Piezoelectric composition, piezoelectric element and sputtering target
US-9935256-B2 · Apr 3, 2018 · US
US11078122B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11078122-B2 |
| Application number | US-201816483581-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 2, 2018 |
| Priority date | Feb 3, 2017 |
| Publication date | Aug 3, 2021 |
| Grant date | Aug 3, 2021 |
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The present invention relates to a bismuth-based solid solution ceramic material, as well as a process for preparing the ceramic material and uses thereof, particularly in an actuator component employed, for example, in a droplet deposition apparatus. In particular, the present invention relates to a ceramic material having a general chemical formula (I): (I): x(Bi 0.5 Na 0.5 )TiO 3 -y(Bi 0.5 K 0.5 )TiO 3 -z 1 SrHfO 3 -z 2 SrZrO 3 , wherein x+y+Z 1 +Z 2 =1; y, (z 1 +z 2 )≠0; x≥0. In embodiments, the present invention also relates to a ceramic material having a general chemical formula (II): x(Bi0.5Na0.5)TiO3-y(Bi0.5K0.5)TiO3-y(Bi0.5K0.5)TiO3-ZiSrHfO3-z2SrZrO3, wherein x+y+z−i+z2=1; x, y, fa+z2)≠0; as well as a ceramic material of general formula (III): y(Bi 0.5 K 0.5 )TiO 3 -z 1 SrHfO 3 -z 2 SrZrO 3 , wherein y+z 1 ,+z 2 =1; y, (z 1 +z 2 )≠0.
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The invention claimed is: 1. A ceramic material having a chemical formula (I): x (Bi 0.5 Na 0.5 )TiO 3 - y (Bi 0.5 K 0.5 )TiO 3 - z 1 SrHfO 3 - z 2 SrZrO 3 (I): wherein: x+y+z 1 +z 2 =1; y and (z 1 +z 2 ) are greater than zero; x≥0; and the ceramic material comprises at least 70 vol. % of a pseudo-cubic phase having at least one of an axial ratio c/a of from 0.995 to 1.005 or a rhombohedral angle of 90±0.5 degrees and wherein the ceramic material is capable of undergoing a field induced reversible transition from the pseudo-cubic phase to a tetragonal phase having an axial ratio c/a of between 1.005 and 1.02. 2. The ceramic material of claim 1 , wherein both z 1 and z 2 are greater than zero. 3. The ceramic material of claim 1 , wherein 0.25≤x≤0.65. 4. The ceramic material of claim 1 , wherein 0.25≤y≤0.75. 5. The ceramic material of claim 1 , wherein 0.01≤(z 1 +z 2 )≤0.15. 6. The ceramic material of claim 1 , wherein: 0.40≤x≤0.50; 0.40≤y≤0.50; and 0.02≤(z 1 +z 2 )≤0.10. 7. The ceramic material of claim 1 , wherein x=0. 8. The ceramic material of claim 7 , wherein 0.75≤y≤0.99. 9. The ceramic material of claim 7 , wherein 0.01≤(z 1 +z 2 )≤0.25. 10. The ceramic material of claim 1 , wherein the ceramic material has a remnant polarization of less than 5 μC/cm 2 . 11. The ceramic material of claim 1 , wherein the ceramic material has an effective piezoelectric strain coefficient d 33 * of from 50 to 500 pm/V. 12. The ceramic material of claim 1 , wherein the ceramic material has a maximum electromechanical strain value of from 0.1% to 0.5%, when measured at 10 Hz and at standard temperature and pressure. 13. The ceramic material of claim 1 , wherein the ceramic material has a field induced polarization of from 10 to 50 μC/cm 2 . 14. The ceramic material of claim 1 , wherein the ceramic material is configured to be reversibly converted into a ceramic material comprising at least 50 vol. % of a tetragonal phase, when applying an electric field to the ceramic material. 15. The ceramic material according to claim 14 , wherein the tetragonal phase has an axial ratio c/a of between 1.01 and 1.02. 16. A method of preparing a ceramic material comprising: mixing precursors of a ceramic material in predetermined molar ratios, the ceramic material having chemical formula of x(Bi 0.5 Na 0.5 )Ti 3 -y(Bi 0.5 K 0.5 )TiO 3 -z 1 SrHfO 3 -z 2 SrZrO 3 ; and utilizing the mixture of precursors in solid-state synthesis to prepare the ceramic material, wherein: x+y+z1+z2=1; y and (z1+z2) are greater than zero; x is greater than or equal to zero; the ceramic material comprises at least 70 vol. % of a pseudo-cubic phase having at least one of an axial ratio c/a of from 0.995 to 1.005 or a rhombohedral angle of 90±0.5 degrees and wherein the ceramic material is capable of undergoing a field induced reversible transition from the pseudo-cubic phase to a tetragonal phase having an axial ratio c/a of between 1.005 and 1.02; and the predetermined molar ratios of precursors are determined based on: the molar ratio of (Bi 0.5 Na 0.5 )TiO 3 precursors to (Bi 0.5 K 0.5 )TiO 3 precursors required to form a tetragonal phase; and the molar ratio of at least one of SrHfO 3 precursors or SrZrO 3 precursors to (Bi 0.5 Na 0.5 )TiO 3 and (Bi 0.5 K 0.5 )TiO 3 precursors required to form the ceramic material which comprises a major proportion of the pseudo-cubic phase. 17. The method according to claim 16 , wherein a binary (Bi 0.5 Na 0.5 )TiO 3 —(Bi 0.5 K 0.5 )TiO 3 composition comprises a tetragonal phase having an axial ratio c/a of between 1.01 and 1.02. 18. The method according to claim 16 wherein x=0. 19. An actuator for a droplet deposition apparatus comprising: a ceramic material having a chemical formula of x(Bi 0.5 Na 0.5 )TiO 3 -v(Bi 0.5 K 0.5 )TiO 3 -z 1 SrHfO 3 -z 2 SrZrO 3 ; an actuating element configured to cause an ejection of fluid from a chamber; a first electrode adjacent to the ceramic material; and a second electrode adjacent to the ceramic material wherein: x+y+z 1 +z 2 =1; y and (z1+z2) are greater than zero; x≥0; the ceramic material comprises at least 70 vol. % of a pseudo-cubic phase having at least one of an axial ratio c/a of from 0.995 to 1.005 or a rhombohedral angle of 90±0.5 degrees and wherein the ceramic material is capable of undergoing a field induced reversible transition from the pseudo-cubic phase to a tetragonal phase having an axial ratio c/a of between 1.005 and 1.02; and the first electrode and the second electrode are configured to apply an electric field to the ceramic material to cause the ejection.
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