Extreme ultraviolet lithography mask pellicle inspection device
US-2026093173-A1 · Apr 2, 2026 · US
Shanghai Inst Optics & Fine Mech Cas holds 103 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 103 |
| Recent patents | 25 |
| First publication | Jul 26, 2016 |
| Latest publication | Apr 2, 2026 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
US-2026093173-A1 · Apr 2, 2026 · US
US-2025364766-A1 · Nov 27, 2025 · US
US-2025326681-A1 · Oct 23, 2025 · US
US-2025282671-A1 · Sep 11, 2025 · US
US-12378690-B2 · Aug 5, 2025 · US
Representative or frequently cited publications from precomputed assignee stats.
US-2026093173-A1 · Apr 2, 2026 · US
US-2025364766-A1 · Nov 27, 2025 · US
US-2025326681-A1 · Oct 23, 2025 · US
US-2025282671-A1 · Sep 11, 2025 · US
US-12378690-B2 · Aug 5, 2025 · US
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 84 |
| Chemistry & Metallurgy | 19 |
| Electricity | 19 |
| Operations & Transport | 10 |
| Mechanical Engineering | 6 |
| Cross-Sectional Technologies | 3 |
Answers are generated from the same data shown on this page.