Sensor and electronic device
US-2024310404-A1 · Sep 19, 2024 · US
US9103673B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103673-B2 |
| Application number | US-201313847539-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 20, 2013 |
| Priority date | Jun 24, 2011 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A time-domain inertial sensor comprising: a support structure having an electrode plane parallel to an x-y plane of an x-y-z mutually orthogonal coordinate system, wherein the support structure's largest dimension lies within the x-y plane; a proof mass having a first surface parallel to the x-y plane; wherein the proof mass is springedly coupled to the support structure such that the first surface is separated from the electrode plane by a gap; a driver configured to drive the proof mass to oscillate with respect to the support structure in approximately only the x-direction such that, while oscillating, the gap does not vary significantly; and a first, time-domain, proximity switch disposed to switch from an open state to a closed state each time the proof mass is in a first reference position with respect to the support structure.
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We claim: 1. A time-domain inertial sensor comprising: a support structure having an electrode plane parallel to an x-y plane of an x-y-z mutually orthogonal coordinate system, wherein the support structure's largest dimension lies within the x-y plane; a proof mass having a first surface parallel to the x-y plane; wherein the proof mass is springedly coupled to the support structure such that the first surface is separated from the electrode plane by a gap; a driver configure…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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