Doped metal-chalcogenide thin film and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11094558-B2
Application number	US-201916681057-A
Country	US
Kind code	B2
Filing date	Nov 12, 2019
Priority date	Nov 14, 2018
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A method of manufacturing a doped metal chalcogenide thin film includes depositing a dopant atom on a base material; and forming a doped metal chalcogenide thin film on the dopant atom-deposited base material by supplying heat and a reaction gas comprising a metal precursor and a chalcogen precursor to the dopant atom-deposited base material.

First claim

What is claimed is:

1. A method of manufacturing a doped metal chalcogenide thin film, the method comprising:
depositing a dopant atom on a base material to form a dopant atom-deposited base material; and
forming a doped metal chalcogenide thin film on the dopant atom-deposited base material by supplying heat, a metal precursor and a reaction gas comprising a chalcogen precursor to the dopant atom-deposited base material,
wherein the forming the doped metal chalcogenide thin film comprises continuously performing a first heat treatment process and a second heat treatment process,
wherein the first heat treatment process comprises synthesis of the metal chalcogenide thin film for a predetermined period, and the second heat treatment process comprises increasing crystallinity of the metal chalcogenide thin film, and
wherein the doped metal chalcogenide thin film is synthesized by reacting the metal precursor and the chalcogen precursor on the dopant atom-deposited base material.

2. The method of claim 1 , wherein the predetermined period is 20 to 40 minutes.

3. The method of claim 1 , wherein the reaction gas is Hydrogen Sulfide.

4. The method of claim 1 , wherein the first heat treatment process is performed in a temperature range of 100 to 600° C., and the second heat treatment process is performed in a temperature range of 600 to 900° C.

5. The method of claim 1 , wherein the doped metal chalcogenide thin film has a particle size of 100 to 900 nm.

6. The method of claim 1 , wherein the doped metal chalcogenide thin film exhibits N-type semiconductor properties or P-type semiconductor properties.

7. The method of claim 1 , wherein the dopant atom comprises a material selected from the group consisting of Nb, Mn, Ti, W, Zr, Mg, P, Ni, Al, Sn, V, Re, Ge, Si, B, Ga, In, Sb, Cr, Au, Na, Li, and combinations thereof.

8. The method of claim 1 , wherein the depositing the dopant atom on the base material is performed by a method selected from the group consisting of an electron beam evaporation method, a sputtering method, a vacuum deposition method, an ion plating method, a thermal evaporation method, an ion cluster beam method, a pulsed laser deposition method, an atomic layer deposition method, an atomic beam epitaxy method, and combinations thereof.

9. The method of claim 1 , wherein the metal precursor comprises a material selected from the group consisting of Mo, W, Bi, Mg, Al, Si, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, Ge, Sr, Y, Zr, Nb, Tc, Ru, Rh, Pd, Ag, Cd, In, Sn, Sb, Ba, La, Hf, Ta, Re, Os, Ir, Pt, Au, Hg, Tl, Pb, Po, oxides thereof, and combinations thereof.

10. The method of claim 1 , wherein the chalcogen precursor comprises a material selected from the group consisting of S, Se, Te, and combinations thereof.

11. The method of claim 1 , wherein the base material comprises a material selected from the group consisting of Si, SiO 2 , Ge, GaN, AlN, GaP, InP, GaAs, SiC, Al 2 O 3 , LiAlO 3 , MgO, glass, quartz, sapphire, graphite, graphene, plastics, polymer, boron nitride (h-BN), and combinations thereof.

12. A doped metal chalcogenide thin film manufactured by the method of claim 1 .

13. The doped metal chalcogenide thin film of claim 12 , wherein the doped metal chalcogenide thin film has a particle size of 100 to 900 nm.

14. A thin film comprising the doped metal chalcogenide thin film of claim 12 .

Assignees

• Research & Business Found Sungkyunkwan Univ
• Research And Business Foundation Sungkyunkwan Univ

Inventors

• Lee Changgu
• Kim Youngchan
• Bark Hunyoung

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P14/3436 Primary

  being chalcogenide semiconductor materials not being oxides, e.g. ternary compounds · CPC title

• H10P32/17

  characterised by the semiconductor material · CPC title

• H10P32/14 Primary

  within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase · CPC title

• H10P14/668

  the materials being characterised by the deposition precursor materials · CPC title