Charge control device for a system with multiple electron beams

Patent metadata

Field	Value
Publication number	US-11087950-B2
Application number	US-201816112832-A
Country	US
Kind code	B2
Filing date	Aug 27, 2018
Priority date	May 29, 2018
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

Systems and methods to focus and align multiple electron beams are disclosed. A camera produces image data of light from electron beams that is projected at a fiber optics array with multiple targets. An image processing module determines an adjustment to a voltage applied to a relay lens, a field lens, or a multi-pole array based on the image data. The adjustment minimizes at least one of a displacement, a defocus, or an aberration of one of the electron beams. Using a control module, the voltage is applied to the relay lens, the field lens, or the multi-pole array.

First claim

What is claimed is:

1. A system comprising:
an electron source that generates electrons that form a plurality of electron beams;
a relay lens, wherein the electron source directs the electron beams to the relay lens;
a field lens disposed downstream of the relay lens along the path of the electron beams;
a multi-pole array disposed downstream of the field lens along the path of the electron beams, wherein the multi-pole array has at least four poles, and wherein the at least four poles of the multi-pole array are excited by a single pole excitation or a linear combination of excitations;
a projection lens disposed downstream of the multi-pole array along the path of the electron beams;
a scintillator disposed downstream of the projection lens along a path of the electron beams,
wherein the scintillator converts each of the electron beams into light;

a fiber optics array having a plurality of targets, wherein the fiber optics array is disposed to receive the light from each of the electrons beams using one of the targets;
a camera configured to image the light passing from the scintillator to the fiber optics array,
wherein the camera is configured to produce image data; and

a processor in electronic communication with the camera, the relay lens, the field lens, and
the multi-pole array, wherein the processor is configured to:
determine an adjustment to a voltage applied to the relay lens, the field lens, or the multi-pole array based on image data from the camera; and
apply the adjustment to the relay lens, the field lens, or the multi-pole array.

2. The system of claim 1 , further comprising a beam splitter disposed between the scintillator and the fiber optics array, wherein the beam splitter directs the light at the camera and the fiber optics array.

3. The system of claim 1 , wherein the camera is a CMOS camera.

4. The system of claim 1 , wherein the fiber optics array is hexagonal.

5. The system of claim 1 , wherein the multi-pole array is an octupole.

6. The system of claim 1 , wherein the processor is further configured to:
measure a displacement of each of the electron beams with respect to a corresponding one of the targets; and
determine the adjustment to minimize the displacement.

7. The system of claim 1 , wherein the processor is further configured to:
measure a defocus of each of the electron beams with respect to a corresponding one of the targets; and
determine the adjustment to minimize the defocus.

8. The system of claim 1 , wherein the processor is further configured to:
measure an aberration of each of the electron beams with respect to a corresponding one of the targets; and
determine the adjustment to minimize the aberration.

9. The system of claim 1 , wherein the processor is further configured to solve the sensitivity matrix Aij Vj=−Xi, wherein Vj are voltages of the multi-pole array and wherein Xi are measured displacements of the electron beams.

10. The system of claim 9 , wherein an inverse of the sensitivity matrix Aij is applied to the multi-pole array, wherein each element of the sensitivity matrix is defined as a ratio between dXi displacement and dVj.

11. A method comprising:
converting a plurality of electron beams into light using a scintillator;
producing image data of the light from the plurality of electron beams using a camera as the light from the electron beams is projected at a fiber optics array having a plurality of targets;
determining, using an image processing module, an adjustment to a voltage applied to a relay lens, a field lens, or a multi-pole array based on the image data, wherein the adjustment minimizes at least one of a displacement, a defocus, or an aberration of one of the electron beams, and wherein the multi-pole array has at least four poles that are excited by a single pole excitation or a linear combination of excitations; and
applying, using a control module, the voltage to the relay lens, the field lens, or the multi-pole array to perform the adjustment.

12. The method of claim 11 , further comprising:
generating the electron beams using an electron source; and
projecting the electron beams through the relay lens, the field lens, the multi-pole array, a projection lens, and into the scintillator.

13. The method of claim 11 , wherein the determining includes:
measuring, using the image processing module, the displacement of each of the electron beams with respect to a corresponding one of the targets; and
determining the adjustment to minimize the displacement using the image processing module.

14. The method of claim 11 , wherein the determining includes:
measuring, using the image processing module, the defocus of each of the electron beams with respect to a corresponding one of the targets; and
determining the adjustment to minimize the defocus using the image processing module.

15. The method of claim 11 , wherein the determining includes:
measuring, using the image processing module, the aberration of each of the electron beams with respect to a corresponding one of the targets; and
determining the adjustment to minimize the aberration using the image processing module.

16. The method of claim 11 , wherein the determining includes solving a sensitivity matrix Aij Vj=−Xi using the image processing module, wherein Vj are voltages of the multi-pole array and wherein Xi are measured displacements of the electron beams, and wherein the method further comprises applying, using the control module, an inverse of the sensitivity matrix Aij to the multi-pole array, wherein each element of the sensitivity matrix is defined as a ratio between dXi displacement and dVj.

17. The method of claim 11 , wherein the multi-pole array is an octupole.

18. The method of claim 11 , further comprising:
activating a combination of different excitations of the poles in the multi-pole array;
measuring a displacement of the electron beams for each of the different excitations; and
calibrating the multi-pole array based on a matrix of the displacement of the electron beams for each of the different excitations.

19. A non-transitory computer-readable storage medium, comprising one or more programs for executing the following steps on one or more computing devices:
receiving, at an image processing module, image data of a plurality of electron beams from a camera as light converted from the electron beams using a scintillator is projected at a fiber optics array having a plurality of targets;
determining, using the image processing module, an adjustment to a voltage applied to a relay lens, a field lens, or a multi-pole array based on the image data, wherein the adjustment minimizes at least one of a displacement, a defocus, or an aberration of one of the electron beams, and wherein the multi-pole array has at least four poles that are excited by a single pole excitation or a linear combination of excitations; and
applying, using a control module, the voltage to the relay lens, the field lens, or the multi-pole array to perform the adjustment.

20. The non-transitory computer-readable storage medium of claim 19 , wherein the determining includes solving a sensitivity matrix Aij Vj=−Xi using the image processing module, wherein Vj are voltages of the multi-pole array and wherein Xi are measured displacements of the electron beams, and further comprising applying, using the control module, an inverse of the sensitivity matrix Aij to the multi-pole array, wherein each element of the sensitivity matrix is defined as a ratio bet

Assignees

• Kla Tencor Corp

Inventors

• Sears Christopher
• Grella Luca

Classifications

• H01J37/026 Primary

  Means for avoiding or neutralising unwanted electrical charges on tube components · CPC title

• H01J37/14

  magnetic · CPC title

• H01J37/224

  Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/06

  Electron sources; Electron guns · CPC title