Correction of fabricated shapes in additive manufacturing using modified edge

Patent metadata

Field	Value
Publication number	US-11084143-B2
Application number	US-201815873834-A
Country	US
Kind code	B2
Filing date	Jan 17, 2018
Priority date	May 25, 2017
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

A method of fabricating a polishing pad using an additive manufacturing system includes depositing successive layers by droplet ejection to form the polishing pad. The polishing pad includes a polishing surface having one or more partitions separated by one or more grooves. Depositing a layer of the successive layers includes dispensing first regions corresponding to edges of the one or more partitions by a first droplet ejection process. After curing the first regions, a second region corresponding to interior of the one or more partitions is dispensed between the edges by a different second droplet ejection process.

First claim

What is claimed is:

1. A method of fabricating a polishing pad using an additive manufacturing system, the method comprising:
depositing a plurality of successive layers by droplet ejection to form the polishing pad, the polishing pad comprising a polishing surface having a plurality of partitions separated by one or more grooves, each partition including an interior portion and an edge portion surrounding the interior portion with edge portions of adjacent partitions separated by a groove of the one or more grooves, and wherein depositing a layer of the successive layers includes
dispensing first regions corresponding to the edge portions of the plurality of partitions by a first droplet ejection process and not ejecting droplets into third regions corresponding to the grooves between the edge portions of the adjacent partitions,
curing the first regions,
after curing the first regions, dispensing second regions corresponding to the interior portions of the plurality of partitions between the edge portions by a different second droplet ejection process; and
curing the second regions.

2. The method of claim 1 , wherein the first droplet ejection process dispenses droplets of a first composition and the second droplet ejection process dispenses droplets of a different second composition.

3. The method of claim 2 , comprising removing one or more portions of the plurality of successive layers formed of the first composition.

4. The method of claim 2 , wherein the first droplet ejection process comprises a first polymer and the second droplet ejection process comprises a second polymer of different composition.

5. The method of claim 1 , wherein the first droplet ejection process comprises a first curing radiation and the second droplet ejection process comprises a second curing radiation that cures the layer slower than the first curing radiation.

6. The method of claim 5 , wherein the first curing radiation and the second curing radiation are at different wavelengths.

7. The method of claim 6 , wherein the first curing radiation has a higher intensity than the second curing radiation.

8. The method of claim 1 , wherein depositing the plurality of successive layers comprises depositing an initial layer on a support.

9. The method of claim 8 , comprising removing the polishing pad from the support.

10. The method of claim 8 , wherein the polishing pad comprises the support.

11. The method of claim 1 , comprising dispensing a plurality of underlying layers onto a support before dispensing the plurality of successive layers, and dispensing the plurality of successive layers onto the plurality of underlying layers.

12. A computer program product, comprising a non-transitory computer readable medium encoded with instructions to cause one or more processors to:
receive data indicative of a desired shape of a polishing pad to be fabricated by droplet ejection by an additive manufacturing system, the polishing pad comprising a polishing surface having a plurality of partitions separated by one or more grooves, each partition including an interior portion and an edge portion surrounding the interior portion with edge portions of adjacent partitions separated by a groove of the one or more grooves;
determine from the data first regions corresponding to the edge portions of the plurality of partitions and second regions corresponding to interior portions of the partitions; and
cause the additive manufacturing system to deposit a plurality of successive layers by droplet ejection to form the polishing pad, wherein the instructions to cause the additive manufacturing system to deposit the plurality of successive layers include instructions to cause the additive manufacturing system to
dispense the first regions corresponding to the edge portions of the plurality of partitions by a first droplet ejection process and not ejecting droplets into third regions corresponding to the grooves between the edge portions of the adjacent partitions,
curing the first regions;
after curing the first regions, dispense the second regions corresponding to the interior portions between the edge portions by a different second droplet ejection process; and
curing the second regions.

13. The computer program product of claim 12 , wherein the instructions to dispense by the first droplet ejection process comprise instructions to cause the additive manufacturing system to dispense droplets of a first composition and the instructions to dispense by the second droplet ejection process comprise instructions to cause the additive manufacturing system to dispense droplets of a different second composition.

14. The computer program product of claim 12 , wherein the instructions to dispense by the first droplet ejection process comprise instructions to cause the additive manufacturing system to cure the first regions with a first curing radiation and the instructions to dispense by the second droplet ejection process comprise instructions to cause the additive manufacturing apparatus to cure the second regions with a second radiation that cures a layer of the plurality of successive layers slower than the first curing radiation.

15. The computer program product of claim 12 , wherein the instructions to determine first regions corresponding to edges of the partitions comprises instructions to determine first regions inside and abutting a perimeter of the partitions.

16. An additive manufacturing system, the system comprising:
a support;
at least one dispenser configured to deliver a plurality of layers of a pad precursor material onto the support by droplet ejection;
at least one energy source; and
a controller configured to
receive data indicative of a desired shape of a polishing pad to be fabricated by droplet ejection by an additive manufacturing system, the polishing pad comprising a polishing surface having a plurality of partitions separated by one or more grooves, each partition including an interior portion and an edge portion surrounding the interior portion with edge portions of adjacent partitions separated by a groove of the one or more grooves; and
cause the at least one dispenser and at least one energy source to deposit a plurality of successive layers by droplet ejection and cure the plurality of successive layers to form the polishing pad, wherein the controller is configured to cause the at least one dispenser and the at least one energy source to, for each layer of a plurality of layers that correspond to the plurality of partitions, dispense and cure first regions that correspond to edge portions of the plurality of partitions by a first droplet ejection and curing process without ejecting droplets into third regions corresponding to the grooves between the edge portions of the adjacent partition and after curing the first regions dispense and cure second regions that correspond to interiors of the partitions between the edge portions by a different second droplet ejection and curing process.

17. The system of claim 16 , wherein the at least one dispenser comprises one or more first nozzles coupled to a first source of a first material of a first composition and one or more second nozzles coupled to a second source of a second material of a different second composition, and the controller is configured to cause the first nozzles to dispense the first material to the first regions and cause the second nozzles to dispense the second material to the second regions.

18. The system of claim 16 , wherein the at least one energy source comprises a first energy source to generat

Assignees

• Applied Materials Inc

Inventors

• Redfield Daniel

Classifications

• B33Y50/00

  Data acquisition or data processing for additive manufacturing · CPC title

• B29C64/386

  Data acquisition or data processing for additive manufacturing · CPC title

• B29C64/40

  Structures for supporting 3D objects during manufacture and intended to be sacrificed after completion thereof · CPC title

• B33Y30/00

  Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title