Linear structure for displacement transmission, and one-dimensional and three-dimensional micro movement device using same

Patent metadata

Field	Value
Publication number	US-11087952-B2
Application number	US-201616067564-A
Country	US
Kind code	B2
Filing date	Dec 29, 2016
Priority date	Dec 31, 2015
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

Provided is a linear structure for displacement transmission that can be bent in a second direction or a third direction when force in the second direction or the third direction is applied and can transmit a displacement in a first direction from an end of one side to an end of the other side when force in the first direction is applied. The linear structure includes a displacement transmission plate and a plurality of displacement transmission rods disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

First claim

The invention claimed is:

1. A linear structure for displacement transmission in which a spring constant in a second direction and a third direction which are perpendicular to a first direction is smaller than the spring constant in the first direction such that the linear structure for displacement transmission is bent in the second direction or the third direction when force in the second direction or the third direction is applied and transmits a displacement in the first direction from an end of one side to an end of the other side when force in the first direction is applied, the linear structure for displacement transmission comprising:
a displacement transmission plate formed in a surface shape and disposed on a plane in the second direction and the third direction; and
a plurality of displacement transmission rods formed in a linear shape extended in the first direction and having ends of one side connected to the displacement transmission plate,
wherein the plurality of displacement transmission rods are disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

2. The linear structure for displacement transmission of claim 1 , wherein the linear structure for displacement transmission is formed so that a ratio of an equivalent diameter of a cross section to a length of the displacement transmission rod is within the range of 1 to 10%, and
the displacement transmitted by the linear structure for displacement transmission is within the range of 0.001 to 1% of the length of the displacement transmission rod.

3. The linear structure for displacement transmission of claim 2 , wherein the length of the displacement transmission rod is within the range of several to several tens mm.

4. The linear structure for displacement transmission of claim 1 , wherein the displacement transmission rod is formed in at least one form selected from a rod shape in which an interior is tightly filled, a pipe shape in which an interior is empty, and a spring.

5. The linear structure for displacement transmission of claim 1 , further comprising a stiffener formed between the plurality of displacement transmission rods so that rigidity of the linear structure for displacement transmission is reinforced or the spring constant in a predetermined specific direction is increased.

6. The linear structure for displacement transmission of claim 5 , wherein a plurality of stiffeners are formed in a linear shape and are disposed to be parallel to each other or disposed in an X shape, or are formed in a surface shape and are provided between at least one pair of displacement transmission rods selected from the plurality of displacement transmission rods.

7. A one-dimensional micro movement device comprising:
the linear structure for displacement transmission of claim 1 ; and
a driving part having an upper surface and a lower surface which are disposed to be parallel to a plane in a second direction and a third direction and deformed to be stretched and contracted in a first direction by forming any one surface selected from the upper surface and the lower surface as a fixing end and forming the other surface as a moving end,
wherein the linear structure for displacement transmission is provided to the moving end of the driving part.

8. The one-dimensional micro movement device of claim 7 , wherein the driving part is formed of a piezoelectric actuator or an electromagnet driver.

9. The one-dimensional micro movement device of claim 7 , wherein the driving part is formed by arranging a plurality of piezoelectric elements which are stretched and contracted in the first direction to be parallel to each other on a plane of the second direction and the third direction.

10. The one-dimensional micro movement device of claim 7 , further comprising an auxiliary driving part having a fixing end and a moving end which are disposed in a direction opposite to the driving part.

11. The one-dimensional micro movement device of claim 10 , wherein the one-dimensional micro movement device is formed so that the displacement transmission plate is interposed between the driving part and the auxiliary driving part.

12. The one-dimensional micro movement device of claim 7 , further comprising an elastic compressing part, which is an elastic body provided to the moving end of the driving part, and formed so that elastic force acts in a direction to compress the driving part in the first direction.

13. A three-dimensional micro movement device including the one-dimensional micro movement device of claim 7 , the three-dimensional micro movement device comprising:
three one-dimensional micro movement devices disposed in X, Y, and Z axis directions, respectively; and
a moving part to which the three one-dimensional micro movement devices are connected,
wherein the moving part is movable in the X, Y, and Z axis directions by the three one-dimensional micro movement devices.

14. The three-dimensional micro movement device of claim 13 , further comprising a linear structure for support including a plurality of supporting rods connected to the displacement transmission plate of at least one one-dimensional micro movement device selected from the one-dimensional micro movement devices, extended in a direction perpendicular to a displacement transmission direction of the selected one-dimensional micro movement device, and formed in a linear shape.

15. The three-dimensional micro movement device of claim 13 , further comprising at least one sensor provided to the moving part and sensing a displacement in at least one direction selected from the X, Y, and Z axis directions of the moving part.

Assignees

• Korea Res Inst Standards & Sci

Inventors

• Kim Dal Hyun
• Park Byong Chon
• Shin Chae Ho

Classifications

• H01J2237/20264

  Piezoelectric devices · CPC title

• G02B21/26

  Stages; Adjusting means therefor · CPC title

• G01Q10/04

  Fine scanning or positioning · CPC title

• H02N2/026

  by pressing one or more vibrators against the driven body · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title