Photonic edge coupler

Patent metadata

Field	Value
Publication number	US-11085998-B2
Application number	US-202016814601-A
Country	US
Kind code	B2
Filing date	Mar 10, 2020
Priority date	Oct 29, 2019
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

A photonic edge coupler includes a slab waveguide and a ridge waveguide. The ridge waveguide includes a silicon wire waveguide, which includes a tapered portion. A first end of the slab waveguide is joined to the ridge waveguide at a junction, and a second end of the slab waveguide forms a first facet. The ridge waveguide defines a longitudinal axis that is associated with a direction of a light signal therein. The first facet is angled at less than 90 degrees relative to the longitudinal axis associated with the direction of the light signal therein. The first facet is disposed opposite to a laser facet associated with a laser waveguide. The longitudinal axis of the ridge waveguide defines a first center point, and the laser facet and the associated laser waveguide define a second center point. The second center point is laterally offset from the first center point.

First claim

What is claimed is:

1. A photonic edge coupler, comprising:
a slab waveguide and a ridge waveguide disposed on a substrate;
wherein the ridge waveguide includes a silicon wire waveguide;
wherein the silicon wire waveguide includes a tapered portion;
wherein a first end of the slab waveguide is joined to the ridge waveguide at a junction;
wherein a second end of the slab waveguide forms a first facet;
wherein the ridge waveguide defines a longitudinal axis associated with a direction of a light signal therein;
wherein the first facet is angled at less than 90 degrees relative to the longitudinal axis associated with the direction of the light signal therein;
wherein the first facet is disposed opposite to a laser facet associated with a laser waveguide;
wherein the longitudinal axis of the ridge waveguide defines a first center point at the junction between the first end of the slab waveguide and the ridge waveguide;
wherein the laser facet and the associated laser waveguide define a second center point; and
wherein the second center point is laterally offset from the first center point.

2. The photonic edge coupler of claim 1 , wherein the tapered portion of the silicon wire waveguide includes a tip end, wherein the tip end is recessed from the first center point formed at the junction between the first end of the slab waveguide and the ridge waveguide.

3. The photonic edge coupler of claim 1 , wherein the slab waveguide forms a lateral-free propagation region.

4. The photonic edge coupler of claim 3 , wherein the lateral-free propagation region of the slab waveguide comprises a region that permits free propagation of light in a lateral direction that is parallel to the silicon photonic substrate.

5. The photonic edge coupler of claim 1 , wherein the ridge waveguide is recessed from the first facet by at least 9 micrometers at the first center point.

6. The photonic edge coupler of claim 1 , wherein the ridge waveguide including the silicon wire waveguide forms a guided propagation region.

7. The photonic edge coupler of claim 1 , wherein the tapered portion of the silicon wire waveguide is selected to achieve a maximum an optimum efficiency related to light pickup.

8. The photonic edge coupler of claim 1 , wherein the first facet comprises an optically smooth coupling facet.

9. The photonic edge coupler of claim 1 , wherein the slab waveguide is fabricated from silicon oxynitride (SiON).

10. The photonic edge coupler of claim 1 , wherein the ridge waveguide is fabricated from silicon oxynitride (SiON).

11. The photonic edge coupler of claim 10 , wherein the ridge waveguide includes an upper cladding fabricated from SiON and a bottom cladding fabricated from silicon oxide (SiO2).

12. The photonic edge coupler of claim 1 , wherein the slab waveguide is arranged to effect capture of light from the laser facet that impinges upon the first facet.

13. A photonic edge coupler, wherein the photonic edge coupler is disposed on a silicon photonic substrate and arranged to receive light from a laser, the photonic edge coupler comprising:
a slab waveguide, a ridge waveguide, and a silicon wire waveguide disposed on a substrate;
wherein the silicon wire waveguide is arranged in the ridge waveguide;
wherein the silicon wire waveguide includes a longitudinally tapered portion;
wherein a first end of the slab waveguide is joined to the ridge waveguide at a junction;
wherein a second end of the slab waveguide forms a first facet;

wherein the ridge waveguide defines a longitudinal axis associated with a direction of a light signal therein;
wherein the first facet is angled at less than 90 degrees relative to the longitudinal axis associated with the direction of the light signal therein;
wherein the first facet is opposed to a laser facet associated with a laser waveguide in communication with the laser;
wherein the longitudinal axis of the ridge waveguide defines a first center point at the junction between the first end of the slab waveguide and the ridge waveguide;
wherein the laser facet and the associated laser waveguide define a second center point; and
wherein the second center point is laterally offset from the first center point.

14. The photonic edge coupler of claim 13 , wherein the tapered portion of the silicon wire waveguide includes a tip end, wherein the tip end is recessed from the first center point formed at the junction between the first end of the slab waveguide and the ridge waveguide.

15. The photonic edge coupler of claim 13 , wherein the slab waveguide comprises a lateral-free propagation region that permits free propagation of light in a lateral direction that is parallel to the silicon photonic substrate.

16. The photonic edge coupler of claim 13 , wherein the ridge waveguide is recessed from the first facet by at least 9 micrometers at the first center point.

17. The photonic edge coupler of claim 13 , wherein the ridge waveguide including the silicon wire waveguide forms a guided propagation region.

18. The photonic edge coupler of claim 13 , wherein the slab waveguide is fabricated from silicon oxynitride (SiON).

19. The photonic edge coupler of claim 13 , wherein the ridge waveguide includes an upper cladding fabricated from SiON and a bottom cladding fabricated from silicon oxide (SiO2).

20. A light detection and ranging (LiDAR) device, comprising:
a laser, a photonic edge coupler, a transmit optical splitter, an optical circulator, a photodetector, and an optical phased array;
wherein the laser, the photonic edge coupler, the transmit optical splitter, the optical circulator, the photodetector, and the optical phased array are arranged as a chip-scale package on a single semiconductor device;
wherein the laser generates a first light signal that is transmitted to an aperture of the optical phased array via the photonic edge coupler, transmit optical splitter, the optical circulator, and the optical phased array;
wherein the photonic edge coupler includes:
a slab waveguide, a ridge waveguide, and a silicon wire waveguide disposed on a substrate,
wherein the silicon wire waveguide is arranged in the ridge waveguide,
wherein the silicon wire waveguide includes a longitudinally tapered portion,
wherein a first end of the slab waveguide is joined to the ridge waveguide at a junction,
wherein a second end of the slab waveguide forms a first facet,
wherein the ridge waveguide defines a longitudinal axis associated with a direction of a light signal therein,
wherein the first facet is angled at less than 90 degrees relative to the longitudinal axis associated with the direction of the light signal therein,
wherein the first facet is opposed to a laser facet associated with a laser waveguide in communication with the laser,
wherein the longitudinal axis of the ridge waveguide defines a first center point at the junction between the first end of the slab waveguide and the ridge waveguide,
wherein the laser facet and the associated laser waveguide define a second center point, and
wherein the second center point is laterally offset from the first center point.

Assignees

• Gm Global Tech Operations Llc

Inventors

• Sayyah Keyvan
• Sarkissian Raymond
• Huang Biqin
• Patterson Pamela R

Classifications

• G02F1/0955

  used as non-reciprocal devices, e.g. optical isolators, circulators · CPC title

• G02F1/0147

  based on thermo-optic effects (G02F1/132 takes precedence) · CPC title

• G02B2006/12147

  Coupler · CPC title

• G01S7/4818 Primary

  using optical fibres · CPC title

• G01S7/4911

  Transmitters · CPC title