sample and tilted at a first angle with respect to the sample and a second surface of the cantilever facing the sample is parallel to or at a second angle with respect to the sample, the second angle being different from the first angle.

10. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement while the first SPM tip is enveloped by a liquid.

11. The method according to claim 1 , wherein performing the second SPM measurement comprises performing the second SPM measurement while the second SPM tip is enveloped by a liquid.

12. The method according to claim 1 , wherein performing the first SPM measurement comprises performing the first SPM measurement while the sample is encapsulated by a supporting material.

13. A substrate comprising on its surface a first scanning probe microscopy (SPM) tip and a second SPM tip that differs from the first SPM tip in material composition, shape, or size, wherein the first SPM tip is configured for slicing away a layer of a sample and wherein the second SPM tip is configured for scanning the sample across the second SPM tip after slicing away the layer of the sample.

Assignees

• Imec Vzw

Inventors

• Hantschel Thomas
• Bender Hugo
• Paredis Kristof
• Kanniainen Antti

Classifications

• G01Q60/30

  Scanning potential microscopy · CPC title

• G01Q60/24

  AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title

• G01Q70/14

  Particular materials · CPC title

• G01Q70/10 Primary

  Shape or taper · CPC title

• G01Q60/50

  MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes · CPC title