Purification method and purification apparatus

Patent metadata

Field	Value
Publication number	US-11090577-B2
Application number	US-201716090914-A
Country	US
Kind code	B2
Filing date	Mar 30, 2017
Priority date	Apr 8, 2016
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A novel sublimation purification method is provided. Moreover, a novel sublimation purification apparatus is provided. A purification method using a purification apparatus including a purification portion where a substance is purified by vaporization, a temperature adjustment means, a gas supply means, and a gas discharge means is provided. In the purification method, the inside of the purification portion is made to have a first pressure with use of the gas discharge means, a temperature gradient is generated in the purification portion with use of the temperature adjustment means such that the substance is purified, the pressure in the purification portion is then set at a second pressure with use of the gas supply means, and the purification portion is cooled with use of the temperature adjustment means. The second pressure is higher than the first pressure and the second pressure is higher than or equal to an atmospheric pressure.

First claim

The invention claimed is:

1. A purification apparatus comprising:
a purification portion where a substance is purified by vaporization;
a temperature adjustment means provided in the purification portion;
a gas supply means provided at one end portion of the purification portion, the gas supply means being configured to supply a gas into the purification portion;
a gas discharge means provided at the other end portion of the purification portion, the gas discharge means being configured to discharge a gas from the purification portion; and
a control system,
wherein the control system is configured to control the gas supply means, the gas discharge means, and the temperature adjustment means,
wherein the control system is configured to control the gas discharge means so that a pressure in the purification portion becomes a first pressure,
wherein the control system is configured to control the temperature adjustment so that a temperature gradient is generated in the purification portion,
wherein the control system is configured to control the gas supply means so that in a pressure in the purification portion becomes a second pressure after the substance is purified,
wherein the control system is configured to control the temperature adjustment so that the purification portion is cooled,
wherein the second pressure is higher than the first pressure, and
wherein the second pressure is higher than or equal to an atmospheric pressure.

2. The purification apparatus according to claim 1 , wherein the first pressure is lower than or equal to 10 Pa.

3. The purification apparatus according to claim 2 , wherein the first pressure is higher than or equal to 0.1 Pa.

4. The purification apparatus according to claim 1 , wherein the temperature adjustment means is configured to heat the purification portion so that a temperature of part of an inside of the purification portion becomes higher than or equal to 150° C. and lower than or equal to 500° C.

5. The purification apparatus according to claim 1 , wherein the gas discharge means is configured to discharge the gas from the purification portion to provide the first pressure.

6. The purification apparatus according to claim 1 , wherein the gas supply means is configured to supply the gas to the purification portion to provide the second pressure.

Assignees

• Semiconductor Energy Lab

Inventors

• Kawakami Sachiko
• Kitano Yasushi
• Abe Kanata

Classifications

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• B01D7/00

  Sublimation (B01D8/00 takes precedence; freeze-drying F26) · CPC title

• B01D1/14

  with heated gases or vapours {or liquids} in contact with the liquid · CPC title

• C07B63/00

  Purification; Separation (separation of optically-active compounds C07B57/00); Stabilisation; Use of additives · CPC title

• C09K11/06

  containing organic luminescent materials · CPC title