Doped gallium oxide crystalline material and preparation method and application thereof

Patent metadata

Field	Value
Publication number	US-11098416-B2
Application number	US-201916508211-A
Country	US
Kind code	B2
Filing date	Jul 10, 2019
Priority date	Jan 25, 2017
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

A Group VB element doped with a β-gallium oxide crystalline material, and a preparation method and application thereof. The series doped with the β—Ga2O3 crystalline material is monoclinic, the space group is C2/m, the resistivity is in the range of 2.0×10−4 to 1×104Ω·cm, and/or the carrier concentration is in the range of 5×1012 to 7×1020/cm3. The preparation method comprises steps of: mixing M2O5 and Ga2O3 with a purity of 4N or more at molar ratio of (0.000000001-0.01):(0.999999999-0.99); an then performing crystal growth. The present invention can prepare a high-conductivity β-Ga2O3 crystalline material with n-type conductivity characteristics by conventional processes, providing a basis for applications thereof to electrically powered electronic devices, optoelectronic devices, photocatalysts or conductive substrates.

First claim

We claim:

1. A doped gallium oxide crystalline material, wherein the gallium oxide crystalline material is doped with a Group VB element, and the gallium oxide crystalline material has a resistivity in a range of 2.0×10 −4 to 1×10 4 Ω·cm, a carrier concentration in the range of 5×10 12 to 7×10 20 /cm 3 , or both; and
a molecular formula of the doped gallium oxide crystalline material is Ga 2 ( 1-x )M 2 O 3 , doped element M is vanadium (V), niobium (Nb), tantalum (Ta), or a combination thereof, and x is defined as 0.000000001 ≤x ≤0.01.

2. The doped gallium oxide crystalline material of claim 1 , wherein the gallium oxide is a monoclinic crystal with a space group of C2/m.

3. The doped gallium oxide crystalline material of claim 1 , wherein x is defined as 0.000001 ≤x ≤0.01.

4. The doped gallium oxide crystalline material of claim 1 , wherein the doped gallium oxide crystalline material is Ta-doped —Ga 2 O 3 crystalline material, and the Ta-doped —Ga 2 O 3 crystalline material has a resistivity in a range of 2.0×10 4 to 1×10 4 Ω·cm, a carrier concentration in a range of 5×10 12 to 7×10 20 /cm 3 , or both.

5. The doped gallium oxide crystalline material of claim 4 , wherein the Ta-doped —Ga 2 O 3 crystalline material is a Ta-doped Ga 2 O 3 crystal, and the Ta-doped Ga 2 O 3 crystal optionally has a resistivity in a range of 2.0×10 −3 to 3.6×10 2 Ω·cm, a carrier concentration in a range of 3.7×10 15 to 6.3×10 19 /cm 3 , or both.

6. The doped gallium oxide crystalline material of claim 4 , wherein the Ta-doped —Ga 2 O 3 crystalline material is a Ta-doped Ga 2 O 3 single crystal, and the Ta-doped Ga 2 O 3 single crystal optionally has a resistivity in a range of 4×10 −3 to 7.9Ω·cm, a carrier concentration in a range of 3.7×10 15 to 3.0×10 19 /cm 3 , or both.

7. The doped gallium oxide crystalline material of claim 1 , wherein the doped gallium oxide crystalline material is a Nb-doped Ga 2 O 3 crystalline material having a resistivity in a range of 2.5×10 −4 to 1×10 4 Ω·cm, a carrier concentration in a range of 5×10 12 to 5.6×10 20 /cm 3 , or both.

8. The doped gallium oxide crystalline material of claim 7 , wherein the Nb-doped Ga 2 O 3 crystalline material is Nb doped Ga 2 O 3 crystal, and the Nb-doped Ga 2 O 3 crystal optionally has a resistivity in a range of 2.5×10 −3 to 3.6×10 2 Ω·cm, a carrier concentration in a range of 3.7×10 15 ˜5×10 19 /cm 3 , or both.

9. The doped gallium oxide crystalline material of claim 7 , wherein the Nb-doped Ga 2 O 3 crystalline material is Nb-doped Ga 2 O 3 single crystal, and the Nb-doped Ga 2 O 3 single crystal optionally has a resistivity in a range of 5.5×10 −3 to 36 Ω·cm, a carrier concentration in a range of 9.55×10 16 to 1.8×10 19 /cm 3 , or both.

10. The doped gallium oxide crystalline material according to claim 1 , wherein the doped gallium oxide crystalline material is V-doped Ga 2 O 3 crystalline material having a resistivity in a range of 2.0×10 −4 to 1×10 4 Ω·cm, a carrier concentration in a range of 5×10 12 to 7×10 20 /cm 3 , or both.

11. The doped gallium oxide crystalline material according to claim 10 , wherein the V-doped Ga 2 O 3 crystalline material is V doped Ga 2 O 3 crystal, and the V-doped Ga 2 O 3 crystal optionally has a resistivity in a range of 2.0×10 −3 to 3.6×10 2 Ω·cm, a carrier concentration in a range of 3.7×10 15 to 6.3×10 19 /cm 3 , or both.

12. The doped gallium oxide crystalline material of claim 10 , wherein the V-doped Ga 2 O 3 crystalline material is V-doped Ga 2 O 3 single crystal, and the V-doped Ga 2 O 3 single crystal optionally has a resistivity in a range of 3×10 −2 to 50 Ω·cm, a carrier concentration in a range of 5×10 15 to 3.69×10 18 /cm 3 , or both.

13. A method for preparing the M-doped gallium oxide crystalline material as described in claim 1 , comprising
mixing M 2 O 5 and Ga 2 O 3 , both the M 2 O 5 and Ga 2 O 3 having a purity of above 4N, in a molar ratio of (0.000000000001-0.01):(0.9999999-0.99) to grow crystals,
obtaining the M-doped gallium oxide crystalline material, and
optionally, annealing the M-doped gallium oxide crystalline material after crystal growth.

14. The method for preparing the M-doped gallium oxide crystalline material of claim 13 , wherein the purity of M 2 O 5 and Ga 2 O 3 are both over 5N.

15. The method for preparing the M-doped gallium oxide crystalline material of claim 13 , wherein the M-doped gallium oxide crystalline material is an M-doped single crystal, the purity of Ga 2 O 3 is higher than 6N, and the molar ratio of M 2 O 5 and Ga 2 O 3 is in a range of (0.000001-0.01):(0.999999-0.99).

16. The method for preparing the M-doped gallium oxide crystalline material of claim 15 , wherein the M-doped single crystal is grown by a melt method that is an edge defined film-fed growth (EFG) method, Czochralski method, floating zone method, or Bridgman method.

17. An M-doped gallium oxide crystalline material prepared by the method of claim 13 .

18. A method for using the doped gallium oxide crystalline material of claim 1 , wherein the doped gallium oxide crystalline material is applied in power electronic devices, optoelectronic devices, photocatalysts, or conductive substrates.

19. The method for using the doped gallium oxide crystalline material of claim 18 , wherein the photoelectronic devices comprises transparent electrodes, solar panels, light emitting devices, photodetectors, sensors, and a combination thereof, and the conductive substrate is for GaN-based material, AlN-based material, both GaN-based and AlN-based material, or Ga 2 O 3 .

Assignees

• Shanghai Inst Optics & Fine Mech Cas

Inventors

• Xia Changtai
• Sai Qinglin
• Zhou Wei
• Ql Hongji

Classifications

• H10F77/12

  Active materials · CPC title

• H10H20/822

  Materials of the light-emitting regions · CPC title

• C01P2002/54

  one element only · CPC title

• C30B29/16 Primary

  Oxides · CPC title

• C30B33/02

  Heat treatment (C30B33/04, C30B33/06 take precedence) · CPC title