Piezoelectric composition, piezoelectric element and sputtering target

Patent metadata

Field	Value
Publication number	US-9935256-B2
Application number	US-201514859977-A
Country	US
Kind code	B2
Filing date	Sep 21, 2015
Priority date	Sep 25, 2014
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

The present invention aims to provide a piezoelectric composition containing a composition represented by formula (5) as the main component, wherein the composition represented by formula (5) contains a first perovskite-type oxide represented by formula (1), a second perovskite-type oxide represented by formula (2), a tungsten bronze-type oxide represented by formula (3) and a third perovskite-type oxide represented by formula (4), (K 1-x-y Na x Li y ) q (Nb 1-z Ta z )O 3 (1), SrZrO 3 (2), Ba(Nb 1-w Ta w ) 2 O 6 (3), (Bi 0.5 Na 0.5 )TiO 3 and/or (Bi 0.5 K 0.5 )TiO 3 (4), (1−m−n−p)A+mB+nC+pD (5); in formula (1), 0.20≤x≤0.80, 0.02≤y≤0.10, 0.01≤z≤0.30 and 0.800≤q≤1.050; in formula (3), 0.01≤w≤0.30; and in formula (5), A represents the composite oxide represented by formula (1), B represents the composite oxide represented by formula (2), C represents the composite oxide represented by formula (3), D represents the composite oxide represented by formula (4), and 0.04≤m≤0.07, 0≤n≤0.010 and 0.001≤p≤0.020.

First claim

What is claimed is:

1. A piezoelectric composition comprising a composition represented by formula (5) as the main component,
wherein, the composition represented by formula (5) comprises a first perovskite-type oxide represented by the following formula (1), a second perovskite-type oxide represented by the following formula (2), a tungsten bronze-type oxide represented by the following formula (3) and a third perovskite-type oxide represented by the following formula (4),
(K 1-x-y Na x Li y ) q (Nb 1-z Ta z )O 3   (1)

SrZrO 3   (2)

Ba(Nb 1-w Ta w ) 2 O 6   (3)

(Bi 0.5 Na 0.5 )TiO 3 and/or (Bi 0.5 K 0.5 )TiO 3   (4)

(1 −m−n−p ) A+mB+nC+pD   (5)

wherein, in formula (1), 0.20≤x≤0.80, 0.02≤y≤0.10, 0.01≤z≤0.30 and 0.800≤q≤1.050,

in formula (3), 0.01≤w≤0.30,
in formula (5), A represents the composite oxide represented by the formula (1), B represents the composite oxide represented by the formula (2), C represents the composite oxide represented by the formula (3), D represents the composite oxide represented by the formula (4), and 0.04≤m≤0.07, 0<n≤0.010 and 0.001≤p≤0.020.

2. The piezoelectric composition of claim 1 , wherein,
the piezoelectric composition further comprises at least one of manganese (Mn) and copper (Cu) as the minor component, and the piezoelectric composition is represented by the following formula (6) when the minor component is calculated in terms of manganese oxide (MnO) or copper oxide (CuO) respectively,
(1− s ) E+sF   (6)

in formula (6), E represents the composite oxide represented by the formula (5) which is the main component, F represents the minor component, and 0<s≤0.015).

3. A piezoelectric element comprising a piezoelectric substrate and external electrodes formed on the surfaces of the piezoelectric substrate, wherein,
the piezoelectric substrate is formed by the piezoelectric composition of claim 1 .

4. A sputtering target formed by the piezoelectric composition of claim 1 .

5. A piezoelectric element comprising a piezoelectric substrate and external electrodes formed on the surfaces of the piezoelectric substrate, wherein,
the piezoelectric substrate is formed by the piezoelectric composition of claim 2 .

6. A sputtering target formed by the piezoelectric composition of claim 2 .

Assignees

• Tdk Corp

Inventors

• Nanao Masaru

Classifications

• C04B2235/3213

  Strontium oxides or oxide-forming salts thereof · CPC title

• C01G35/006

  Compounds containing tantalum, with or without oxygen or hydrogen, and containing two or more other elements · CPC title

• C01G23/005

  Alkali titanates · CPC title

• C04B2235/3203

  Lithium oxide or oxide-forming salts thereof · CPC title

• C04B2235/3255

  Niobates or tantalates, e.g. silver niobate · CPC title