Vibration device and method for controlling the same

Patent metadata

Field	Value
Publication number	US-11092440-B2
Application number	US-201816112961-A
Country	US
Kind code	B2
Filing date	Aug 27, 2018
Priority date	Jan 4, 2018
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

According to one embodiment, a method for controlling a vibration device includes a movable body capable of vibrating in a first direction, and a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction, wherein in a condition that tc is a time from a rise start time point to a rise end time point of an applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body, the time tc is longer than the time td.

First claim

What is claimed is:

1. A method for controlling a vibration device,
the vibration device comprising:
a movable body capable of vibrating in a first direction and a second direction perpendicular to the first direction;
a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction; and
a detection mechanism that detects a predetermined physical quantity based on an amplitude of vibration in the second direction of the movable body based on a Coriolis force acting on the movable body that freely vibrates in the first direction,

the method comprising:
releasing the caught movable body to freely vibrate the movable body in the first direction by using the catch and release mechanism; and
catching the movable body freely vibrating in the first direction by using the catch and release mechanism,

wherein the catch and release mechanism is applied with an only increasing applied voltage when catching the movable body, and the applied voltage satisfies tc>td,
where tc is a time from a rise start time point to a rise end time point of the applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body.

2. A method for controlling a vibration device,
the vibration device comprising:
a movable body capable of vibrating in a first direction and a second direction perpendicular to the first direction;
a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction; and
a detection mechanism that detects a predetermined physical quantity based on an amplitude of vibration in the second direction of the movable body based on a Coriolis force acting on the movable body that freely vibrates in the first direction,

the method comprising:
releasing the caught movable body to freely vibrate the movable body in the first direction by using the catch and release mechanism; and
catching the movable body freely vibrating in the first direction by using the catch and release mechanism,

wherein the catch and release mechanism is applied with an only increasing applied voltage when catching the movable body, and the applied voltage satisfies tc te,
where tc is a time from a rise start time point to a rise end time point of the applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and to is a time from a fall start time point to a fall end time point during an applied voltage for releasing the movable body caught by the catch and release mechanism to freely vibrate the movable body in the first direction.

3. A method for controlling a vibration device,
the vibration device comprising:
a movable body capable of vibrating in a first direction; and
a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction,

the method comprising:
releasing the caught movable body to freely vibrate the movable body in the first direction by using the catch and release mechanism; and
catching the movable body freely vibrating in the first direction by using the catch and release mechanism,

wherein the catch and release mechanism is applied with an applied voltage when catching the movable body, and the applied voltage satisfies Vcmin/td>ΔV/Δt,
where Vcmin is a minimum voltage necessary for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, td is a period of the free vibration in the first direction of the movable body, and ΔV/Δt is an increasing rate of an applied voltage at a moment when the minimum voltage Vcmin is applied between the catch and release mechanism and the movable body.

4. The method according to claim 3 ,
wherein the movable body is further capable of vibrating in a second direction perpendicular to the first direction; and
the vibration device further comprises a detection mechanism that detects a predetermined physical quantity based on an amplitude of vibration in the second direction of the movable body based on a Coriolis force acting on the movable body that freely vibrates in the first direction.

5. The method according to claim 4 ,
wherein the applied voltage further satisfies ΔV/Δt=Vc/te or ΔV/Δt<Vc/te,
where Vc is a voltage applied to the movable body when the movable body is caught by the catch and release mechanism, and to is a time from a fall start time point to a fall end time point of the applied voltage for releasing the movable body caught by the catch and release mechanism to freely vibrate the movable body in the first direction.

Assignees

• Toshiba Kk

Inventors

• Gando Ryunosuke
• Ikehashi Tamio
• Ogawa Etsuji
• Itakura Tetsuro
• Hatakeyama Yohei
• Tomizawa Yasushi

Classifications

• G01C19/5726 Primary

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• B81B2201/0242

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• B81C1/00976

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• B81B3/0008

  Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation · CPC title

• G01C19/5755

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