Dry cleaning apparatus and dry cleaning method

Patent metadata

Field	Value
Publication number	US-11087996-B2
Application number	US-201916371461-A
Country	US
Kind code	B2
Filing date	Apr 1, 2019
Priority date	Sep 10, 2018
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

First claim

What is claimed is:

1. A dry cleaning apparatus, comprising:
a chamber;
a substrate support configured to support a substrate within the chamber;
a shower head arranged in an upper portion of the chamber,
wherein the shower head includes a plurality of spray holes to supply a dry cleaning gas toward the substrate, and an optical window transmitting a laser light therethrough toward the substrate support, and
wherein the optical window and the plurality of spray holes do not vertically overlap each other;
a plasma generator configured to generate plasma from the dry cleaning gas; and
a laser irradiator configured to generate a first laser light with a first diameter, disperse the first laser light with the first diameter to generate a second laser light, and irradiate the second laser light on the whole surface of the substrate through the optical window, thereby heating the substrate, wherein the second laser light arriving at the substrate has a second diameter greater than the first diameter of the first laser light.

2. The dry cleaning apparatus of claim 1 ,
wherein the optical window is installed within an opening which penetrates through a middle region of the shower head, and
wherein the optical window extends from an upper surface of the shower head to a lower surface of the shower head within the opening.

3. The dry cleaning apparatus of claim 2 ,
wherein the shower head comprises a shower head plate having an annular shape.

4. The dry cleaning apparatus of claim 3 ,
wherein the opening penetrates through a middle region of the shower head plate.

5. The dry cleaning apparatus of claim 3 ,
wherein a first portion of the lower surface of the shower head is inclined at a predetermined angle with respect to a surface of the substrate, and
wherein the plurality of spray holes are disposed in the first portion of the lower surface of the shower head.

6. The dry cleaning apparatus of claim 3 ,
wherein the lower surface of the shower head is parallel to a surface of the substrate, and the plurality of spray holes of the shower head are inclined at a predetermined angle with respect to the surface of the substrate.

7. The dry cleaning apparatus of claim 1 ,
wherein the plasma generator comprises an upper electrode in the shower head and a lower electrode in the substrate support.

8. The dry cleaning apparatus of claim 1 ,
wherein the laser irradiator comprises a laser to generate the laser light and an optical system configured to project the laser light outputted from the laser across a whole surface of the substrate through the optical window.

9. The dry cleaning apparatus of claim 8 ,
wherein the optical system comprises an aspheric lens to spread radially the first laser light with the first diameter in order to generate the second laser light with the second diameter greater than the first diameter.

10. The dry cleaning apparatus of claim 9 ,
wherein the optical system further comprises an optical mask configured to selectively transmit the laser light passing through the aspheric lens.

11. A dry cleaning apparatus, comprising:
a chamber having an optical window;
a substrate support configured to support a substrate within the chamber;
a shower head arranged in an upper portion of the chamber,
wherein the shower head includes a plurality of spray holes configured to supply a dry cleaning gas toward the substrate, and
wherein the optical window and the plurality of spray holes do not vertically overlap each other;
a plasma generator configured to generate plasma from the dry cleaning gas; and
a laser irradiator configured to irradiate a laser light on the substrate through the optical window and the plasma, thereby heating the substrate.

12. The dry cleaning apparatus of claim 11 ,
wherein the optical window penetrates through a middle region of the shower head, and extends from an upper surface of the shower head to a lower surface of the shower head.

13. The dry cleaning apparatus of claim 12 ,
wherein the shower head comprises a shower head plate having an annular shape.

14. The dry cleaning apparatus of claim 13 ,
wherein the lower surface of the shower head is inclined at a predetermined angle with respect to a surface of the substrate.

15. The dry cleaning apparatus of claim 13 ,
wherein the lower surface of the shower head is parallel to a surface of the substrate, and
wherein each of the plurality of spray holes of the shower head is inclined at a predetermined angle with respect to the surface of the substrate.

16. The dry cleaning apparatus of claim 11 ,
wherein the laser irradiator is disposed on the optical window outside the chamber.

17. The dry cleaning apparatus of claim 11 ,
wherein the plasma generator comprises an upper electrode in the shower head and a lower electrode in the substrate support.

18. The dry cleaning apparatus of claim 11 ,
wherein the laser irradiator comprises:
a laser to generate a first laser light with a first diameter; and
an optical system configured to disperse the first laser light outputted from the laser to generate a second laser light and irradiate the second laser light across a whole surface of the substrate through the optical window, and
wherein the second laser light has an increasing diameter in a direction approaching the substrate, and
wherein the second laser light arriving at the substrate has a second diameter greater than the first diameter of the first laser light.

19. The dry cleaning apparatus of claim 18 ,
wherein the optical system comprises an aspheric lens configured to radially spread the first laser light with the first diameter in order to generate the second laser light with the second diameter greater than the first diameter.

20. The dry cleaning apparatus of claim 19 ,
wherein the optical system further comprises an optical mask configured to selectively transmit the laser light passing through the aspheric lens.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Shin Seung-Min
• Kim Seok-Hoon
• Kim Young-Hoo
• Kim In-Gi
• Kim Tae-Hong
• Park Sung-Hyun
• Lee Jin-Woo
• Cha Ji-Hoon
• Choi Yong-Jun

Classifications

• H10P70/70

  Cleaning only by lasers processes, e.g. laser ablation · CPC title

• H10P72/0408 Primary

  for drying · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0406 Primary

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title