Sensor with droplet retaining structure

Patent metadata

Field	Value
Publication number	US-11099157-B2
Application number	US-201816119360-A
Country	US
Kind code	B2
Filing date	Aug 31, 2018
Priority date	Jul 6, 2018
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

This disclosure describes methods and devices that assist in forming biosensors. Specifically, features that align solutions containing molecules to be immobilized on biosensors. A retaining structure may be disposed at least partially around a target surface of a substrate. A resonating structure may be disposed on the target surface. A droplet of functionalized material may be disposed on the resonating structure and the target surface, which may be auto-aligned and retained by the retaining structure on the target surface to consistently cover the resonating structure.

First claim

What is claimed is:

1. A sensor comprising:
a substrate defining a target surface and a retaining structure extending at least partially around the target surface, the target surface defining an axis orthogonal to the target surface, the retaining structure having a height extending in a direction of the axis and a width extending in a direction that is orthogonal to the axis;
a resonating structure disposed on the target surface of the substrate comprising a piezoelectric layer; and
an insulating layer disposed on the resonating structure configured to couple to a functionalized material, wherein at least some portion of the functionalized material is disposed on the target surface,
wherein a portion of the target surface between the resonating structure and the retaining structure has a width equal to at least 5 micrometers.

2. The sensor of claim 1 , wherein the retaining structure comprises a channel having a height extending into the substrate.

3. The sensor of claim 1 , wherein the retaining structure is a protrusion having a height extending out of the substrate.

4. The sensor of claim 3 , wherein the retaining structure comprises hydrophobic material.

5. The sensor of claim 1 , wherein the height of the retaining structure is at least 0.01 micrometers.

6. The sensor of claim 1 , wherein the retaining structure comprises a sidewall surface extending from the target surface, wherein the sidewall surface forms an angle with the target surface with an absolute value of at least 60 degrees.

7. The sensor of claim 6 , wherein the sidewall surface forms an angle with the target surface with an absolute value equal to 90 degrees.

8. The sensor of claim 1 , further comprising an oxide layer disposed between the resonating structure and the insulating layer.

9. The sensor of claim 1 , further comprising a functionalized material layer comprising molecular recognition components bound to the insulating layer.

10. The sensor of claim 1 , wherein the insulating layer comprises silane.

11. The sensor of claim 1 , wherein the portion of the target surface between the resonating structure and the retaining structure has a width that is sufficient to allow for full coverage of the resonator structure by a droplet of the functionalized material.

12. The sensor of claim 11 , wherein the droplet of the functionalized material has a volume such that it will auto-align to the resonating structure on the target surface.

13. The sensor of claim 1 , wherein a portion of the target surface between the resonating structure and the retaining structure has a width equal to at most about 25 μm.

Assignees

• Qorvo Us Inc
• Qorvo Biotechnologies Llc

Inventors

• Webster James Russell

Classifications

• G01N2291/0255

  (Bio)chemical reactions, e.g. on biosensors · CPC title

• G01N29/036

  by measuring frequency or resonance of acoustic waves · CPC title

• G01N29/2437

  Piezoelectric probes · CPC title

• G01N29/222 Primary

  Constructional or flow details for analysing fluids (optoacoustic fluid cells G01N29/2425) · CPC title

• G01N29/022 Primary

  Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title